[Scan]
initial_time=2016-01-28T22:27:16
final_time=2016-01-28T22:27:36
ip_count=19
run=1026
dataset=10
scan=737
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.17084E-1
ql1_imon=1.40087E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=2.05997E-9
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=7.43699E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-2.52974E-10
mult1=-1.13538E-8
mult2=-2.8763E-9
rf_tmon=-5.66601E-3
rf_agc=3.21379E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.65975E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67635E0
bslens_imon=2.71079E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20229E1
lens5a_imon=2.00434E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=3.19317E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02186E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=1.09769E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42904E0
lens1_imon=2.6423E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03834E1
cs_ea2_imon=1.41205E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=3.04577E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.16277E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.27688E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15516E1
os_ea1_imon=2.44198E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.09911E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2569E0
cs_ionrep_imon=9.68277E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93532E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=1.96242E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.1384E-8
tplens_vset=1.4E-1
tplens_vmon=1.64624E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.50325E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26633E1
iondef2_imon=1.59338E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98411E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=3.9713E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26652E0
ionrepsh_imon=8.66978E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33544E1
lens5b_imon=2.1781E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.16794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49543E0
os_ea2_imon=-4.90409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.19065E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.31317E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09437E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10685E1
os_restr2_imon=3.364E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23018E2
cs_ionfoca_imon=6.31226E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02001E1
cs_anode2_imon=2.09E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72901E1
iondef1_imon=1.09373E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.90847E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.28814E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0959E0
cs_ionaccel_imon=-1.06259E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47489E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.13739E-1
window_imon=-6.91381E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.87269E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.80819E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.56088E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.50177E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55194E0
defgridb_imon=6.18236E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33144E1
os_fil1_imon=9.41183E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08488E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60967E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31641E1
cs_fil1_imon=7.49722E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.17907E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61742E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1571E-2
os_fil2_imon=-2.28154E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10328E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.48466E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.17343E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.71925E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21502E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19646E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.08836E-1
res40_imon=-2.24109E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.17084E-1	-7.98702E-1	-9.13129E0	-9.14164E0	4.36306E-3	9.38177E-2	2.72148E1	-3.2649E1	-3.26585E1	2.68076E1	1.19861E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00041E-1
2.0E0	4.7E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.16989E-1	-7.98965E-1	-9.13143E0	-9.14173E0	4.3869E-3	9.37223E-2	2.74235E1	-3.26597E1	-3.26104E1	2.68069E1	1.198E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16846E-1	-7.98917E-1	-9.13131E0	-9.14176E0	4.26769E-3	9.37223E-2	2.71505E1	-3.2659E1	-3.26461E1	2.68285E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9978E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.17108E-1	-7.98869E-1	-9.13122E0	-9.14178E0	4.26769E-3	9.36985E-2	2.7367E1	-3.26663E1	-3.26062E1	2.68094E1	1.20209E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.17108E-1	-7.98965E-1	-9.13115E0	-9.14185E0	4.62532E-3	9.36031E-2	2.7254E1	-3.26416E1	-3.2641E1	2.67992E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.16822E-1	-7.99155E-1	-9.13131E0	-9.14173E0	4.52995E-3	9.34124E-2	2.72012E1	-3.26518E1	-3.2629E1	2.67962E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.16989E-1	-7.99322E-1	-9.131E0	-9.14204E0	4.24385E-3	9.34124E-2	2.74229E1	-3.26518E1	-3.26657E1	2.68184E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.17275E-1	-7.98774E-1	-9.13129E0	-9.14156E0	4.31538E-3	9.38177E-2	2.71897E1	-3.26747E1	-3.26182E1	2.68022E1	1.20069E-7	2.51334E-3	2.51334E-3	6.34588E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.17013E-1	-7.98869E-1	-9.13115E0	-9.14168E0	4.1008E-3	9.38654E-2	2.73027E1	-3.26679E1	-3.26213E1	2.67998E1	1.20749E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.17156E-1	-7.98774E-1	-9.13112E0	-9.14156E0	4.48227E-3	9.377E-2	2.73322E1	-3.26732E1	-3.26136E1	2.68065E1	1.20004E-7	2.52061E-3	2.52061E-3	6.34518E-3	3.00197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.17227E-1	-7.98678E-1	-9.1316E0	-9.14164E0	4.22001E-3	9.36747E-2	2.71549E1	-3.2641E1	-3.2626E1	2.68274E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01995E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.17084E-1	-7.99036E-1	-9.13157E0	-9.14178E0	4.55379E-3	9.34839E-2	2.73452E1	-3.26986E1	-3.26095E1	2.6804E1	1.19872E-7	2.51804E-3	2.51804E-3	6.34099E-3	3.01742E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.17037E-1	-7.98845E-1	-9.13167E0	-9.14211E0	4.19617E-3	9.38654E-2	2.72555E1	-3.26346E1	-3.26407E1	2.67968E1	1.19697E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.1687E-1	-7.99179E-1	-9.13143E0	-9.1418E0	4.26769E-3	9.377E-2	2.73157E1	-3.26408E1	-3.26219E1	2.67932E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.17418E-1	-7.9906E-1	-9.13143E0	-9.1419E0	4.62532E-3	9.377E-2	2.72485E1	-3.26602E1	-3.26254E1	2.6796E1	1.20106E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.01995E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.17084E-1	-7.99108E-1	-9.13146E0	-9.14204E0	4.72069E-3	9.36985E-2	2.73604E1	-3.26627E1	-3.26302E1	2.68106E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01995E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.17204E-1	-7.98821E-1	-9.13141E0	-9.1423E0	4.62532E-3	9.377E-2	2.72981E1	-3.26509E1	-3.26144E1	2.68088E1	1.19927E-7	2.51471E-3	2.51471E-3	6.31009E-3	2.9841E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.17084E-1	-7.98965E-1	-9.13136E0	-9.14218E0	4.88758E-3	9.41038E-2	2.7391E1	-3.26567E1	-3.26308E1	2.67998E1					
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.17132E-1	-7.98535E-1	-9.13122E0	-9.14233E0	4.29153E-3	9.39846E-2	2.71759E1	-3.26337E1	-3.26526E1	2.68112E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.97963E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.17084E-1	-7.98559E-1	-9.13117E0	-9.14197E0	4.41074E-3	9.36031E-2	2.72901E1	-3.26633E1	-3.26254E1	2.68106E1	1.19646E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.01738E-1
