[Scan]
initial_time=2016-01-28T22:16:01
final_time=2016-01-28T22:16:21
ip_count=19
run=1026
dataset=9
scan=715
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.83098E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-5.77772E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.40632E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.56305E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.64057E-8
mult1=-9.86079E-9
mult2=-2.73658E-9
rf_tmon=-4.53646E-3
rf_agc=3.23963E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=5.57375E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64359E0
bslens_imon=2.93619E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20184E1
lens5a_imon=1.99235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05042E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53843E1
cs_ef1b_imon=3.17663E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.02278E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04777E1
cs_ea1_imon=1.0839E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07696E0
lens1_imon=1.73745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.97531E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.40322E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84271E1
cs_ef1a_imon=3.05282E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.12371E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.30774E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15146E1
os_ea1_imon=2.49165E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.08335E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23161E0
cs_ionrep_imon=9.41145E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01944E1
cs_anode1_imon=1.95291E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.8813E-8
tplens_vset=1.4E-1
tplens_vmon=1.67274E0
tplens_imon=-3.15094E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.50227E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26687E1
iondef2_imon=1.5774E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02897E2
lens6_imon=2.98489E-4
ql6_vset=1.0E-1
ql6_vmon=9.41277E-2
ql6_imon=8.3456E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29251E0
ionrepsh_imon=8.63278E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33595E1
lens5b_imon=2.2099E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74781E1
cs_ef2b_imon=3.14241E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46441E0
os_ea2_imon=-5.43914E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71202E1
cs_ef2a_imon=3.20045E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0691E0
os_ef2alow_imon=-2.59316E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71326E-1
os_ef2bup_imon=-5.25065E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10721E1
os_restr2_imon=3.3746E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.30236E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01966E1
cs_anode2_imon=2.10055E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72204E1
iondef1_imon=1.08902E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68244E1
iondef4_imon=1.106E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.81017E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.0818E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13182E0
cs_ionaccel_imon=-8.44985E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.70462E-6
window_vset=0.0E0
window_vmon=1.96195E-1
window_imon=-9.38937E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39215E-4
mask2_vset=0.0E0
mask2_vmon=-1.86808E1
mask2_imon=-6.00039E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.66969E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.77832E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.28035E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36183E0
defgridb_imon=6.09869E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33173E1
os_fil1_imon=9.40055E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0842E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59974E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31744E1
cs_fil1_imon=6.90753E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.46883E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6183E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06546E-2
os_fil2_imon=-2.42612E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.21554E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.49985E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29411E-1
