[Scan]
initial_time=2016-01-28T22:10:15
final_time=2016-01-28T22:10:34
ip_count=19
run=1026
dataset=9
scan=702
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.85732E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.11842E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=1.48493E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.54649E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.63535E-8
mult1=-9.921E-9
mult2=-2.81642E-9
rf_tmon=-4.206E-3
rf_agc=3.34117E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=5.41496E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71754E0
bslens_imon=2.64236E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19677E1
lens5a_imon=2.01058E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05178E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52992E1
cs_ef1b_imon=3.17263E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04578E2
lens23_imon=1.02167E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04994E1
cs_ea1_imon=1.07441E-5
lens1_vset=-2.7E0
lens1_vmon=-3.12386E0
lens1_imon=1.58408E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64993E1
os_ef1alow_imon=3.00901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03643E1
cs_ea2_imon=1.38835E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84815E1
cs_ef1a_imon=3.02343E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.11923E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10901E1
os_restr1_imon=4.29202E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15064E1
os_ea1_imon=2.4661E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.11965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21729E0
cs_ionrep_imon=9.68579E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02278E1
cs_anode1_imon=1.97827E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.86598E-8
tplens_vset=1.4E-1
tplens_vmon=1.67093E0
tplens_imon=-1.36074E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.49843E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.58974E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02887E2
lens6_imon=2.9864E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=8.43918E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27097E0
ionrepsh_imon=8.56733E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33487E1
lens5b_imon=2.20171E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.10019E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40724E0
os_ea2_imon=-5.99737E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70699E1
cs_ef2a_imon=3.20254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.14045E0
os_ef2alow_imon=-2.16901E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54176E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10385E1
os_restr2_imon=3.34634E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23023E2
cs_ionfoca_imon=6.31096E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01587E1
cs_anode2_imon=2.11162E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73417E1
iondef1_imon=1.09706E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.09566E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.81847E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.07722E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17099E0
cs_ionaccel_imon=-5.7245E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47169E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55937E1
einzel_imon=7.60495E-6
window_vset=0.0E0
window_vmon=2.13138E-1
window_imon=-6.98589E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.862E1
mask2_imon=-9.32847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.71433E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.47908E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.31084E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44394E0
defgridb_imon=6.2384E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33209E1
os_fil1_imon=9.41501E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07167E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.5984E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31762E1
cs_fil1_imon=6.78844E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.82177E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61445E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.99037E-2
os_fil2_imon=-2.14339E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.41562E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57048E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.4257E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.6708E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21835E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.91147E-1
res40_imon=-2.11134E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80013E1	-7.86781E-4	-8.80007E1	3.57628E-4	4.36306E-3	9.41753E-2	2.73327E1	-3.26717E1	-3.26176E1	2.6837E1	1.20004E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.0148E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80013E1	-3.33786E-4	-8.80004E1	3.09944E-4	4.31538E-3	9.38177E-2	2.72323E1	-3.26242E1	-3.26352E1	2.68022E1	1.19861E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.39421E-2	-8.80012E1	-8.10623E-4	-8.80004E1	5.24521E-4	4.86374E-3	9.38416E-2	2.73567E1	-3.26625E1	-3.26509E1	2.67989E1	1.19925E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00144E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.44059E-2	-8.80015E1	-7.15256E-4	-8.80006E1	9.53674E-5	4.60148E-3	9.39608E-2	2.72379E1	-3.26741E1	-3.26631E1	2.68076E1	1.1974E-7	2.52553E-3	2.52553E-3	6.32858E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.39421E-2	-8.80011E1	-7.62939E-4	-8.80003E1	9.53674E-5	4.79221E-3	9.408E-2	2.72587E1	-3.26311E1	-3.26399E1	2.68105E1	1.20042E-7	2.51709E-3	2.51709E-3	6.30212E-3	2.99845E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80012E1	-9.29832E-4	-8.80004E1	-1.19209E-4	4.88758E-3	9.408E-2	2.73943E1	-3.26675E1	-3.26107E1	2.67947E1	1.20092E-7	2.51624E-3	2.51624E-3	6.31163E-3	2.99394E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80015E1	-1.19209E-3	-8.80006E1	2.38419E-5	4.673E-3	9.39608E-2	2.7229E1	-3.26779E1	-3.26354E1	2.68082E1	1.19991E-7	2.52154E-3	2.52154E-3	6.29919E-3	3.00432E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.80011E1	-6.91414E-4	-8.80005E1	-1.19209E-4	4.62532E-3	9.36747E-2	2.73351E1	-3.26735E1	-3.26681E1	2.68148E1	1.20158E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.02769E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.8001E1	-6.19888E-4	-8.80005E1	2.6226E-4	4.60148E-3	9.37223E-2	2.73039E1	-3.2675E1	-3.25979E1	2.67932E1	1.19549E-7	2.52428E-3	2.52428E-3	6.28552E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80013E1	-1.0252E-3	-8.80007E1	2.86102E-4	4.41074E-3	9.37223E-2	2.72903E1	-3.26649E1	-3.26319E1	2.6804E1	1.20031E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.01742E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80013E1	-8.34465E-4	-8.80003E1	3.57628E-4	4.41074E-3	9.37462E-2	2.72618E1	-3.26242E1	-3.26224E1	2.67964E1	1.20069E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80015E1	-5.72205E-4	-8.80003E1	3.09944E-4	4.24385E-3	9.34839E-2	2.73733E1	-3.26971E1	-3.26484E1	2.68203E1	1.19851E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.41738E-2	-8.80014E1	-5.72205E-4	-8.80003E1	1.43051E-4	4.12464E-3	9.38654E-2	2.73604E1	-3.26565E1	-3.26585E1	2.68088E1	1.20016E-7	2.51345E-3	2.51345E-3	6.32273E-3	2.99663E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.44059E-2	-8.80012E1	-7.39098E-4	-8.80006E1	2.6226E-4	4.33922E-3	9.40084E-2	2.73075E1	-3.2632E1	-3.26464E1	2.67896E1	1.1995E-7	2.51758E-3	2.51758E-3	6.29581E-3	2.99535E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80013E1	-6.4373E-4	-8.80006E1	4.05312E-4	4.33922E-3	9.39608E-2	2.72821E1	-3.27009E1	-3.26313E1	2.67914E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99686E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80014E1	-4.05312E-4	-8.80003E1	2.14577E-4	4.3869E-3	9.41992E-2	2.73357E1	-3.26682E1	-3.26529E1	2.67889E1	1.20226E-7	2.52209E-3	2.52209E-3	6.28006E-3	3.01609E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80014E1	-6.19888E-4	-8.80002E1	4.52995E-4	4.41074E-3	9.408E-2	2.7308E1	-3.26213E1	-3.26154E1	2.68082E1	1.19925E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.99879E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80012E1	-3.57628E-4	-8.80009E1	2.86102E-4	4.41074E-3	9.36747E-2	2.73305E1	-3.26531E1	-3.26655E1	2.68052E1	1.19697E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.02511E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80011E1	-6.4373E-4	-8.80008E1	3.8147E-4	4.57764E-3	9.40084E-2	2.73434E1	-3.26744E1	-3.25853E1	2.68169E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80013E1	-9.29832E-4	-8.80006E1	3.33786E-4	4.29153E-3	9.39131E-2	2.73417E1	-3.26567E1	-3.26272E1	2.6792E1	1.20209E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.99941E-1
