[Scan]
initial_time=2016-01-28T22:26:50
final_time=2016-01-28T22:27:09
ip_count=19
run=1026
dataset=10
scan=736
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-8.17227E-1
ql1_imon=1.40178E-8
ql2_vset=
ql2_vmon=-7.9906E-1
ql2_imon=1.99964E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=7.48408E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=-2.54524E-10
mult1=-1.00053E-8
mult2=-2.83039E-9
rf_tmon=-4.04979E-3
rf_agc=3.42769E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.64852E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.53054E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19983E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05151E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53667E1
cs_ef1b_imon=3.17679E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02352E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=1.10058E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39719E0
lens1_imon=2.70358E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64556E1
os_ef1alow_imon=2.97661E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.38681E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84348E1
cs_ef1a_imon=3.04855E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.16001E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11656E1
os_restr1_imon=4.31285E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15246E1
os_ea1_imon=2.47335E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.09269E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25751E0
cs_ionrep_imon=9.57102E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02E1
cs_anode1_imon=1.97226E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.13576E-8
tplens_vset=1.4E-1
tplens_vmon=1.63963E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.52704E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.58617E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98422E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=3.96217E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26652E0
ionrepsh_imon=8.50034E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33369E1
lens5b_imon=2.1954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.13821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49543E0
os_ea2_imon=-5.12038E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06045E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71078E1
cs_ef2a_imon=3.19138E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07946E0
os_ef2alow_imon=-2.60238E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10553E-1
os_ef2bup_imon=-5.23663E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10926E1
os_restr2_imon=3.38287E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.30757E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01798E1
cs_anode2_imon=2.10432E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.09661E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.09754E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.90645E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.27967E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12725E0
cs_ionaccel_imon=-7.57025E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47341E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5626E1
einzel_imon=7.73649E-6
window_vset=0.0E0
window_vmon=2.35641E-1
window_imon=-9.93342E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39216E-4
mask2_vset=0.0E0
mask2_vmon=-1.869E1
mask2_imon=-6.04114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.39723E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.72671E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.36839E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35645E0
defgridb_imon=6.08863E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33143E1
os_fil1_imon=9.42959E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08366E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60891E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31556E1
cs_fil1_imon=9.58687E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.92861E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61455E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05392E-2
os_fil2_imon=-2.32166E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.23671E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.60969E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30151E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21435E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.49939E-1
res40_imon=-2.40082E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.17156E-1	-7.98893E-1	-9.13105E0	-9.14202E0	4.62532E-3	9.39131E-2	2.73293E1	-3.26549E1	-3.26596E1	2.68058E1	1.19861E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.02659E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.17323E-1	-7.98869E-1	-9.13117E0	-9.14202E0	4.57764E-3	9.38177E-2	2.73404E1	-3.26437E1	-3.26328E1	2.68169E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.17108E-1	-7.99036E-1	-9.13117E0	-9.14195E0	4.74453E-3	9.38654E-2	2.72365E1	-3.26385E1	-3.26191E1	2.68001E1	1.20042E-7	2.52131E-3	2.52131E-3	6.32328E-3	2.99343E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.17132E-1	-7.98774E-1	-9.13086E0	-9.14221E0	4.57764E-3	9.38892E-2	2.73123E1	-3.2629E1	-3.26374E1	2.67974E1	1.19819E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.9829E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16774E-1	-7.99012E-1	-9.13107E0	-9.14154E0	4.45843E-3	9.41753E-2	2.73958E1	-3.26741E1	-3.26338E1	2.68082E1	1.19913E-7	2.50789E-3	2.50789E-3	6.34037E-3	2.98481E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16727E-1	-7.98702E-1	-9.13124E0	-9.14168E0	4.36306E-3	9.41753E-2	2.73175E1	-3.2675E1	-3.26484E1	2.68163E1	1.19819E-7	2.5225E-3	2.5225E-3	6.32978E-3	2.99613E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.16846E-1	-7.98941E-1	-9.13134E0	-9.14166E0	4.3869E-3	9.377E-2	2.72218E1	-3.26517E1	-3.26144E1	2.67795E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16822E-1	-7.98821E-1	-9.13134E0	-9.14142E0	4.22001E-3	9.37462E-2	2.73874E1	-3.26603E1	-3.26206E1	2.67984E1	1.19861E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.16941E-1	-7.98821E-1	-9.13129E0	-9.14185E0	4.02927E-3	9.38892E-2	2.72612E1	-3.26597E1	-3.2623E1	2.6777E1	1.20043E-7	2.51771E-3	2.51771E-3	6.29919E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.16894E-1	-7.98774E-1	-9.13138E0	-9.14173E0	4.33922E-3	9.39846E-2	2.72264E1	-3.26759E1	-3.26098E1	2.68924E1					
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16822E-1	-7.98678E-1	-9.13124E0	-9.14161E0	4.57764E-3	9.40084E-2	2.73267E1	-3.27065E1	-3.26032E1	2.67868E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16751E-1	-7.98726E-1	-9.13138E0	-9.14168E0	4.31538E-3	9.40323E-2	2.73646E1	-3.26735E1	-3.26248E1	2.68016E1	1.20017E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.1718E-1	-7.98774E-1	-9.13122E0	-9.14161E0	4.33922E-3	9.41515E-2	2.72491E1	-3.26685E1	-3.26419E1	2.67788E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.17013E-1	-7.9875E-1	-9.13124E0	-9.1419E0	4.24385E-3	9.38892E-2	2.72892E1	-3.26596E1	-3.26313E1	2.68022E1	1.19851E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.17013E-1	-7.98655E-1	-9.13134E0	-9.14171E0	4.64916E-3	9.39608E-2	2.73321E1	-3.26627E1	-3.26296E1	2.67972E1	1.19851E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.03286E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.17108E-1	-7.98559E-1	-9.13119E0	-9.1414E0	4.74453E-3	9.40084E-2	2.736E1	-3.26425E1	-3.26514E1	2.67878E1	1.19809E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.02133E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.1706E-1	-7.98702E-1	-9.13093E0	-9.14185E0	4.76837E-3	9.37939E-2	2.72408E1	-3.2638E1	-3.26765E1	2.6783E1	1.19953E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16917E-1	-7.9875E-1	-9.13115E0	-9.14185E0	4.88758E-3	9.38416E-2	2.73711E1	-3.26909E1	-3.25936E1	2.68319E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.16917E-1	-7.98678E-1	-9.13129E0	-9.14197E0	4.8399E-3	9.39369E-2	2.73718E1	-3.26609E1	-3.26579E1	2.67908E1	1.20092E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.17227E-1	-7.9906E-1	-9.1311E0	-9.14207E0	4.45843E-3	9.38892E-2	2.72967E1	-3.26597E1	-3.26356E1	2.67974E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9978E-1
