[Scan]
initial_time=2016-01-28T22:22:30
final_time=2016-01-28T22:22:53
ip_count=19
run=1026
dataset=10
scan=727
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08816E-4
ql1_vset=
ql1_vmon=-8.18205E-1
ql1_imon=1.43852E-8
ql2_vset=
ql2_vmon=-7.99036E-1
ql2_imon=1.96884E-9
ql3_vset=
ql3_vmon=-9.13093E0
ql3_imon=1.99521E-9
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-4.02772E-10
mult1=-9.92767E-9
mult2=-2.76019E-9
rf_tmon=-4.18049E-3
rf_agc=3.39843E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.68426E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62567E0
bslens_imon=2.61769E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20105E1
lens5a_imon=1.99318E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12427E2
lens4a_imon=2.04982E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.17978E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.02276E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05059E1
cs_ea1_imon=1.09602E-5
lens1_vset=-5.0E0
lens1_vmon=-5.413E0
lens1_imon=2.77004E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64673E1
os_ef1alow_imon=2.97654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.38774E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8476E1
cs_ef1a_imon=3.04994E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.11796E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1148E1
os_restr1_imon=4.30798E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15309E1
os_ea1_imon=2.46631E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63552E1
os_ef1bup_imon=3.09303E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23188E0
cs_ionrep_imon=9.43951E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93533E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0181E1
cs_anode1_imon=1.9601E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.09401E-8
tplens_vset=1.4E-1
tplens_vmon=1.66024E0
tplens_imon=-2.31792E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2651E1
iondef3_imon=1.50538E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26694E1
iondef2_imon=1.56802E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98555E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.96993E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2789E0
ionrepsh_imon=8.68906E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33591E1
lens5b_imon=2.18446E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74682E1
cs_ef2b_imon=3.13112E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4731E0
os_ea2_imon=-5.90093E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00628E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71341E1
cs_ef2a_imon=3.1959E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06058E0
os_ef2alow_imon=-2.52106E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89701E-1
os_ef2bup_imon=-5.14001E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.36549E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.31395E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01848E1
cs_anode2_imon=2.08799E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72727E1
iondef1_imon=1.09658E-5
iondef4_vset=2.691E1
iondef4_vmon=2.679E1
iondef4_imon=1.08934E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.72891E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=7.06169E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10975E0
cs_ionaccel_imon=-8.72403E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47443E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56396E1
einzel_imon=7.72398E-6
window_vset=0.0E0
window_vmon=2.25563E-1
window_imon=-1.07814E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39223E-4
mask2_vset=0.0E0
mask2_vmon=-1.87016E1
mask2_imon=-5.10977E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.5944E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.67749E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=6.97373E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61641E0
defgridb_imon=6.05681E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33127E1
os_fil1_imon=9.4015E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07515E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59829E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31637E1
cs_fil1_imon=7.09512E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.41571E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61313E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.12177E-2
os_fil2_imon=-2.53365E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02125E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.65133E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30051E-1
