[Scan]
initial_time=2016-01-28T22:15:08
final_time=2016-01-28T22:15:28
ip_count=19
run=1026
dataset=9
scan=713
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.84061E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-5.84161E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.43727E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.62469E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.63172E-8
mult1=-9.70427E-9
mult2=-2.76851E-9
rf_tmon=-4.84889E-3
rf_agc=3.2937E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=4.58419E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65442E0
bslens_imon=2.64944E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19942E1
lens5a_imon=2.00421E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53702E1
cs_ef1b_imon=3.19277E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02178E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05053E1
cs_ea1_imon=1.09246E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05071E0
lens1_imon=1.65841E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64695E1
os_ef1alow_imon=2.99295E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.39791E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84215E1
cs_ef1a_imon=3.03465E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.11907E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11089E1
os_restr1_imon=4.30902E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15311E1
os_ea1_imon=2.44911E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63734E1
os_ef1bup_imon=3.09581E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=9.37786E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93314E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01966E1
cs_anode1_imon=1.96462E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.88095E-8
tplens_vset=1.4E-1
tplens_vmon=1.68214E0
tplens_imon=-7.94438E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26104E1
iondef3_imon=1.50869E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.59966E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98392E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=8.35776E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28218E0
ionrepsh_imon=8.70183E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33858E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74571E1
cs_ef2b_imon=3.13786E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42317E0
os_ea2_imon=-5.99737E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00672E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71136E1
cs_ef2a_imon=3.20389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09858E0
os_ef2alow_imon=-2.45642E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78696E-1
os_ef2bup_imon=-5.33393E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1055E1
os_restr2_imon=3.36341E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.2922E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01763E1
cs_anode2_imon=2.09598E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73766E1
iondef1_imon=1.1098E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67656E1
iondef4_imon=1.10067E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.74043E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.06423E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-9.44689E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.4733E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5615E1
einzel_imon=7.78167E-6
window_vset=0.0E0
window_vmon=2.18265E-1
window_imon=-8.9256E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-4.68579E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.35685E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.59942E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.54444E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57092E0
defgridb_imon=6.36228E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33197E1
os_fil1_imon=9.40161E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0792E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59796E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.318E1
cs_fil1_imon=7.79133E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.82435E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61549E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.25629E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.21934E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.65654E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29402E-1
cs_fil2_imon=-2.44329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21844E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.81998E-1
res40_imon=-2.44252E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.8001E1	-3.8147E-4	-8.80004E1	0.0E0	4.93526E-3	9.34601E-2	2.72933E1	-3.26537E1	-3.26478E1	2.67926E1	1.20055E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.99175E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.40192E-2	-8.80011E1	-7.15256E-4	-8.80002E1	-1.43051E-4	4.62532E-3	9.36747E-2	2.72438E1	-3.26873E1	-3.26194E1	2.67962E1	1.20517E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.39421E-2	-8.80011E1	-1.0252E-3	-8.80004E1	0.0E0	4.673E-3	9.38654E-2	2.7363E1	-3.267E1	-3.26515E1	2.68065E1	1.19749E-7	2.51525E-3	2.51525E-3	6.31009E-3	3.00197E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80012E1	-7.86781E-4	-8.80007E1	1.19209E-4	4.64916E-3	9.39846E-2	2.72727E1	-3.26476E1	-3.262E1	2.67914E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80012E1	-4.76837E-4	-8.80004E1	-9.53674E-5	4.8399E-3	9.39131E-2	2.7379E1	-3.26633E1	-3.26176E1	2.68094E1	1.19809E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80016E1	-4.05312E-4	-8.80004E1	4.29153E-4	4.60148E-3	9.37462E-2	2.72526E1	-3.26484E1	-3.2606E1	2.68106E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80015E1	-6.19888E-4	-8.80006E1	1.90735E-4	4.3869E-3	9.39846E-2	2.7291E1	-3.2626E1	-3.26682E1	2.68106E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80013E1	-8.58307E-4	-8.80002E1	5.24521E-4	4.64916E-3	9.377E-2	2.72985E1	-3.26765E1	-3.2611E1	2.67932E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.97963E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80014E1	-4.76837E-4	-8.80002E1	2.38419E-4	4.60148E-3	9.38416E-2	2.73747E1	-3.26313E1	-3.2629E1	2.68146E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80015E1	-3.57628E-4	-8.80002E1	2.38419E-5	4.57764E-3	9.37462E-2	2.7206E1	-3.2655E1	-3.26081E1	2.68123E1	1.20363E-7	2.52061E-3	2.52061E-3	6.28056E-3	3.00197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80014E1	-3.8147E-4	-8.80003E1	1.66893E-4	4.79221E-3	9.39608E-2	2.73147E1	-3.26164E1	-3.2617E1	2.68106E1	1.20092E-7	2.52236E-3	2.52236E-3	6.32858E-3	3.00348E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80012E1	-3.09944E-4	-8.80003E1	1.90735E-4	4.86374E-3	9.41753E-2	2.74006E1	-3.27071E1	-3.25978E1	2.6789E1	1.20191E-7	2.51693E-3	2.51693E-3	6.30182E-3	3.01209E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80011E1	-1.66893E-4	-8.80003E1	3.09944E-4	4.76837E-3	9.39846E-2	2.71879E1	-3.26561E1	-3.2632E1	2.68076E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80015E1	-3.57628E-4	-8.80001E1	3.09944E-4	4.93526E-3	9.39369E-2	2.72006E1	-3.26663E1	-3.2626E1	2.68052E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80014E1	-7.15256E-4	-8.80002E1	3.57628E-4	4.76837E-3	9.37939E-2	2.73538E1	-3.26476E1	-3.26326E1	2.6795E1	1.19713E-7	2.52585E-3	2.52585E-3	6.29067E-3	3.01209E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80011E1	-6.67572E-4	-8.8E1	0.0E0	4.79221E-3	9.377E-2	2.7263E1	-3.26543E1	-3.26104E1	2.68106E1	1.19749E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.0071E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80013E1	-4.76837E-4	-8.8E1	-9.53674E-5	4.81606E-3	9.39608E-2	2.72696E1	-3.26807E1	-3.26657E1	2.67956E1	1.20069E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80015E1	-2.6226E-4	-8.8E1	3.33786E-4	4.29153E-3	9.39369E-2	2.73965E1	-3.26549E1	-3.26372E1	2.68004E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9926E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80012E1	-6.91414E-4	-8.80005E1	-2.38419E-5	4.673E-3	9.39131E-2	2.71553E1	-3.26897E1	-3.26254E1	2.68076E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.9841E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80013E1	-3.57628E-4	-8.80001E1	4.76837E-5	4.64916E-3	9.38654E-2	2.73766E1	-3.26717E1	-3.26104E1	2.67656E1	1.20055E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.01738E-1
