[Scan]
initial_time=2016-01-28T22:23:00
final_time=2016-01-28T22:23:24
ip_count=19
run=1026
dataset=10
scan=728
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.18086E-1
ql1_imon=1.42986E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=1.93593E-9
ql3_vset=
ql3_vmon=-9.13079E0
ql3_imon=1.64306E-9
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-3.38364E-10
mult1=-1.00294E-8
mult2=-2.76931E-9
rf_tmon=-3.78783E-3
rf_agc=3.37776E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.63054E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63895E0
bslens_imon=2.44495E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20041E1
lens5a_imon=1.99368E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.04971E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5369E1
cs_ef1b_imon=3.17509E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02262E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04873E1
cs_ea1_imon=1.07591E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39872E0
lens1_imon=2.77777E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64708E1
os_ef1alow_imon=2.98236E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.38613E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84174E1
cs_ef1a_imon=3.04765E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.1126E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11327E1
os_restr1_imon=4.31139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15331E1
os_ea1_imon=2.46245E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.0916E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26099E0
cs_ionrep_imon=9.49066E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.93379E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0193E1
cs_anode1_imon=1.96095E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.07926E-8
tplens_vset=1.4E-1
tplens_vmon=1.67074E0
tplens_imon=-1.20261E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26639E1
iondef3_imon=1.4866E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26444E1
iondef2_imon=1.58425E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98318E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.96545E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27198E0
ionrepsh_imon=8.67117E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.18269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74805E1
cs_ef2b_imon=3.15218E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42531E0
os_ea2_imon=-6.35188E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.0062E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71341E1
cs_ef2a_imon=3.19048E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08856E0
os_ef2alow_imon=-2.6016E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07189E-1
os_ef2bup_imon=-5.12217E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10872E1
os_restr2_imon=3.37536E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23019E2
cs_ionfoca_imon=6.32063E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01836E1
cs_anode2_imon=2.08274E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72721E1
iondef1_imon=1.09004E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68158E1
iondef4_imon=1.09712E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.76655E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.054E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11497E0
cs_ionaccel_imon=-9.03434E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02004E2
cs_ionfocb_imon=1.47355E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56332E1
einzel_imon=7.83223E-6
window_vset=0.0E0
window_vmon=2.23291E-1
window_imon=-1.04783E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39338E-4
mask2_vset=0.0E0
mask2_vmon=-1.86778E1
mask2_imon=-6.68014E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.40583E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.49529E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.19861E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4168E0
defgridb_imon=6.36028E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33149E1
os_fil1_imon=9.40772E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07277E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59845E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31637E1
cs_fil1_imon=7.03219E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.96787E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61215E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09719E-2
os_fil2_imon=-2.37939E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08313E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.6963E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29314E-1