cs_fil2_imon=-2.05638E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25206E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21604E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31958E-3
inlet_lpb_pmon=3.00738E-1
chamber_ion_pmon=1.19905E-7
chamber_cvt_pmon=2.51882E-3
foreline_cvt_pmon=2.51882E-3
chamber_tmon=1.40069E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.48636E-1
res40_imon=-2.39039E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=858
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.18729E-1	-7.98893E-1	-9.13095E0	-9.1419E0	4.79221E-3	9.40084E-2	2.73207E1	-3.26591E1	-3.26616E1	2.68007E1	1.19882E-7	2.52601E-3	2.52601E-3	6.3074E-3	3.00118E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.18753E-1	-7.99155E-1	-9.13093E0	-9.14183E0	5.07832E-3	9.39846E-2	2.726E1	-3.26452E1	-3.26206E1	2.68034E1	1.19991E-7	2.51555E-3	2.51555E-3	6.29887E-3	3.01201E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.18753E-1	-7.98941E-1	-9.13093E0	-9.14173E0	5.05447E-3	9.39608E-2	2.73375E1	-3.26796E1	-3.26295E1	2.67982E1					
4.0E0	7.0E0	1.0E0	6.55E2	3.98E2	-2.09495E0	-8.18872E-1	-7.98845E-1	-9.13086E0	-9.14195E0	4.81606E-3	9.408E-2	2.73023E1	-3.2659E1	-3.26489E1	2.67948E1	1.19922E-7	2.51685E-3	2.51685E-3	6.32828E-3	3.0141E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.18896E-1	-7.99155E-1	-9.13095E0	-9.1419E0	4.72069E-3	9.40561E-2	2.73436E1	-3.26554E1	-3.26351E1	2.68026E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.19039E-1	-7.99012E-1	-9.13095E0	-9.14185E0	4.55379E-3	9.4223E-2	2.73154E1	-3.26634E1	-3.26132E1	2.68188E1	1.1998E-7	2.51838E-3	2.51838E-3	6.31651E-3	2.99548E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.19016E-1	-7.99108E-1	-9.1311E0	-9.14192E0	4.41074E-3	9.39131E-2	2.73007E1	-3.26298E1	-3.26391E1	2.6807E1	1.19869E-7	2.51428E-3	2.51428E-3	6.32622E-3	3.01048E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.18706E-1	-7.98917E-1	-9.13091E0	-9.14195E0	4.76837E-3	9.39608E-2	2.72945E1	-3.26874E1	-3.2622E1	2.68006E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.18586E-1	-7.99203E-1	-9.13084E0	-9.14197E0	4.60148E-3	9.38177E-2	2.72978E1	-3.26747E1	-3.26657E1	2.6783E1	1.19937E-7	2.51838E-3	2.51838E-3	6.30285E-3	2.99548E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.18491E-1	-7.98845E-1	-9.13072E0	-9.14199E0	4.93526E-3	9.41038E-2	2.73385E1	-3.26455E1	-3.26275E1	2.68275E1	1.20064E-7	2.5216E-3	2.5216E-3	6.32784E-3	3.00878E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.18276E-1	-7.98655E-1	-9.13081E0	-9.14178E0	4.74453E-3	9.38177E-2	2.72688E1	-3.26606E1	-3.26563E1	2.68155E1	1.2011E-7	2.5202E-3	2.5202E-3	6.33478E-3	2.98254E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.18157E-1	-7.98917E-1	-9.13079E0	-9.1418E0	4.55379E-3	9.39608E-2	2.73229E1	-3.26632E1	-3.26203E1	2.6804E1	1.20038E-7	2.52147E-3	2.52147E-3	6.30346E-3	2.9926E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.18491E-1	-7.99036E-1	-9.13103E0	-9.14176E0	4.76837E-3	9.36508E-2	2.72558E1	-3.2626E1	-3.26316E1	2.68057E1	1.19969E-7	2.51736E-3	2.51736E-3	6.31696E-3	2.98657E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.18634E-1	-7.99108E-1	-9.13069E0	-9.14168E0	4.98295E-3	9.38654E-2	2.72219E1	-3.25876E1	-3.26292E1	2.67934E1	1.20045E-7	2.51271E-3	2.51271E-3	6.3245E-3	3.00522E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.18372E-1	-7.98941E-1	-9.13105E0	-9.1418E0	4.88758E-3	9.38892E-2	2.72978E1	-3.26681E1	-3.25844E1	2.68046E1	1.20001E-7	2.51851E-3	2.51851E-3	6.31574E-3	3.00713E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.18372E-1	-7.99227E-1	-9.13095E0	-9.1418E0	5.10216E-3	9.32455E-2	2.73338E1	-3.26432E1	-3.26473E1	2.67813E1	1.19962E-7	2.52517E-3	2.52517E-3	6.31992E-3	2.99524E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.18372E-1	-7.98893E-1	-9.13064E0	-9.14183E0	5.29289E-3	9.35555E-2	2.73259E1	-3.26904E1	-3.2622E1	2.67955E1	1.20253E-7	2.51962E-3	2.51962E-3	6.32434E-3	3.006E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.18348E-1	-7.99108E-1	-9.13088E0	-9.14185E0	5.07832E-3	9.35555E-2	2.72419E1	-3.26794E1	-3.26216E1	2.68098E1	1.20067E-7	2.51384E-3	2.51384E-3	6.32107E-3	2.99764E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.18324E-1	-7.99251E-1	-9.13074E0	-9.1418E0	4.62532E-3	9.35316E-2	2.73753E1	-3.269E1	-3.26287E1	2.68028E1	1.20099E-7	2.51823E-3	2.51823E-3	6.31242E-3	2.99577E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.18205E-1	-7.99036E-1	-9.13093E0	-9.14197E0	4.57764E-3	9.35555E-2	2.72727E1	-3.26694E1	-3.2651E1	2.679E1	1.19905E-7	2.51882E-3	2.51882E-3	6.31958E-3	3.00738E-1
