[Scan]
initial_time=2016-01-28T22:14:41
final_time=2016-01-28T22:15:01
ip_count=19
run=1026
dataset=9
scan=712
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.47149E-2
qbias_imon=-3.85407E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.07276E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.41239E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.54335E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.64036E-8
mult1=-9.92494E-9
mult2=-2.8722E-9
rf_tmon=-5.37663E-3
rf_agc=3.26956E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=5.46289E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.63174E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19659E1
lens5a_imon=1.99041E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12444E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=3.17587E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05224E1
cs_ea1_imon=1.096E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05897E0
lens1_imon=1.43896E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.96576E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0385E1
cs_ea2_imon=1.39791E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=3.05082E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.11902E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.31617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15418E1
os_ea1_imon=2.47247E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29339E0
cs_ionrep_imon=9.32477E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93523E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=1.96963E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.87586E-8
tplens_vset=1.4E-1
tplens_vmon=1.66562E0
tplens_imon=-2.77651E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.50268E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26531E1
iondef2_imon=1.57523E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98636E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=8.60345E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29693E0
ionrepsh_imon=8.51778E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.19215E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74844E1
cs_ef2b_imon=3.14019E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44913E0
os_ea2_imon=-6.91762E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06058E2
lens4b_imon=2.0069E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.19209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06177E0
os_ef2alow_imon=-2.6123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74599E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11015E1
os_restr2_imon=3.37157E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.29751E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.10477E-5
iondef1_vset=2.763E1
iondef1_vmon=2.739E1
iondef1_imon=1.09175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.80043E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.06852E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-8.46352E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=2.32359E-1
window_imon=-9.50867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.8677E1
mask2_imon=-4.82351E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.48427E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.61358E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.47012E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44394E0
defgridb_imon=6.00834E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33191E1
os_fil1_imon=9.41717E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0799E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59803E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3178E1
cs_fil1_imon=7.46118E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.85781E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61588E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10433E-2
os_fil2_imon=-2.22148E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19338E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57681E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.02927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.45457E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21751E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29926E-3
inlet_lpb_pmon=3.00249E-1
chamber_ion_pmon=1.20062E-7
chamber_cvt_pmon=2.5143E-3
foreline_cvt_pmon=2.5143E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.01939E-1
res40_imon=-2.29515E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.40967E-2	-8.80015E1	-5.00679E-4	-8.80003E1	2.38419E-4	4.76837E-3	9.38892E-2	2.72925E1	-3.26687E1	-3.26458E1	2.6786E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.33239E-2	-8.80016E1	-6.91414E-4	-8.80004E1	4.52995E-4	4.79221E-3	9.37223E-2	2.73147E1	-3.26681E1	-3.26002E1	2.68088E1	1.19697E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80017E1	-6.19888E-4	-8.80003E1	0.0E0	5.07832E-3	9.37939E-2	2.72755E1	-3.26522E1	-3.26215E1	2.67875E1	1.20031E-7	2.5225E-3	2.5225E-3	6.32978E-3	2.99879E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80014E1	-6.4373E-4	-8.80005E1	9.53674E-5	4.50611E-3	9.39608E-2	2.73207E1	-3.26609E1	-3.26134E1	2.67866E1	1.2021E-7	2.5165E-3	2.5165E-3	6.3023E-3	3.00635E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80014E1	-5.96046E-4	-8.80001E1	4.76837E-5	4.673E-3	9.38654E-2	2.73015E1	-3.26398E1	-3.26362E1	2.67944E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.43285E-2	-8.80016E1	-5.24521E-4	-8.80004E1	1.19209E-4	4.52995E-3	9.39131E-2	2.73748E1	-3.26903E1	-3.2611E1	2.68226E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.44059E-2	-8.80014E1	-7.39098E-4	-8.80003E1	9.53674E-5	4.673E-3	9.39846E-2	2.72312E1	-3.26567E1	-3.26098E1	2.6786E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.98222E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80013E1	-5.72205E-4	-8.80006E1	1.19209E-4	4.673E-3	9.39608E-2	2.73171E1	-3.26597E1	-3.26158E1	2.67914E1	1.19653E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80014E1	-5.48363E-4	-8.80005E1	3.57628E-4	4.55379E-3	9.37223E-2	2.73057E1	-3.26372E1	-3.26319E1	2.68178E1	1.19757E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80013E1	-5.72205E-4	-8.80003E1	2.38419E-4	5.10216E-3	9.39369E-2	2.73207E1	-3.26927E1	-3.26122E1	2.6804E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01995E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80012E1	-5.48363E-4	-8.80001E1	3.33786E-4	4.93526E-3	9.41992E-2	2.73129E1	-3.26458E1	-3.25497E1	2.68022E1	1.20191E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.00676E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80014E1	-5.96046E-4	-8.80004E1	4.05312E-4	4.79221E-3	9.40561E-2	2.73586E1	-3.26549E1	-3.26218E1	2.68202E1	1.19861E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80013E1	-4.05312E-4	-8.80003E1	9.53674E-5	4.79221E-3	9.39369E-2	2.72588E1	-3.26663E1	-3.26176E1	2.68232E1	1.19697E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80015E1	-4.29153E-4	-8.80004E1	1.19209E-4	4.64916E-3	9.43899E-2	2.73538E1	-3.26705E1	-3.25966E1	2.68106E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80016E1	-2.86102E-4	-8.80003E1	-9.53674E-5	4.52995E-3	9.41277E-2	2.72591E1	-3.26655E1	-3.26313E1	2.67833E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02133E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80017E1	-3.57628E-4	-8.80002E1	9.53674E-5	4.95911E-3	9.37939E-2	2.7429E1	-3.26815E1	-3.25977E1	2.67986E1	1.198E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.0071E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80011E1	-6.67572E-4	-8.80002E1	9.53674E-5	4.64916E-3	9.408E-2	2.73039E1	-3.2681E1	-3.25872E1	2.67995E1	1.20158E-7	2.51954E-3	2.51954E-3	6.28592E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.41738E-2	-8.80016E1	-4.29153E-4	-8.80001E1	2.38419E-5	4.76837E-3	9.377E-2	2.72783E1	-3.26728E1	-3.26372E1	2.68119E1	1.19941E-7	2.52236E-3	2.52236E-3	6.31798E-3	3.01104E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.46377E-2	-8.80017E1	-1.90735E-4	-8.80002E1	2.38419E-5	4.62532E-3	9.377E-2	2.73279E1	-3.26657E1	-3.26434E1	2.6813E1	1.19937E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.00522E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.47149E-2	-8.80013E1	-1.43051E-4	-8.80003E1	2.38419E-4	5.126E-3	9.39131E-2	2.739E1	-3.26531E1	-3.26254E1	2.68262E1	1.20062E-7	2.5143E-3	2.5143E-3	6.29926E-3	3.00249E-1
