[Scan]
initial_time=2016-01-28T22:12:55
final_time=2016-01-28T22:13:14
ip_count=19
run=1026
dataset=9
scan=708
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.8668E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-5.60653E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.43429E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.54393E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.63657E-8
mult1=-1.015E-8
mult2=-2.7687E-9
rf_tmon=-3.9523E-3
rf_agc=3.37936E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=5.28049E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62528E0
bslens_imon=2.62788E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19947E1
lens5a_imon=1.98379E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53696E1
cs_ef1b_imon=3.16393E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02283E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04856E1
cs_ea1_imon=1.10022E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08402E0
lens1_imon=1.57162E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64388E1
os_ef1alow_imon=2.9919E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04075E1
cs_ea2_imon=1.39438E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.06176E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.12419E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11251E1
os_restr1_imon=4.3198E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15348E1
os_ea1_imon=2.4719E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.0767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26532E0
cs_ionrep_imon=9.708E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93499E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02024E1
cs_anode1_imon=1.95663E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.8704E-8
tplens_vset=1.4E-1
tplens_vmon=1.66186E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26083E1
iondef3_imon=1.49388E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26432E1
iondef2_imon=1.58508E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98468E-4
ql6_vset=1.0E-1
ql6_vmon=9.41753E-2
ql6_imon=8.57818E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27132E0
ionrepsh_imon=8.48593E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3367E1
lens5b_imon=2.16584E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74878E1
cs_ef2b_imon=3.11771E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43054E0
os_ea2_imon=-5.62508E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00688E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71159E1
cs_ef2a_imon=3.21119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06498E0
os_ef2alow_imon=-2.47728E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.48201E-1
os_ef2bup_imon=-5.22968E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10932E1
os_restr2_imon=3.35959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01682E1
cs_anode2_imon=2.11093E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73161E1
iondef1_imon=1.08616E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.06661E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.81917E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.07203E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13535E0
cs_ionaccel_imon=-7.95253E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02204E2
cs_ionfocb_imon=1.47362E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56793E1
einzel_imon=7.84075E-6
window_vset=0.0E0
window_vmon=2.53018E-1
window_imon=-9.37738E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39487E-4
mask2_vset=0.0E0
mask2_vmon=-1.86553E1
mask2_imon=-6.9447E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.55224E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.49599E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.1557E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41059E0
defgridb_imon=6.1355E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.332E1
os_fil1_imon=9.40798E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07937E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59832E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31838E1
cs_fil1_imon=7.32796E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.37836E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61582E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1442E-2
os_fil2_imon=-2.35641E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15562E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.65351E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27779E-1
cs_fil2_imon=-2.18265E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40844E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21825E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30212E-3
inlet_lpb_pmon=3.01104E-1
chamber_ion_pmon=1.19991E-7
chamber_cvt_pmon=2.52131E-3
foreline_cvt_pmon=2.52131E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.44726E-1
res40_imon=-2.35912E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80013E1	-8.34465E-4	-8.80005E1	4.52995E-4	4.86374E-3	9.41277E-2	2.73718E1	-3.26661E1	-3.26272E1	2.68334E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00041E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.36328E-2	-8.8001E1	-5.72205E-4	-8.80005E1	2.38419E-5	5.22137E-3	9.38416E-2	2.71735E1	-3.26321E1	-3.2596E1	2.6825E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.03286E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.8001E1	-4.76837E-4	-8.80003E1	3.09944E-4	4.76837E-3	9.39846E-2	2.73021E1	-3.26708E1	-3.26201E1	2.6804E1	1.19705E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01347E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80013E1	-5.72205E-4	-8.80002E1	3.09944E-4	4.41074E-3	9.39846E-2	2.74803E1	-3.26325E1	-3.26402E1	2.6798E1	1.198E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80014E1	-8.82149E-4	-8.80003E1	2.86102E-4	4.72069E-3	9.377E-2	2.72162E1	-3.26524E1	-3.25942E1	2.67862E1	1.19757E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80013E1	-5.48363E-4	-8.80001E1	7.15256E-5	4.48227E-3	9.40323E-2	2.74447E1	-3.26383E1	-3.26027E1	2.6802E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.47149E-2	-8.80015E1	-4.52995E-4	-8.8E1	2.38419E-4	4.76837E-3	9.39131E-2	2.71871E1	-3.26644E1	-3.25924E1	2.68262E1	1.19978E-7	2.51581E-3	2.51581E-3	6.30182E-3	3.00144E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.50241E-2	-8.80015E1	-8.10623E-4	-8.80003E1	2.6226E-4	4.50611E-3	9.38654E-2	2.73598E1	-3.26416E1	-3.26188E1	2.68106E1	1.19601E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.48695E-2	-8.80012E1	-6.4373E-4	-8.79999E1	4.05312E-4	4.24385E-3	9.40323E-2	2.72775E1	-3.26681E1	-3.26146E1	2.6804E1	1.19809E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80013E1	-4.76837E-4	-8.80004E1	1.66893E-4	4.52995E-3	9.39846E-2	2.7388E1	-3.265E1	-3.2632E1	2.68106E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02922E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80013E1	-6.4373E-4	-8.80004E1	2.14577E-4	4.673E-3	9.40084E-2	2.75723E1	-3.2688E1	-3.26248E1	2.68058E1	1.19646E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80015E1	-8.10623E-4	-8.80004E1	4.29153E-4	4.29153E-3	9.38654E-2	2.74915E1	-3.26679E1	-3.26124E1	2.67943E1	1.19953E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.01995E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.80015E1	-6.4373E-4	-8.80004E1	3.33786E-4	4.45843E-3	9.3627E-2	2.74144E1	-3.26645E1	-3.26014E1	2.68244E1	1.20017E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80013E1	-8.82149E-4	-8.8E1	3.57628E-4	4.74453E-3	9.41992E-2	2.73562E1	-3.26765E1	-3.25996E1	2.68112E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02396E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80012E1	-8.10623E-4	-8.80002E1	1.66893E-4	4.52995E-3	9.41992E-2	2.72341E1	-3.26542E1	-3.26083E1	2.68113E1	1.20226E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.03185E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80011E1	-9.29832E-4	-8.80004E1	1.90735E-4	4.74453E-3	9.39608E-2	2.72745E1	-3.26681E1	-3.2638E1	2.68082E1	1.20226E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.01347E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80012E1	-8.10623E-4	-8.80002E1	3.09944E-4	4.57764E-3	9.40084E-2	2.7206E1	-3.26603E1	-3.26579E1	2.67938E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80011E1	-6.91414E-4	-8.80002E1	1.90735E-4	4.52995E-3	9.40561E-2	2.73654E1	-3.26376E1	-3.26104E1	2.68007E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9978E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80012E1	-6.91414E-4	-8.8E1	2.6226E-4	4.60148E-3	9.408E-2	2.73509E1	-3.26619E1	-3.26515E1	2.67995E1	1.20004E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80013E1	-6.91414E-4	-8.80002E1	1.90735E-4	4.17233E-3	9.41753E-2	2.73161E1	-3.26432E1	-3.26083E1	2.6813E1	1.19991E-7	2.52131E-3	2.52131E-3	6.30212E-3	3.01104E-1
