[Scan]
initial_time=2016-01-28T22:13:21
final_time=2016-01-28T22:13:41
ip_count=19
run=1026
dataset=9
scan=709
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.87351E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.28698E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=1.43319E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.48788E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.63963E-8
mult1=-9.96916E-9
mult2=-2.89227E-9
rf_tmon=-4.18798E-3
rf_agc=3.28289E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=5.41031E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.60343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19671E1
lens5a_imon=1.96988E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05203E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53546E1
cs_ef1b_imon=3.18687E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04746E1
cs_ea1_imon=1.09564E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02593E0
lens1_imon=1.49913E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64817E1
os_ef1alow_imon=2.97835E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04221E1
cs_ea2_imon=1.38835E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84209E1
cs_ef1a_imon=3.04785E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.12093E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11471E1
os_restr1_imon=4.28887E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1481E1
os_ea1_imon=2.4884E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6367E1
os_ef1bup_imon=3.08956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28277E0
cs_ionrep_imon=9.44157E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93487E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01705E1
cs_anode1_imon=1.94307E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.868E-8
tplens_vset=1.4E-1
tplens_vmon=1.67801E0
tplens_imon=-2.42257E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.50268E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.57877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.98473E-4
ql6_vset=1.0E-1
ql6_vmon=9.42945E-2
ql6_imon=8.2705E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31817E0
ionrepsh_imon=8.35497E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33487E1
lens5b_imon=2.18614E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74559E1
cs_ef2b_imon=3.13647E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43969E0
os_ea2_imon=-7.37774E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00679E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71148E1
cs_ef2a_imon=3.18269E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07773E0
os_ef2alow_imon=-2.45295E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87384E-1
os_ef2bup_imon=-5.26095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.35159E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.30778E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01693E1
cs_anode2_imon=2.08069E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7251E1
iondef1_imon=1.07511E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.11075E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.80351E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.0649E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11277E0
cs_ionaccel_imon=-9.37738E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02046E2
cs_ionfocb_imon=1.47449E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56098E1
einzel_imon=7.61486E-6
window_vset=0.0E0
window_vmon=1.95097E-1
window_imon=-9.30788E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82587E2
mask1_imon=2.39143E-4
mask2_vset=0.0E0
mask2_vmon=-1.86836E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.51613E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.78701E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.03477E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45576E0
defgridb_imon=6.08621E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33191E1
os_fil1_imon=9.41899E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08574E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59831E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31847E1
cs_fil1_imon=7.60598E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0224E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6167E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.14232E-2
os_fil2_imon=-2.368E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11508E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.65907E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-1.98572E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23468E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21804E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.9841E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.44929E-1
res40_imon=-2.33827E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80012E1	-1.19209E-3	-8.80002E1	-2.38419E-5	4.673E-3	9.36985E-2	2.72811E1	-3.26579E1	-3.26446E1	2.68202E1	1.20174E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01347E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80011E1	-9.53674E-4	-8.80004E1	1.43051E-4	4.43459E-3	9.35793E-2	2.72951E1	-3.26756E1	-3.26113E1	2.67998E1	1.19749E-7	2.52061E-3	2.52061E-3	6.33977E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.8001E1	-1.07288E-3	-8.80004E1	1.19209E-4	4.36306E-3	9.36508E-2	2.72954E1	-3.26562E1	-3.26192E1	2.67937E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01738E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80009E1	-1.00136E-3	-8.80006E1	-9.53674E-5	4.41074E-3	9.39369E-2	2.72973E1	-3.26573E1	-3.26338E1	2.68233E1	1.19991E-7	2.52025E-3	2.52025E-3	6.3074E-3	3.02875E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.8001E1	-9.29832E-4	-8.80006E1	-1.43051E-4	4.72069E-3	9.36031E-2	2.73147E1	-3.26693E1	-3.25978E1	2.6822E1	1.19965E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80014E1	-1.00136E-3	-8.80003E1	2.86102E-4	4.3869E-3	9.39131E-2	2.7278E1	-3.26514E1	-3.26178E1	2.68088E1	1.20158E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.9841E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.39421E-2	-8.80015E1	-8.82149E-4	-8.80003E1	3.57628E-4	4.76837E-3	9.37939E-2	2.73106E1	-3.2648E1	-3.26089E1	2.68124E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.98222E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80011E1	-8.10623E-4	-8.80006E1	4.29153E-4	4.62532E-3	9.38654E-2	2.72827E1	-3.26632E1	-3.26767E1	2.68172E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.44831E-2	-8.80014E1	-8.34465E-4	-8.80007E1	1.19209E-4	4.41074E-3	9.40084E-2	2.72733E1	-3.26248E1	-3.26122E1	2.67962E1	1.19705E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80013E1	-7.39098E-4	-8.80003E1	1.43051E-4	4.88758E-3	9.38177E-2	2.73063E1	-3.26661E1	-3.25835E1	2.6801E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80013E1	-9.05991E-4	-8.80002E1	5.00679E-4	4.55379E-3	9.38892E-2	2.73333E1	-3.2626E1	-3.26669E1	2.68001E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80012E1	-9.77516E-4	-8.80004E1	2.38419E-4	4.98295E-3	9.38892E-2	2.73565E1	-3.2645E1	-3.26432E1	2.6802E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80011E1	-6.91414E-4	-8.80004E1	4.52995E-4	4.91142E-3	9.41515E-2	2.73129E1	-3.26747E1	-3.25906E1	2.68022E1	1.20017E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80012E1	-7.62939E-4	-8.80004E1	4.52995E-4	4.50611E-3	9.41992E-2	2.72644E1	-3.26844E1	-3.26372E1	2.6803E1	1.20031E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.00942E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80011E1	-8.58307E-4	-8.80003E1	4.52995E-4	4.8399E-3	9.41277E-2	2.72773E1	-3.26776E1	-3.26202E1	2.67976E1	1.19851E-7	2.5131E-3	2.5131E-3	6.33977E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80012E1	-7.86781E-4	-8.80004E1	5.00679E-4	4.74453E-3	9.41038E-2	2.72931E1	-3.2638E1	-3.26416E1	2.68016E1	1.19891E-7	2.52236E-3	2.52236E-3	6.3074E-3	2.99343E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80017E1	-7.15256E-4	-8.80003E1	4.52995E-4	4.81606E-3	9.39846E-2	2.73399E1	-3.26536E1	-3.26567E1	2.67846E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80016E1	-6.91414E-4	-8.80005E1	2.14577E-4	4.43459E-3	9.39608E-2	2.73273E1	-3.26771E1	-3.26561E1	2.68039E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80011E1	-8.34465E-4	-8.80008E1	3.8147E-4	4.52995E-3	9.39846E-2	2.72361E1	-3.26573E1	-3.26561E1	2.67994E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80012E1	-5.24521E-4	-8.80006E1	1.43051E-4	4.55379E-3	9.42945E-2	2.7251E1	-3.26645E1	-3.2626E1	2.6795E1	1.19953E-7	2.51096E-3	2.51096E-3	6.32356E-3	2.9841E-1
