[Scan]
initial_time=2016-01-28T22:28:10
final_time=2016-01-28T22:28:29
ip_count=19
run=1026
dataset=10
scan=739
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08845E-4
ql1_vset=
ql1_vmon=-8.16846E-1
ql1_imon=1.39696E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=2.01629E-9
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=6.55806E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-2.49887E-10
mult1=-9.7949E-9
mult2=-2.72914E-9
rf_tmon=-5.90754E-3
rf_agc=3.27546E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.68761E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62288E0
bslens_imon=2.60264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20103E1
lens5a_imon=2.00434E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.0536E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53308E1
cs_ef1b_imon=3.18235E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0503E1
cs_ea1_imon=1.07426E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39119E0
lens1_imon=2.73242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65002E1
os_ef1alow_imon=2.986E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.036E1
cs_ea2_imon=1.40303E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84365E1
cs_ef1a_imon=3.04855E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.15634E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11216E1
os_restr1_imon=4.29686E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15372E1
os_ea1_imon=2.45712E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63589E1
os_ef1bup_imon=3.10103E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21425E0
cs_ionrep_imon=9.49171E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01896E1
cs_anode1_imon=1.9667E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.13588E-8
tplens_vset=1.4E-1
tplens_vmon=1.64744E0
tplens_imon=-3.6063E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.52164E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26732E1
iondef2_imon=1.58112E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0295E2
lens6_imon=2.9827E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=3.97687E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26171E0
ionrepsh_imon=8.51477E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33562E1
lens5b_imon=2.18747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74611E1
cs_ef2b_imon=3.13126E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48041E0
os_ea2_imon=-7.17521E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00756E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71316E1
cs_ef2a_imon=3.20355E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08815E0
os_ef2alow_imon=-2.42515E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70587E-1
os_ef2bup_imon=-5.1984E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10747E1
os_restr2_imon=3.37557E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.31478E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.10015E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73771E1
iondef1_imon=1.07498E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67968E1
iondef4_imon=1.10102E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.87951E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.24165E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13593E0
cs_ionaccel_imon=-7.39649E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47376E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56295E1
einzel_imon=7.73649E-6
window_vset=0.0E0
window_vmon=2.31587E-1
window_imon=-9.34263E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39247E-4
mask2_vset=0.0E0
mask2_vmon=-1.86999E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.54143E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.78439E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.42967E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48878E0
defgridb_imon=6.15712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33161E1
os_fil1_imon=9.41916E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08152E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61034E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3154E1
cs_fil1_imon=7.6639E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.29148E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61409E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06681E-2
