[Scan]
initial_time=2016-01-28T22:20:11
final_time=2016-01-28T22:20:36
ip_count=19
run=1026
dataset=9
scan=723
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.79502E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.18768E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.44546E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.6353E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.63413E-8
mult1=-9.44813E-9
mult2=-2.74057E-9
rf_tmon=-4.22239E-3
rf_agc=3.27054E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=5.24056E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65528E0
bslens_imon=2.413E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19793E1
lens5a_imon=2.02042E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.0502E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5343E1
cs_ef1b_imon=3.17192E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04572E2
lens23_imon=1.02368E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04866E1
cs_ea1_imon=1.06794E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05683E0
lens1_imon=1.81509E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64852E1
os_ef1alow_imon=2.98843E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0409E1
cs_ea2_imon=1.4027E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.03917E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.1283E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11361E1
os_restr1_imon=4.3052E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.48206E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63682E1
os_ef1bup_imon=3.09025E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20053E0
cs_ionrep_imon=9.32717E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93563E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01896E1
cs_anode1_imon=1.9667E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.8757E-8
tplens_vset=1.4E-1
tplens_vmon=1.67098E0
tplens_imon=-2.81064E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26447E1
iondef3_imon=1.51672E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26703E1
iondef2_imon=1.58033E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98488E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=7.95269E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23008E0
ionrepsh_imon=8.41293E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33901E1
lens5b_imon=2.18102E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74866E1
cs_ef2b_imon=3.13265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4178E0
os_ea2_imon=-5.52208E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00546E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71072E1
cs_ef2a_imon=3.20667E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09626E0
os_ef2alow_imon=-2.39387E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.24358E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10926E1
os_restr2_imon=3.36341E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23017E2
cs_ionfoca_imon=6.31006E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01844E1
cs_anode2_imon=2.09286E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73715E1
iondef1_imon=1.09297E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68126E1
iondef4_imon=1.09581E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.85492E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.11829E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10929E0
cs_ionaccel_imon=-9.09936E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47435E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56202E1
einzel_imon=7.68436E-6
window_vset=0.0E0
window_vmon=2.21161E-1
window_imon=-8.78659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39157E-4
mask2_vset=0.0E0
mask2_vmon=-1.86761E1
mask2_imon=-6.24965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.3353E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93748E3
defgrida_imon=6.60182E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=6.97378E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3253E0
defgridb_imon=6.31677E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33179E1
os_fil1_imon=9.40619E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08117E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59894E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31707E1
cs_fil1_imon=7.46118E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.80697E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61821E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09077E-2
