[Scan]
initial_time=2016-01-28T22:11:35
final_time=2016-01-28T22:11:54
ip_count=19
run=1026
dataset=9
scan=705
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.84446E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-5.73468E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=1.42757E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.59168E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.64067E-8
mult1=-1.02341E-8
mult2=-2.79446E-9
rf_tmon=-4.2781E-3
rf_agc=3.34477E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=5.33593E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65075E0
bslens_imon=2.57244E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.99529E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12435E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=3.18056E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.0229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04602E1
cs_ea1_imon=1.09578E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06226E0
lens1_imon=1.52932E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6435E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03856E1
cs_ea2_imon=1.38925E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84058E1
cs_ef1a_imon=3.04253E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.11833E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.32302E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15067E1
os_ea1_imon=2.47572E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25455E0
cs_ionrep_imon=9.55109E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93365E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01623E1
cs_anode1_imon=1.96098E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.87658E-8
tplens_vset=1.4E-1
tplens_vmon=1.66714E0
tplens_imon=-2.99822E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.51156E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.58062E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98533E-4
ql6_vset=1.0E-1
ql6_vmon=9.40561E-2
ql6_imon=8.56566E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25149E0
ionrepsh_imon=8.71732E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33872E1
lens5b_imon=2.19253E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.14704E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46085E0
os_ea2_imon=-6.81811E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00586E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71438E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04855E0
os_ef2alow_imon=-2.73483E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13041E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10985E1
os_restr2_imon=3.37733E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.29414E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.08459E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73237E1
iondef1_imon=1.08844E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.11332E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.78895E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=7.07615E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13555E0
cs_ionaccel_imon=-9.83303E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02035E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56675E1
einzel_imon=7.92931E-6
window_vset=0.0E0
window_vmon=2.40768E-1
window_imon=-1.0734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86758E1
mask2_imon=-4.5352E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.3069E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.60169E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.3473E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55677E0
defgridb_imon=6.23807E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33207E1
os_fil1_imon=9.41333E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08585E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59795E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31789E1
cs_fil1_imon=7.50322E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.05293E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.616E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.11986E-2
os_fil2_imon=-2.696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06724E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61623E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28098E-1
cs_fil2_imon=-2.48577E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21763E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.39781E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80011E1	-6.19888E-4	-8.80012E1	-4.76837E-5	4.33922E-3	9.377E-2	2.72137E1	-3.26402E1	-3.26077E1	2.68064E1	1.19766E-7	2.51915E-3	2.51915E-3	6.29624E-3	2.99348E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.35556E-2	-8.8001E1	-6.67572E-4	-8.80007E1	1.90735E-4	4.36306E-3	9.39608E-2	2.74406E1	-3.26545E1	-3.26203E1	2.6792E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80012E1	-6.67572E-4	-8.80006E1	-2.38419E-5	4.76837E-3	9.39131E-2	2.71994E1	-3.26669E1	-3.26158E1	2.6807E1	1.20028E-7	2.51886E-3	2.51886E-3	6.31779E-3	2.9926E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80011E1	-7.86781E-4	-8.80004E1	2.6226E-4	4.72069E-3	9.35793E-2	2.7376E1	-3.26494E1	-3.2614E1	2.6822E1	1.19757E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.9952E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80009E1	-7.15256E-4	-8.80004E1	1.19209E-4	4.79221E-3	9.35793E-2	2.72114E1	-3.26392E1	-3.26482E1	2.68076E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80008E1	-9.29832E-4	-8.80007E1	2.86102E-4	4.88758E-3	9.408E-2	2.74036E1	-3.26609E1	-3.26104E1	2.68184E1	1.19978E-7	2.51136E-3	2.51136E-3	6.32418E-3	2.99879E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.41738E-2	-8.80012E1	-6.67572E-4	-8.80003E1	4.29153E-4	4.74453E-3	9.37939E-2	2.72136E1	-3.2659E1	-3.25988E1	2.68094E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80012E1	-6.91414E-4	-8.80001E1	5.72205E-4	4.55379E-3	9.37462E-2	2.73767E1	-3.26542E1	-3.26358E1	2.67914E1	1.19991E-7	2.51814E-3	2.51814E-3	6.27577E-3	2.98592E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.80014E1	-5.00679E-4	-8.80004E1	3.09944E-4	4.60148E-3	9.36508E-2	2.72192E1	-3.26879E1	-3.26518E1	2.68082E1	1.19978E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.99083E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80013E1	-5.96046E-4	-8.80003E1	4.76837E-4	4.72069E-3	9.41038E-2	2.74E1	-3.26777E1	-3.26506E1	2.68202E1	1.20158E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.9943E-1
1.4E1	1.0E0	1.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80013E1	-5.96046E-4	-8.80002E1	8.58307E-4	4.36306E-3	9.38654E-2	2.73478E1	-3.27396E1	-3.2599E1	2.6795E1	1.20278E-7	2.52647E-3	2.52647E-3	6.33486E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.41738E-2	-8.80012E1	-6.91414E-4	-8.80003E1	6.4373E-4	4.48227E-3	9.39131E-2	2.71794E1	-3.26732E1	-3.26349E1	2.68012E1	1.19835E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.02527E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80016E1	-8.10623E-4	-8.79999E1	4.05312E-4	4.673E-3	9.40561E-2	2.73387E1	-3.26801E1	-3.2596E1	2.68226E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80017E1	-9.77516E-4	-8.80001E1	2.6226E-4	4.3869E-3	9.39846E-2	2.74421E1	-3.26524E1	-3.26561E1	2.68094E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.99E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80013E1	-7.15256E-4	-8.80003E1	1.66893E-4	4.50611E-3	9.408E-2	2.72865E1	-3.26464E1	-3.2626E1	2.67956E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9874E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80015E1	-8.82149E-4	-8.80001E1	1.66893E-4	4.33922E-3	9.38892E-2	2.72172E1	-3.26455E1	-3.26077E1	2.67878E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9978E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.43285E-2	-8.80013E1	-6.4373E-4	-8.80003E1	2.38419E-4	4.31538E-3	9.377E-2	2.71945E1	-3.26392E1	-3.26561E1	2.67866E1	1.20004E-7	2.51739E-3	2.51739E-3	6.35059E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80013E1	-5.00679E-4	-8.8E1	9.53674E-5	4.45843E-3	9.39369E-2	2.71348E1	-3.26816E1	-3.26306E1	2.67845E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9952E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80012E1	-4.76837E-4	-8.80004E1	-7.15256E-5	4.48227E-3	9.37939E-2	2.72348E1	-3.26392E1	-3.26783E1	2.6774E1	1.19891E-7	2.52025E-3	2.52025E-3	6.32858E-3	3.02368E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80014E1	-9.53674E-4	-8.80004E1	1.43051E-4	4.55379E-3	9.40561E-2	2.73237E1	-3.26609E1	-3.2626E1	2.68088E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9978E-1