os_fil2_imon=-2.47225E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.21934E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.58778E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27779E-1
cs_fil2_imon=-2.14211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.65171E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21452E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=2.99594E-1
chamber_ion_pmon=1.19941E-7
chamber_cvt_pmon=2.52236E-3
foreline_cvt_pmon=2.52236E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.56513E-1
res40_imon=-2.32784E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.16941E-1	-7.98941E-1	-9.13107E0	-9.1418E0	4.45843E-3	9.41038E-2	2.73016E1	-3.26673E1	-3.26396E1	2.67908E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.0968E0	-8.16965E-1	-7.98965E-1	-9.13134E0	-9.14171E0	4.31538E-3	9.38177E-2	2.72971E1	-3.26707E1	-3.25948E1	2.68272E1	1.20069E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01085E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09665E0	-8.16894E-1	-7.99012E-1	-9.13141E0	-9.14168E0	4.41074E-3	9.38654E-2	2.74136E1	-3.26714E1	-3.26166E1	2.6784E1	1.19804E-7	2.51538E-3	2.51538E-3	6.31555E-3	3.00507E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09657E0	-8.1687E-1	-7.98798E-1	-9.13124E0	-9.14178E0	4.55379E-3	9.40084E-2	2.72101E1	-3.26585E1	-3.26195E1	2.67583E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09727E0	-8.16679E-1	-7.99203E-1	-9.13148E0	-9.14168E0	4.55379E-3	9.39608E-2	2.73437E1	-3.26597E1	-3.26242E1	2.6798E1	1.20004E-7	2.51739E-3	2.51739E-3	6.34518E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09657E0	-8.16703E-1	-7.98941E-1	-9.13153E0	-9.14168E0	4.31538E-3	9.39608E-2	2.7251E1	-3.26705E1	-3.26242E1	2.68034E1	1.19757E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09657E0	-8.17204E-1	-7.9906E-1	-9.13124E0	-9.14192E0	3.91006E-3	9.37462E-2	2.73063E1	-3.26735E1	-3.2599E1	2.68022E1	1.19766E-7	2.51581E-3	2.51581E-3	6.29624E-3	2.98819E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.17323E-1	-7.9844E-1	-9.13124E0	-9.14195E0	4.41074E-3	9.39608E-2	2.73255E1	-3.26687E1	-3.26326E1	2.68316E1	1.20069E-7	2.52647E-3	2.52647E-3	6.33486E-3	3.00302E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16894E-1	-7.98726E-1	-9.13131E0	-9.14207E0	4.41074E-3	9.41515E-2	2.71823E1	-3.26573E1	-3.2637E1	2.68267E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.16727E-1	-7.98965E-1	-9.13112E0	-9.14195E0	4.19617E-3	9.38416E-2	2.7332E1	-3.26854E1	-3.26438E1	2.68004E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01223E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.1687E-1	-7.98917E-1	-9.13126E0	-9.14197E0	4.41074E-3	9.39846E-2	2.73189E1	-3.27035E1	-3.26272E1	2.6801E1	1.20084E-7	2.52362E-3	2.52362E-3	6.32978E-3	3.00144E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16822E-1	-7.98845E-1	-9.13131E0	-9.14187E0	4.52995E-3	9.377E-2	2.72955E1	-3.26639E1	-3.2611E1	2.6792E1	1.19705E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16894E-1	-7.98988E-1	-9.13138E0	-9.14183E0	4.31538E-3	9.35793E-2	2.73141E1	-3.26825E1	-3.26771E1	2.67854E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.1687E-1	-7.98678E-1	-9.13153E0	-9.14176E0	4.52995E-3	9.36747E-2	2.72757E1	-3.26428E1	-3.26446E1	2.68196E1	1.19705E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.99E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16798E-1	-7.98845E-1	-9.13126E0	-9.14185E0	4.55379E-3	9.377E-2	2.72921E1	-3.26638E1	-3.26573E1	2.67818E1	1.20017E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-8.16631E-1	-7.98845E-1	-9.13124E0	-9.14176E0	4.43459E-3	9.37223E-2	2.73751E1	-3.26585E1	-3.26516E1	2.67931E1	1.19902E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.98665E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16751E-1	-7.98202E-1	-9.13105E0	-9.14195E0	4.45843E-3	9.38416E-2	2.72866E1	-3.26744E1	-3.26661E1	2.67951E1	1.19634E-7	2.5199E-3	2.5199E-3	6.29703E-3	3.00741E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16774E-1	-7.98416E-1	-9.13146E0	-9.14226E0	4.19617E-3	9.38177E-2	2.73069E1	-3.2635E1	-3.26374E1	2.67908E1	1.20392E-7	2.52106E-3	2.52106E-3	6.29002E-3	2.99811E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16965E-1	-7.98702E-1	-9.13146E0	-9.14207E0	4.45843E-3	9.38416E-2	2.7324E1	-3.26638E1	-3.2626E1	2.67827E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.16846E-1	-7.98535E-1	-9.13157E0	-9.14197E0	4.31538E-3	9.37939E-2	2.73771E1	-3.26732E1	-3.2626E1	2.67968E1	1.19941E-7	2.52236E-3	2.52236E-3	6.31269E-3	2.99594E-1