cs_fil2_imon=-2.15967E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2827E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21527E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31696E-3
inlet_lpb_pmon=3.00243E-1
chamber_ion_pmon=1.20059E-7
chamber_cvt_pmon=2.51831E-3
foreline_cvt_pmon=2.51831E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28039E-1
res40_imon=-2.42582E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=834
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.18396E-1	-7.98821E-1	-9.13079E0	-9.14187E0	4.3869E-3	9.38177E-2	2.72971E1	-3.2709E1	-3.26255E1	2.68239E1	1.19787E-7	2.51736E-3	2.51736E-3	6.32174E-3	2.99789E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09379E0	-8.18324E-1	-7.98702E-1	-9.13079E0	-9.14187E0	4.33922E-3	9.38654E-2	2.7295E1	-3.26824E1	-3.26106E1	2.68074E1	1.19841E-7	2.51764E-3	2.51764E-3	6.33171E-3	3.0103E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.18205E-1	-7.98655E-1	-9.131E0	-9.14185E0	4.69685E-3	9.38177E-2	2.72884E1	-3.26378E1	-3.2654E1	2.67979E1	1.19965E-7	2.51965E-3	2.51965E-3	6.3149E-3	3.02057E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09356E0	-8.18086E-1	-7.98655E-1	-9.1311E0	-9.14173E0	4.81606E-3	9.38892E-2	2.73218E1	-3.2671E1	-3.26311E1	2.68202E1	1.19876E-7	2.52137E-3	2.52137E-3	6.30299E-3	3.00871E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.17919E-1	-7.99084E-1	-9.13091E0	-9.14218E0	4.86374E-3	9.38654E-2	2.72377E1	-3.26574E1	-3.25814E1	2.68244E1	1.20011E-7	2.51624E-3	2.51624E-3	6.29895E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.18086E-1	-7.98774E-1	-9.13098E0	-9.14211E0	4.48227E-3	9.35793E-2	2.74119E1	-3.26679E1	-3.2606E1	2.67976E1	1.19937E-7	2.52111E-3	2.52111E-3	6.31651E-3	3.03684E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.18133E-1	-7.98798E-1	-9.13117E0	-9.14166E0	4.79221E-3	9.377E-2	2.73451E1	-3.26601E1	-3.26406E1	2.6806E1	1.19947E-7	2.52051E-3	2.52051E-3	6.33056E-3	3.00946E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.1799E-1	-7.99084E-1	-9.13103E0	-9.1419E0	4.8399E-3	9.41277E-2	2.72825E1	-3.26472E1	-3.26133E1	2.67963E1	1.20038E-7	2.52088E-3	2.52088E-3	6.32716E-3	2.99728E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.18443E-1	-7.99179E-1	-9.13079E0	-9.14166E0	5.14984E-3	9.36747E-2	2.72815E1	-3.26668E1	-3.26239E1	2.68024E1	1.19655E-7	2.51476E-3	2.51476E-3	6.31169E-3	3.01301E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.18014E-1	-7.98917E-1	-9.13079E0	-9.14152E0	5.03063E-3	9.39608E-2	2.73233E1	-3.26221E1	-3.26417E1	2.68101E1	1.20196E-7	2.52499E-3	2.52499E-3	6.32652E-3	2.99335E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.18324E-1	-7.98845E-1	-9.13105E0	-9.14168E0	4.91142E-3	9.38654E-2	2.73459E1	-3.26747E1	-3.26324E1	2.68107E1	1.20128E-7	2.5196E-3	2.5196E-3	6.29857E-3	3.00239E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.18253E-1	-7.98702E-1	-9.13088E0	-9.14176E0	4.79221E-3	9.39608E-2	2.72731E1	-3.26799E1	-3.26019E1	2.68068E1	1.19885E-7	2.51542E-3	2.51542E-3	6.32087E-3	2.97351E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.1861E-1	-7.98774E-1	-9.13074E0	-9.14173E0	4.76837E-3	9.38654E-2	2.7374E1	-3.26524E1	-3.26128E1	2.68097E1	1.19789E-7	2.51963E-3	2.51963E-3	6.30335E-3	2.98236E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.18467E-1	-7.99012E-1	-9.13062E0	-9.14183E0	4.55379E-3	9.38416E-2	2.72362E1	-3.26514E1	-3.27416E1	2.67962E1	1.2011E-7	2.51657E-3	2.51657E-3	6.31651E-3	2.97823E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.18133E-1	-7.98774E-1	-9.13074E0	-9.14187E0	4.74453E-3	9.36031E-2	2.72749E1	-3.26398E1	-3.26662E1	2.67936E1	1.20047E-7	2.5096E-3	2.5096E-3	6.33093E-3	3.03298E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-8.17919E-1	-7.98774E-1	-9.13069E0	-9.14202E0	4.57764E-3	9.36747E-2	2.73269E1	-3.26552E1	-3.26446E1	2.68175E1	1.20085E-7	2.5199E-3	2.5199E-3	6.34202E-3	3.0279E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.18157E-1	-7.98774E-1	-9.13053E0	-9.14202E0	4.673E-3	9.37462E-2	2.72743E1	-3.26626E1	-3.26182E1	2.67818E1	1.1973E-7	2.52131E-3	2.52131E-3	6.3074E-3	3.01003E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.18324E-1	-7.98631E-1	-9.13086E0	-9.14176E0	4.57764E-3	9.36985E-2	2.73006E1	-3.26688E1	-3.26176E1	2.67947E1	1.19822E-7	2.51815E-3	2.51815E-3	6.32616E-3	3.0134E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.18253E-1	-7.98869E-1	-9.13088E0	-9.14192E0	4.36306E-3	9.36747E-2	2.74099E1	-3.26446E1	-3.25968E1	2.68051E1	1.19805E-7	2.51468E-3	2.51468E-3	6.32555E-3	3.00025E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.18086E-1	-7.98607E-1	-9.13079E0	-9.14195E0	4.48227E-3	9.36747E-2	2.72721E1	-3.26444E1	-3.26639E1	2.68158E1	1.20059E-7	2.51831E-3	2.51831E-3	6.31696E-3	3.00243E-1