os_fil2_imon=-2.25795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19617E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.58736E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28403E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.39107E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21672E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32888E-3
inlet_lpb_pmon=3.00892E-1
chamber_ion_pmon=1.19777E-7
chamber_cvt_pmon=2.52504E-3
foreline_cvt_pmon=2.52504E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.08439E-1
res40_imon=-2.23053E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=112
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.16233E-2	-8.80015E1	-8.10623E-4	-8.80002E1	2.38419E-5	4.62532E-3	9.36031E-2	2.70985E1	-3.26653E1	-3.26243E1	2.68147E1	1.19886E-7	2.51589E-3	2.51589E-3	6.31789E-3	2.99177E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.15461E-2	-8.80014E1	-4.29153E-4	-8.80003E1	-4.52995E-4	4.62532E-3	9.37939E-2	2.7307E1	-3.26598E1	-3.26189E1	2.68236E1	1.20325E-7	2.51886E-3	2.51886E-3	6.29185E-3	3.03476E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80014E1	-5.96046E-4	-8.80008E1	3.33786E-4	4.79221E-3	9.40084E-2	2.73173E1	-3.26294E1	-3.26483E1	2.67719E1	1.19813E-7	2.51623E-3	2.51623E-3	6.30991E-3	3.0089E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80017E1	-8.10623E-4	-8.80003E1	-3.57628E-4	4.41074E-3	9.38892E-2	2.7341E1	-3.26494E1	-3.26533E1	2.68078E1	1.20207E-7	2.51709E-3	2.51709E-3	6.31949E-3	3.00312E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80015E1	-4.29153E-4	-8.80005E1	-1.90735E-4	4.33922E-3	9.34362E-2	2.72578E1	-3.26728E1	-3.26195E1	2.67897E1	1.19926E-7	2.51754E-3	2.51754E-3	6.31925E-3	3.00385E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80016E1	-2.6226E-4	-8.80005E1	-5.24521E-4	4.33922E-3	9.3627E-2	2.73192E1	-3.26168E1	-3.26408E1	2.6804E1	1.20011E-7	2.52384E-3	2.52384E-3	6.3201E-3	3.02013E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80016E1	-5.24521E-4	-8.80006E1	-2.14577E-4	4.81606E-3	9.34839E-2	2.73203E1	-3.26701E1	-3.26137E1	2.68117E1	1.20022E-7	2.52333E-3	2.52333E-3	6.30097E-3	3.02533E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80015E1	-4.29153E-4	-8.80002E1	-3.57628E-4	4.95911E-3	9.37223E-2	2.72708E1	-3.2677E1	-3.26274E1	2.68031E1	1.199E-7	2.51626E-3	2.51626E-3	6.32351E-3	3.00075E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80018E1	-4.29153E-4	-8.80006E1	-2.14577E-4	4.62532E-3	9.37223E-2	2.72971E1	-3.2653E1	-3.26205E1	2.68006E1	1.20132E-7	2.5154E-3	2.5154E-3	6.3074E-3	3.01407E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80016E1	-5.48363E-4	-8.80003E1	-7.15256E-5	4.69685E-3	9.408E-2	2.7338E1	-3.26303E1	-3.26113E1	2.68069E1	1.20327E-7	2.51929E-3	2.51929E-3	6.31651E-3	2.99981E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80019E1	-4.05312E-4	-8.80003E1	-2.6226E-4	4.3869E-3	9.408E-2	2.72999E1	-3.26594E1	-3.26538E1	2.68106E1	1.20038E-7	2.51282E-3	2.51282E-3	6.33508E-3	3.00385E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80017E1	-4.76837E-4	-8.80003E1	-1.66893E-4	4.62532E-3	9.377E-2	2.72911E1	-3.26483E1	-3.26226E1	2.68149E1	1.20144E-7	2.51904E-3	2.51904E-3	6.29027E-3	3.01301E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80015E1	-6.4373E-4	-8.80002E1	-1.19209E-4	4.45843E-3	9.37939E-2	2.72761E1	-3.26658E1	-3.26329E1	2.68156E1	1.19834E-7	2.51344E-3	2.51344E-3	6.31182E-3	3.00871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80019E1	-9.29832E-4	-8.80004E1	4.52995E-4	4.45843E-3	9.37223E-2	2.73309E1	-3.26427E1	-3.25358E1	2.67781E1	1.20151E-7	2.51596E-3	2.51596E-3	6.3153E-3	3.00385E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.36328E-2	-8.80015E1	-7.62939E-4	-8.8E1	-2.38419E-5	4.26769E-3	9.38177E-2	2.72992E1	-3.26088E1	-3.26098E1	2.68082E1	1.1975E-7	2.51784E-3	2.51784E-3	6.31624E-3	3.0066E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80014E1	-5.72205E-4	-8.80002E1	1.90735E-4	4.36306E-3	9.35555E-2	2.72688E1	-3.26721E1	-3.26226E1	2.68184E1	1.1975E-7	2.5196E-3	2.5196E-3	6.32509E-3	3.01714E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80015E1	-5.96046E-4	-8.80003E1	7.15256E-5	4.76837E-3	9.377E-2	2.73619E1	-3.26762E1	-3.26581E1	2.68009E1	1.19769E-7	2.51575E-3	2.51575E-3	6.3113E-3	3.01237E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80016E1	-4.52995E-4	-8.80003E1	-2.38419E-5	4.55379E-3	9.38654E-2	2.7237E1	-3.26909E1	-3.25871E1	2.68134E1	1.2E-7	2.518E-3	2.518E-3	6.32883E-3	2.99994E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80018E1	-4.05312E-4	-8.80006E1	3.57628E-4	4.48227E-3	9.35793E-2	2.72976E1	-3.2666E1	-3.26613E1	2.68026E1	1.19895E-7	2.5199E-3	2.5199E-3	6.34815E-3	2.9871E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80014E1	-2.6226E-4	-8.80004E1	3.33786E-4	4.48227E-3	9.3627E-2	2.73715E1	-3.26703E1	-3.26447E1	2.68126E1	1.19777E-7	2.52504E-3	2.52504E-3	6.32888E-3	3.00892E-1
