[Scan]
initial_time=2016-01-28T22:29:03
final_time=2016-01-28T22:29:23
ip_count=19
run=1026
dataset=10
scan=741
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09711E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-8.16846E-1
ql1_imon=1.40559E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=1.99131E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=5.90098E-10
ql4_vset=
ql4_vmon=-9.14171E0
ql4_imon=-2.4811E-10
mult1=-9.78308E-9
mult2=-2.64094E-9
rf_tmon=-3.31787E-3
rf_agc=3.41645E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.71999E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6556E0
bslens_imon=2.70607E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19742E1
lens5a_imon=1.99324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05015E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=3.18741E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.0204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05189E1
cs_ea1_imon=1.11299E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34483E0
lens1_imon=2.49371E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.41384E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=3.03964E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.15417E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=4.30211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.4438E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.10163E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22614E0
cs_ionrep_imon=9.65393E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93523E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=1.97071E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.13254E-8
tplens_vset=1.4E-1
tplens_vmon=1.64379E0
tplens_imon=-1.75008E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26313E1
iondef3_imon=1.49418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26596E1
iondef2_imon=1.57594E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98356E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.9824E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25269E0
ionrepsh_imon=8.5461E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33888E1
lens5b_imon=2.1872E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45207E0
os_ea2_imon=-7.66089E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00832E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.19714E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08836E-1
os_ef2bup_imon=-5.11705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=3.36544E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.32866E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.09576E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72845E1
iondef1_imon=1.09918E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67872E1
iondef4_imon=1.10179E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.90686E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.23241E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-7.49045E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56183E1
einzel_imon=7.85362E-6
window_vset=0.0E0
window_vmon=2.3356E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39282E-4
mask2_vset=0.0E0
mask2_vmon=-1.87035E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.55152E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.71622E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.36393E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43508E0
defgridb_imon=6.07913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33163E1
os_fil1_imon=9.43814E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08488E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60725E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31586E1
cs_fil1_imon=7.34104E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.67762E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61353E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.12966E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.24143E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61984E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.17343E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46057E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21648E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.4879E-1
res40_imon=-2.32758E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16917E-1	-7.98821E-1	-9.13119E0	-9.14211E0	4.22001E-3	9.38416E-2	2.73833E1	-3.26399E1	-3.26422E1	2.67914E1	1.20106E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.0148E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.17084E-1	-7.98702E-1	-9.13153E0	-9.14183E0	4.31538E-3	9.38892E-2	2.7253E1	-3.26793E1	-3.26266E1	2.67902E1	1.20243E-7	2.52131E-3	2.52131E-3	6.3074E-3	2.99093E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.16703E-1	-7.98893E-1	-9.13167E0	-9.14176E0	4.14848E-3	9.38892E-2	2.73522E1	-3.26292E1	-3.26432E1	2.68157E1	1.20174E-7	2.52045E-3	2.52045E-3	6.30192E-3	2.99E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09309E0	-8.16774E-1	-7.98678E-1	-9.1315E0	-9.14168E0	4.50611E-3	9.41038E-2	2.73045E1	-3.26621E1	-3.26158E1	2.67932E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.16679E-1	-7.98416E-1	-9.13138E0	-9.14192E0	4.33922E-3	9.39369E-2	2.7222E1	-3.26579E1	-3.26408E1	2.67937E1	1.19925E-7	2.51359E-3	2.51359E-3	6.31858E-3	2.99083E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16727E-1	-7.98512E-1	-9.13115E0	-9.14199E0	4.52995E-3	9.39846E-2	2.73153E1	-3.26858E1	-3.26216E1	2.68007E1	1.19683E-7	2.52093E-3	2.52093E-3	6.29703E-3	3.03476E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16774E-1	-7.98702E-1	-9.13131E0	-9.14195E0	4.05312E-3	9.38177E-2	2.72294E1	-3.26446E1	-3.26434E1	2.68016E1	1.20005E-7	2.51411E-3	2.51411E-3	6.31321E-3	3.00087E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.16917E-1	-7.98535E-1	-9.13146E0	-9.14183E0	4.60148E-3	9.37462E-2	2.74096E1	-3.26428E1	-3.25972E1	2.67758E1	1.20069E-7	2.51116E-3	2.51116E-3	6.31837E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.1656E-1	-7.98917E-1	-9.13131E0	-9.14161E0	4.19617E-3	9.40561E-2	2.72811E1	-3.26549E1	-3.262E1	2.68076E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.98481E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16584E-1	-7.99012E-1	-9.13117E0	-9.14173E0	4.14848E-3	9.38654E-2	2.71951E1	-3.26272E1	-3.2647E1	2.6786E1	1.19646E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99941E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.1687E-1	-7.98631E-1	-9.13086E0	-9.14202E0	4.43459E-3	9.36031E-2	2.73782E1	-3.26655E1	-3.26626E1	2.6804E1	1.19861E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.1687E-1	-7.98798E-1	-9.13122E0	-9.14183E0	4.60148E-3	9.38892E-2	2.71894E1	-3.26762E1	-3.2626E1	2.67956E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16894E-1	-7.98583E-1	-9.13112E0	-9.14199E0	4.55379E-3	9.36747E-2	2.73994E1	-3.26663E1	-3.2653E1	2.68028E1	1.19757E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.01871E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16846E-1	-7.98583E-1	-9.13162E0	-9.14192E0	4.05312E-3	9.37223E-2	2.72101E1	-3.26372E1	-3.26319E1	2.6786E1	1.20137E-7	2.51581E-3	2.51581E-3	6.3074E-3	2.99879E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.16917E-1	-7.98297E-1	-9.13162E0	-9.14192E0	4.29153E-3	9.38892E-2	2.72907E1	-3.27029E1	-3.26284E1	2.68215E1	1.198E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.16941E-1	-7.98321E-1	-9.13138E0	-9.14171E0	4.48227E-3	9.377E-2	2.73496E1	-3.26536E1	-3.26278E1	2.67938E1	1.19953E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.01223E-1
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.16965E-1	-7.98488E-1	-9.13138E0	-9.14185E0	4.36306E-3	9.37223E-2	2.72859E1	-3.26681E1	-3.2599E1	2.68076E1	1.19713E-7	2.5147E-3	2.5147E-3	6.3074E-3	3.00676E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.16917E-1	-7.9813E-1	-9.13134E0	-9.14176E0	4.33922E-3	9.35555E-2	2.72839E1	-3.26461E1	-3.26573E1	2.67992E1	1.19907E-7	2.51647E-3	2.51647E-3	6.31555E-3	2.99861E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09665E0	-8.16774E-1	-7.98368E-1	-9.13122E0	-9.14199E0	4.57764E-3	9.35316E-2	2.72853E1	-3.26807E1	-3.25828E1	2.68106E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09711E0	-8.16846E-1	-7.98416E-1	-9.13129E0	-9.14171E0	4.31538E-3	9.33647E-2	2.72845E1	-3.26596E1	-3.26313E1	2.67872E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00041E-1