cs_fil2_imon=-2.15768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2928E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21791E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32028E-3
inlet_lpb_pmon=3.00075E-1
chamber_ion_pmon=1.199E-7
chamber_cvt_pmon=2.51562E-3
foreline_cvt_pmon=2.51562E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.46823E-1
res40_imon=-2.36499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=237
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80014E1	-5.00679E-4	-8.80007E1	9.53674E-5	4.62532E-3	9.377E-2	2.73412E1	-3.2648E1	-3.2648E1	2.67814E1	1.19585E-7	2.51265E-3	2.51265E-3	6.3282E-3	2.99753E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80017E1	-6.19888E-4	-8.80008E1	-1.43051E-4	4.50611E-3	9.36747E-2	2.72914E1	-3.26847E1	-3.26372E1	2.68094E1	1.19819E-7	2.5147E-3	2.5147E-3	6.29624E-3	3.00676E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80013E1	-2.14577E-4	-8.80004E1	1.43051E-4	4.33922E-3	9.36508E-2	2.73028E1	-3.26457E1	-3.26249E1	2.67873E1	1.201E-7	2.52179E-3	2.52179E-3	6.30171E-3	2.9917E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80012E1	-6.4373E-4	-8.80004E1	7.15256E-5	4.36306E-3	9.38892E-2	2.73862E1	-3.26639E1	-3.26422E1	2.68028E1	1.20092E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.41738E-2	-8.80013E1	-9.05991E-4	-8.80003E1	7.15256E-5	4.3869E-3	9.35793E-2	2.72477E1	-3.26753E1	-3.2615E1	2.68059E1	1.19965E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80015E1	-7.39098E-4	-8.80006E1	2.38419E-5	4.81606E-3	9.377E-2	2.72895E1	-3.26524E1	-3.26392E1	2.67956E1	1.19991E-7	2.51814E-3	2.51814E-3	6.31798E-3	3.00097E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80017E1	-5.48363E-4	-8.80004E1	1.66893E-4	4.55379E-3	9.38177E-2	2.70966E1	-3.26639E1	-3.26176E1	2.68106E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31014E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.44831E-2	-8.80013E1	-7.15256E-4	-8.80004E1	-2.38419E-4	4.57764E-3	9.36985E-2	2.73149E1	-3.26327E1	-3.26015E1	2.68142E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80013E1	-6.67572E-4	-8.80004E1	0.0E0	4.55379E-3	9.35793E-2	2.74838E1	-3.26449E1	-3.26555E1	2.68046E1	1.20137E-7	2.51581E-3	2.51581E-3	6.29067E-3	3.00942E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80015E1	-1.12057E-3	-8.80007E1	4.76837E-5	4.62532E-3	9.33409E-2	2.72089E1	-3.26237E1	-3.26192E1	2.6806E1	1.19866E-7	2.51761E-3	2.51761E-3	6.3074E-3	3.00852E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80015E1	-8.82149E-4	-8.80008E1	2.38419E-5	4.74453E-3	9.408E-2	2.73971E1	-3.26413E1	-3.25912E1	2.67836E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80016E1	-1.14441E-3	-8.80006E1	-1.90735E-4	4.62532E-3	9.35555E-2	2.73131E1	-3.26932E1	-3.26294E1	2.68099E1	1.19749E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01738E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80018E1	-6.19888E-4	-8.80003E1	1.43051E-4	4.69685E-3	9.39131E-2	2.7403E1	-3.26707E1	-3.26234E1	2.68012E1	1.1993E-7	2.51575E-3	2.51575E-3	6.31779E-3	2.99506E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80013E1	-3.57628E-4	-8.80003E1	-2.38419E-5	4.74453E-3	9.38416E-2	2.72186E1	-3.26213E1	-3.26071E1	2.68075E1	1.1998E-7	2.52248E-3	2.52248E-3	6.31711E-3	3.01261E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80012E1	-4.29153E-4	-8.80004E1	-2.38419E-4	4.55379E-3	9.41277E-2	2.7327E1	-3.26332E1	-3.26236E1	2.68001E1	1.19773E-7	2.51854E-3	2.51854E-3	6.32529E-3	3.01E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80012E1	-5.24521E-4	-8.80002E1	9.53674E-5	4.52995E-3	9.41753E-2	2.72379E1	-3.26646E1	-3.26337E1	2.67885E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80013E1	-3.8147E-4	-8.80006E1	-1.66893E-4	4.24385E-3	9.39846E-2	2.74362E1	-3.26747E1	-3.26193E1	2.67744E1	1.1969E-7	2.51709E-3	2.51709E-3	6.29333E-3	3.01777E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80014E1	-6.67572E-4	-8.80005E1	-2.86102E-4	4.36306E-3	9.39369E-2	2.72927E1	-3.26738E1	-3.25983E1	2.67974E1	1.19991E-7	2.50762E-3	2.50762E-3	6.31974E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80012E1	-6.19888E-4	-8.80006E1	-7.15256E-5	4.43459E-3	9.39608E-2	2.73159E1	-3.26895E1	-3.26098E1	2.68095E1	1.19944E-7	2.51138E-3	2.51138E-3	6.3074E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.8001E1	-7.39098E-4	-8.80005E1	9.53674E-5	4.81606E-3	9.41277E-2	2.72204E1	-3.26687E1	-3.26218E1	2.68244E1	1.199E-7	2.51562E-3	2.51562E-3	6.32028E-3	3.00075E-1
