[Scan]
initial_time=2016-01-28T22:24:57
final_time=2016-01-28T22:25:16
ip_count=19
run=1026
dataset=10
scan=732
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.0884E-4
ql1_vset=
ql1_vmon=-8.17347E-1
ql1_imon=1.41613E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=2.05303E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=1.08324E-9
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-2.81966E-10
mult1=-1.07879E-8
mult2=-2.79125E-9
rf_tmon=-6.03616E-3
rf_agc=3.15706E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.67122E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65472E0
bslens_imon=2.60985E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19761E1
lens5a_imon=1.99533E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.05399E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53499E1
cs_ef1b_imon=3.17227E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02326E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05096E1
cs_ea1_imon=1.07498E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37376E0
lens1_imon=2.71079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64504E1
os_ef1alow_imon=2.98148E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03967E1
cs_ea2_imon=1.40988E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84249E1
cs_ef1a_imon=3.04403E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.16039E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11245E1
os_restr1_imon=4.29512E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15047E1
os_ea1_imon=2.47046E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63786E1
os_ef1bup_imon=3.11006E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22146E0
cs_ionrep_imon=9.34751E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01908E1
cs_anode1_imon=1.96948E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.13733E-8
tplens_vset=1.4E-1
tplens_vmon=1.64263E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26393E1
iondef3_imon=1.51407E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26758E1
iondef2_imon=1.57103E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98504E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.98088E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24789E0
ionrepsh_imon=8.57965E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33435E1
lens5b_imon=2.18567E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74634E1
cs_ef2b_imon=3.14412E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4738E0
os_ea2_imon=-4.94013E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00677E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71177E1
cs_ef2a_imon=3.1886E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06267E0
os_ef2alow_imon=-2.57458E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17503E-1
os_ef2bup_imon=-5.29918E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10903E1
os_restr2_imon=3.38148E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.29856E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01746E1
cs_anode2_imon=2.10015E-5
iondef1_vset=2.763E1
iondef1_vmon=2.70977E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6778E1
iondef4_imon=1.09094E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.91724E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.25589E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10292E0
cs_ionaccel_imon=-7.88302E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47508E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5626E1
einzel_imon=7.80252E-6
window_vset=0.0E0
window_vmon=2.15369E-1
window_imon=-9.20362E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82601E2
mask1_imon=2.39108E-4
mask2_vset=0.0E0
mask2_vmon=-1.86767E1
mask2_imon=-5.41559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=8.11101E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.4311E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.00068E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=6.05619E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33136E1
os_fil1_imon=9.41771E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08378E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60749E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31622E1
cs_fil1_imon=6.63291E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.76064E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61353E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02812E-2
os_fil2_imon=-2.32745E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0977E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.54395E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31525E-1
cs_fil2_imon=-2.03785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02617E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21467E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.513E-1
res40_imon=-2.38344E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=218
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.17776E-1	-7.99251E-1	-9.13126E0	-9.14185E0	4.26769E-3	9.40561E-2	2.74491E1	-3.26829E1	-3.26397E1	2.68018E1	1.20106E-7	2.51632E-3	2.51632E-3	6.29128E-3	2.99941E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.1768E-1	-7.99084E-1	-9.13112E0	-9.14187E0	4.26769E-3	9.4223E-2	2.72483E1	-3.26697E1	-3.26098E1	2.67826E1	1.20142E-7	2.51603E-3	2.51603E-3	6.32328E-3	2.98592E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.17513E-1	-7.99108E-1	-9.13134E0	-9.14183E0	4.19617E-3	9.38177E-2	2.73847E1	-3.26679E1	-3.26284E1	2.68208E1	1.19991E-7	2.51725E-3	2.51725E-3	6.29035E-3	2.989E-1
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.17251E-1	-7.98941E-1	-9.13107E0	-9.14199E0	4.07696E-3	9.41277E-2	2.72272E1	-3.26691E1	-3.2606E1	2.68302E1	1.198E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.17513E-1	-7.98941E-1	-9.13107E0	-9.1419E0	3.76701E-3	9.39846E-2	2.74397E1	-3.26687E1	-3.26368E1	2.6792E1	1.198E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.17275E-1	-7.98988E-1	-9.13081E0	-9.14199E0	4.02927E-3	9.37939E-2	2.72072E1	-3.26603E1	-3.26444E1	2.68124E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.1718E-1	-7.98726E-1	-9.13095E0	-9.14156E0	4.14848E-3	9.38892E-2	2.72915E1	-3.26413E1	-3.26284E1	2.68166E1	1.19872E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.01742E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.1718E-1	-7.98869E-1	-9.13081E0	-9.14202E0	4.05312E-3	9.38654E-2	2.73502E1	-3.26549E1	-3.26338E1	2.68034E1	1.20466E-7	2.52384E-3	2.52384E-3	6.29128E-3	2.99175E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.17108E-1	-7.98631E-1	-9.13088E0	-9.14216E0	4.43459E-3	9.39131E-2	2.72426E1	-3.2672E1	-3.26054E1	2.68118E1	1.19819E-7	2.51359E-3	2.51359E-3	6.30182E-3	2.99083E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.17108E-1	-7.98798E-1	-9.13098E0	-9.14195E0	4.50611E-3	9.39131E-2	2.71188E1	-3.26422E1	-3.26266E1	2.6807E1	1.19991E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.97843E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.17132E-1	-7.98726E-1	-9.13122E0	-9.14199E0	4.24385E-3	9.37939E-2	2.71579E1	-3.26458E1	-3.26374E1	2.68157E1	1.20069E-7	2.52757E-3	2.52757E-3	6.31288E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.17013E-1	-7.9906E-1	-9.131E0	-9.14211E0	4.26769E-3	9.40084E-2	2.70874E1	-3.26815E1	-3.2639E1	2.67862E1	1.20122E-7	2.52647E-3	2.52647E-3	6.32936E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.17275E-1	-7.98583E-1	-9.13136E0	-9.14173E0	4.22001E-3	9.38654E-2	2.7147E1	-3.26832E1	-3.26331E1	2.6807E1	1.19953E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.0148E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.17513E-1	-7.98559E-1	-9.13107E0	-9.14168E0	4.26769E-3	9.39131E-2	2.71567E1	-3.26446E1	-3.26554E1	2.68196E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.17585E-1	-7.98869E-1	-9.13103E0	-9.14185E0	4.14848E-3	9.36031E-2	2.72294E1	-3.27203E1	-3.2626E1	2.6801E1	1.20174E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.17251E-1	-7.9844E-1	-9.13115E0	-9.1418E0	4.50611E-3	9.37223E-2	2.73405E1	-3.26621E1	-3.26194E1	2.67986E1	1.19757E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.17466E-1	-7.99084E-1	-9.13103E0	-9.14166E0	4.29153E-3	9.3627E-2	2.74272E1	-3.26322E1	-3.26322E1	2.68082E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.1749E-1	-7.98941E-1	-9.13131E0	-9.14221E0	4.14848E-3	9.36508E-2	2.7239E1	-3.25982E1	-3.267E1	2.68059E1	1.19944E-7	2.51793E-3	2.51793E-3	6.32057E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.1737E-1	-7.98821E-1	-9.13107E0	-9.14197E0	4.33922E-3	9.36031E-2	2.71576E1	-3.26626E1	-3.26101E1	2.68076E1	1.19891E-7	2.52342E-3	2.52342E-3	6.2863E-3	3.00097E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.17347E-1	-7.98678E-1	-9.13126E0	-9.14204E0	4.62532E-3	9.36985E-2	2.70977E1	-3.26758E1	-3.26393E1	2.6778E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02133E-1
