[Scan]
initial_time=2016-01-28T22:13:48
final_time=2016-01-28T22:14:08
ip_count=19
run=1026
dataset=9
scan=710
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.87315E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-5.80263E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.39958E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.6076E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.65453E-8
mult1=-1.02341E-8
mult2=-2.80444E-9
rf_tmon=-4.77078E-3
rf_agc=3.30272E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=5.81586E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62504E0
bslens_imon=2.53938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20141E1
lens5a_imon=1.99933E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12442E2
lens4a_imon=2.05284E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53755E1
cs_ef1b_imon=3.19472E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02158E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=1.08146E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08307E0
lens1_imon=1.74235E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64895E1
os_ef1alow_imon=2.9814E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03611E1
cs_ea2_imon=1.40468E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84163E1
cs_ef1a_imon=3.03866E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.11739E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11236E1
os_restr1_imon=4.30665E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15275E1
os_ea1_imon=2.48123E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63897E1
os_ef1bup_imon=3.10004E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25087E0
cs_ionrep_imon=9.5768E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02008E1
cs_anode1_imon=1.96379E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.87496E-8
tplens_vset=1.4E-1
tplens_vmon=1.67143E0
tplens_imon=-1.60249E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.50495E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.59898E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.98327E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=8.69739E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27291E0
ionrepsh_imon=8.5851E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33627E1
lens5b_imon=2.1907E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74508E1
cs_ef2b_imon=3.12885E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4584E0
os_ea2_imon=-7.44252E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00483E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71389E1
cs_ef2a_imon=3.19959E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08949E0
os_ef2alow_imon=-2.51069E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.68939E-1
os_ef2bup_imon=-5.42616E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10637E1
os_restr2_imon=3.34106E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.32867E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01634E1
cs_anode2_imon=2.09927E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72612E1
iondef1_imon=1.09542E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.09139E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.88852E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=7.06245E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14761E0
cs_ionaccel_imon=-8.82669E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47346E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.83754E-6
window_vset=0.0E0
window_vmon=2.04498E-1
window_imon=-8.34015E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86743E1
mask2_imon=-6.35658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.2261E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.7229E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=6.94695E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4679E0
defgridb_imon=6.40335E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33181E1
os_fil1_imon=9.41871E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07622E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59822E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31752E1
cs_fil1_imon=7.26781E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.69425E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61425E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.0016E-2
os_fil2_imon=-2.26953E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.30265E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.53218E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30459E-1
cs_fil2_imon=-2.16349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22354E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21755E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40077E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.84335E-1
res40_imon=-2.36847E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=252
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80012E1	-3.09944E-4	-8.80003E1	2.38419E-5	4.41074E-3	9.38654E-2	2.7281E1	-3.26915E1	-3.26182E1	2.68227E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01347E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.41738E-2	-8.80011E1	-4.76837E-4	-8.80002E1	-9.53674E-5	4.48227E-3	9.36747E-2	2.72361E1	-3.26815E1	-3.25818E1	2.67908E1	1.20177E-7	2.51783E-3	2.51783E-3	6.3074E-3	3.00989E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.44831E-2	-8.80011E1	-5.00679E-4	-8.80004E1	7.15256E-5	4.3869E-3	9.377E-2	2.72366E1	-3.26597E1	-3.2617E1	2.68166E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.02511E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80009E1	-4.05312E-4	-8.80003E1	2.86102E-4	4.19617E-3	9.39608E-2	2.73418E1	-3.26793E1	-3.2626E1	2.67901E1	1.19757E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9978E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40967E-2	-8.80011E1	-5.72205E-4	-8.80003E1	1.90735E-4	4.62532E-3	9.38177E-2	2.72883E1	-3.26689E1	-3.26028E1	2.68105E1	1.19861E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80011E1	-5.96046E-4	-8.80001E1	2.38419E-5	4.31538E-3	9.38416E-2	2.71939E1	-3.26675E1	-3.26188E1	2.67902E1	1.19902E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80013E1	-7.39098E-4	-8.80003E1	-2.38419E-4	4.26769E-3	9.39608E-2	2.74428E1	-3.26793E1	-3.26474E1	2.6786E1	1.19757E-7	2.51935E-3	2.51935E-3	6.31837E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.80013E1	-3.8147E-4	-8.80005E1	-9.53674E-5	4.72069E-3	9.40323E-2	2.71588E1	-3.26738E1	-3.26325E1	2.67884E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80016E1	-5.48363E-4	-8.80005E1	2.14577E-4	4.36306E-3	9.40323E-2	2.72555E1	-3.26526E1	-3.26313E1	2.68001E1	1.20158E-7	2.52815E-3	2.52815E-3	6.31817E-3	3.0071E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.44831E-2	-8.80015E1	-9.53674E-4	-8.80006E1	-9.53674E-5	4.57764E-3	9.39131E-2	2.7349E1	-3.26699E1	-3.26134E1	2.67986E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.9892E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.47149E-2	-8.80013E1	-5.24521E-4	-8.80004E1	9.53674E-5	4.36306E-3	9.408E-2	2.72763E1	-3.25888E1	-3.26254E1	2.68166E1	1.19872E-7	2.52362E-3	2.52362E-3	6.32978E-3	3.00144E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80017E1	-9.05991E-4	-8.80003E1	-1.90735E-4	4.45843E-3	9.37223E-2	2.73267E1	-3.26951E1	-3.26314E1	2.68076E1	1.19757E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80013E1	-5.96046E-4	-8.80003E1	-7.15256E-5	4.24385E-3	9.40084E-2	2.7288E1	-3.26614E1	-3.26231E1	2.68064E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01223E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.37103E-2	-8.80015E1	-5.24521E-4	-8.80003E1	-2.86102E-4	4.41074E-3	9.41038E-2	2.72883E1	-3.26146E1	-3.26645E1	2.68058E1	1.19705E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.02133E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80014E1	-7.39098E-4	-8.80003E1	1.90735E-4	4.55379E-3	9.41515E-2	2.731E1	-3.26474E1	-3.26346E1	2.68136E1	1.19697E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.0148E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-7.40192E-2	-8.80012E1	-5.72205E-4	-8.80002E1	2.14577E-4	4.62532E-3	9.39131E-2	2.73136E1	-3.2675E1	-3.2618E1	2.68001E1	1.19607E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.00676E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.48695E-2	-8.80012E1	-6.67572E-4	-8.80006E1	3.57628E-4	4.76837E-3	9.408E-2	2.73463E1	-3.26703E1	-3.26516E1	2.68113E1	1.19991E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.42513E-2	-8.80012E1	-4.52995E-4	-8.80003E1	1.19209E-4	4.55379E-3	9.38177E-2	2.72833E1	-3.26378E1	-3.26555E1	2.67931E1	1.19713E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.99613E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.41738E-2	-8.80012E1	-7.15256E-4	-8.80004E1	4.76837E-5	4.62532E-3	9.38177E-2	2.73358E1	-3.26431E1	-3.26431E1	2.68082E1	1.20363E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.80013E1	-3.8147E-4	-8.80003E1	1.66893E-4	4.55379E-3	9.39369E-2	2.72612E1	-3.26645E1	-3.26176E1	2.6801E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01223E-1
