[Scan]
initial_time=2016-01-28T22:09:48
final_time=2016-01-28T22:10:08
ip_count=19
run=1026
dataset=9
scan=701
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.80665E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.0066E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.4492E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.57171E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.64134E-8
mult1=-9.18017E-9
mult2=-2.8624E-9
rf_tmon=-3.89008E-3
rf_agc=3.29316E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=5.28908E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68056E0
bslens_imon=2.67835E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19755E1
lens5a_imon=1.99353E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52787E1
cs_ef1b_imon=3.13786E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=1.08472E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08221E0
lens1_imon=1.42743E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6444E1
os_ef1alow_imon=2.9999E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04069E1
cs_ea2_imon=1.41349E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85014E1
cs_ef1a_imon=3.07253E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.11709E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11164E1
os_restr1_imon=4.26663E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=2.48019E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63259E1
os_ef1bup_imon=3.08574E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2551E0
cs_ionrep_imon=9.48089E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02307E1
cs_anode1_imon=1.99138E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.87518E-8
tplens_vset=1.4E-1
tplens_vmon=1.67868E0
tplens_imon=-1.80383E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2636E1
iondef3_imon=1.50433E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26862E1
iondef2_imon=1.5804E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98458E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=7.93219E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28635E0
ionrepsh_imon=8.54721E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33507E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74831E1
cs_ef2b_imon=3.11562E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44136E0
os_ea2_imon=-5.12038E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70777E1
cs_ef2a_imon=3.17991E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07599E0
os_ef2alow_imon=-2.30699E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6132E-1
os_ef2bup_imon=-4.96208E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1084E1
os_restr2_imon=3.37696E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01908E1
cs_anode2_imon=2.1283E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73906E1
iondef1_imon=1.10346E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67686E1
iondef4_imon=1.06279E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.82277E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.06936E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13709E0
cs_ionaccel_imon=-5.03332E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47285E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56E1
einzel_imon=7.53145E-6
window_vset=0.0E0
window_vmon=2.42013E-1
window_imon=-7.95253E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82688E2
mask1_imon=2.39487E-4
mask2_vset=0.0E0
mask2_vmon=-1.86854E1
mask2_imon=-1.05242E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.77214E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.55007E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50098E3
multb_neg_imon=6.7952E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58503E0
defgridb_imon=6.16794E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33215E1
os_fil1_imon=9.40961E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07793E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59964E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31775E1
cs_fil1_imon=6.96306E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.07138E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6149E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02812E-2
os_fil2_imon=-2.11894E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.31201E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.52333E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27904E-1
cs_fil2_imon=-2.42592E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.5127E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21846E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.45884E-1
res40_imon=-1.89691E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80012E1	-7.39098E-4	-8.8E1	3.57628E-4	4.8399E-3	9.39608E-2	2.73457E1	-3.26677E1	-3.26417E1	2.67995E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00197E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80013E1	-9.05991E-4	-8.80001E1	1.19209E-4	4.95911E-3	9.37223E-2	2.72577E1	-3.26497E1	-3.26429E1	2.68069E1	1.20042E-7	2.52025E-3	2.52025E-3	6.3074E-3	3.02875E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80014E1	-6.19888E-4	-8.80002E1	3.8147E-4	5.00679E-3	9.377E-2	2.72197E1	-3.2638E1	-3.25953E1	2.68007E1	1.19667E-7	2.52179E-3	2.52179E-3	6.31879E-3	3.01337E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80013E1	-6.67572E-4	-8.80001E1	3.09944E-4	4.79221E-3	9.36985E-2	2.73454E1	-3.26554E1	-3.2623E1	2.67704E1	1.20226E-7	2.51783E-3	2.51783E-3	6.30221E-3	3.00989E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80012E1	-9.05991E-4	-8.80006E1	2.38419E-4	4.74453E-3	9.377E-2	2.73045E1	-3.26773E1	-3.26166E1	2.68169E1	1.20017E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.8001E1	-1.12057E-3	-8.80004E1	9.53674E-5	4.86374E-3	9.35316E-2	2.7291E1	-3.26793E1	-3.26542E1	2.68182E1	1.19749E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80012E1	-7.39098E-4	-8.80006E1	4.05312E-4	4.91142E-3	9.36031E-2	2.72749E1	-3.267E1	-3.26233E1	2.67887E1	1.19978E-7	2.51025E-3	2.51025E-3	6.32418E-3	3.00144E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80014E1	-5.00679E-4	-8.80002E1	2.38419E-4	4.48227E-3	9.38416E-2	2.73297E1	-3.26687E1	-3.26494E1	2.68052E1	1.1967E-7	2.51423E-3	2.51423E-3	6.3275E-3	3.0101E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80013E1	-5.72205E-4	-8.80001E1	1.19209E-4	4.69685E-3	9.36508E-2	2.72997E1	-3.26897E1	-3.26134E1	2.6807E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80012E1	-5.72205E-4	-8.80004E1	7.15256E-5	4.62532E-3	9.37223E-2	2.73249E1	-3.26693E1	-3.26561E1	2.67974E1	1.19861E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80015E1	-6.67572E-4	-8.80003E1	5.00679E-4	4.62532E-3	9.3627E-2	2.72829E1	-3.26849E1	-3.26873E1	2.68082E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.98222E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80014E1	-5.48363E-4	-8.80002E1	3.33786E-4	4.72069E-3	9.35793E-2	2.73057E1	-3.26773E1	-3.26225E1	2.68028E1	1.19757E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80012E1	-9.53674E-4	-8.80005E1	-2.38419E-5	4.91142E-3	9.36985E-2	2.73213E1	-3.26741E1	-3.26404E1	2.68028E1	1.19749E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.0148E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80011E1	-1.0252E-3	-8.80003E1	2.86102E-4	4.64916E-3	9.39369E-2	2.72787E1	-3.26771E1	-3.2617E1	2.68094E1	1.19705E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80013E1	-5.00679E-4	-8.80002E1	3.33786E-4	4.29153E-3	9.38177E-2	2.73219E1	-3.26512E1	-3.26236E1	2.6789E1	1.20017E-7	2.51443E-3	2.51443E-3	6.34588E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80011E1	-5.24521E-4	-8.80001E1	4.52995E-4	4.48227E-3	9.36031E-2	2.72865E1	-3.26777E1	-3.26092E1	2.68046E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9926E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80013E1	-7.15256E-4	-8.80003E1	6.67572E-4	4.62532E-3	9.40084E-2	2.73086E1	-3.26555E1	-3.26207E1	2.67914E1	1.19757E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80011E1	-3.8147E-4	-8.80003E1	5.48363E-4	4.52995E-3	9.40084E-2	2.73641E1	-3.26231E1	-3.26071E1	2.67943E1	1.198E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80011E1	-4.52995E-4	-8.80004E1	4.52995E-4	4.24385E-3	9.36508E-2	2.72228E1	-3.26386E1	-3.26014E1	2.68118E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80013E1	-3.09944E-4	-8.80006E1	2.38419E-4	4.45843E-3	9.36747E-2	2.73906E1	-3.26862E1	-3.2636E1	2.67686E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
