[Scan]
initial_time=2016-01-28T22:41:14
final_time=2016-01-28T22:41:33
ip_count=19
run=1026
dataset=10
scan=743
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08827E-4
ql1_vset=
ql1_vmon=-8.16274E-1
ql1_imon=1.39511E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=2.01782E-9
ql3_vset=
ql3_vmon=-9.13162E0
ql3_imon=5.7168E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-2.12753E-10
mult1=-9.95712E-9
mult2=-2.84636E-9
rf_tmon=-4.4223E-3
rf_agc=3.24684E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.69196E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66373E0
bslens_imon=2.76126E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.99821E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.19312E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02344E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0467E1
cs_ea1_imon=1.09409E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41522E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64701E1
os_ef1alow_imon=2.96445E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.40267E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84249E1
cs_ef1a_imon=3.04751E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.15221E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11222E1
os_restr1_imon=4.30451E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15083E1
os_ea1_imon=2.46253E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08747E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=9.4124E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01769E1
cs_anode1_imon=1.96566E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.13328E-8
tplens_vset=1.4E-1
tplens_vmon=1.65766E0
tplens_imon=-1.19098E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.50037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2647E1
iondef2_imon=1.58869E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98526E-4
ql6_vset=1.0E-1
ql6_vmon=9.39846E-2
ql6_imon=3.98433E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27673E0
ionrepsh_imon=8.74548E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.19757E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7475E1
cs_ef2b_imon=3.14238E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.469E0
os_ea2_imon=-6.52631E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71159E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06904E0
os_ef2alow_imon=-2.49813E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18082E-1
os_ef2bup_imon=-5.25053E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10938E1
os_restr2_imon=3.37522E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.29604E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.09077E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74199E1
iondef1_imon=1.09265E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67848E1
iondef4_imon=1.0892E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.89945E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.23205E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10929E0
cs_ionaccel_imon=-7.5355E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56318E1
einzel_imon=7.81642E-6
window_vset=0.0E0
window_vmon=2.28112E-1
window_imon=-1.03157E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39362E-4
mask2_vset=0.0E0
mask2_vmon=-1.86975E1
mask2_imon=-6.2149E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.49817E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93751E3
defgrida_imon=6.69426E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.3756E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58202E0
defgridb_imon=6.25085E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3316E1
os_fil1_imon=9.41036E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08592E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60697E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31554E1
cs_fil1_imon=8.38791E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.93816E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61172E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.38537E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.23671E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.58778E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28653E-1
cs_fil2_imon=-2.33904E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55904E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21428E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.34503E-1
res40_imon=-2.28266E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.16607E-1	-7.98893E-1	-9.13146E0	-9.14171E0	4.36306E-3	9.38177E-2	2.7301E1	-3.26378E1	-3.26077E1	2.67854E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16345E-1	-7.98464E-1	-9.13122E0	-9.14185E0	4.22001E-3	9.38892E-2	2.72531E1	-3.26676E1	-3.26291E1	2.67896E1	1.20311E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09696E0	-8.16369E-1	-7.98607E-1	-9.13136E0	-9.1418E0	4.3869E-3	9.41277E-2	2.71921E1	-3.26544E1	-3.26341E1	2.67944E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9978E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09704E0	-8.16846E-1	-7.98607E-1	-9.13117E0	-9.14207E0	4.3869E-3	9.36508E-2	2.73994E1	-3.26735E1	-3.26681E1	2.67932E1	1.198E-7	2.51096E-3	2.51096E-3	6.3074E-3	2.9841E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09719E0	-8.16917E-1	-7.98678E-1	-9.13134E0	-9.14192E0	4.673E-3	9.36508E-2	2.72606E1	-3.26753E1	-3.2635E1	2.68088E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.97963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09734E0	-8.17251E-1	-7.98774E-1	-9.13126E0	-9.14171E0	4.62532E-3	9.35555E-2	2.73682E1	-3.26897E1	-3.25942E1	2.68214E1	1.19851E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.9841E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.0968E0	-8.16607E-1	-7.98702E-1	-9.13124E0	-9.14185E0	4.57764E-3	9.38892E-2	2.7245E1	-3.26482E1	-3.26086E1	2.68038E1	1.19809E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.16607E-1	-7.98893E-1	-9.13134E0	-9.14195E0	4.64916E-3	9.38177E-2	2.71867E1	-3.26554E1	-3.26248E1	2.68286E1	1.19766E-7	2.51248E-3	2.51248E-3	6.31858E-3	3.00144E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09711E0	-8.16703E-1	-7.98965E-1	-9.131E0	-9.14168E0	4.88758E-3	9.408E-2	2.7093E1	-3.2647E1	-3.26224E1	2.6828E1	1.19705E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0965E0	-8.16941E-1	-7.98917E-1	-9.13115E0	-9.14161E0	4.52995E-3	9.377E-2	2.70954E1	-3.26567E1	-3.2611E1	2.6789E1	1.20278E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02922E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.16751E-1	-7.98607E-1	-9.13119E0	-9.14178E0	4.41074E-3	9.39846E-2	2.72854E1	-3.26179E1	-3.2659E1	2.67659E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02922E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0965E0	-8.16631E-1	-7.99012E-1	-9.13129E0	-9.1418E0	4.31538E-3	9.37939E-2	2.73712E1	-3.26765E1	-3.26038E1	2.68112E1	1.20092E-7	2.52025E-3	2.52025E-3	6.31798E-3	3.01104E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09688E0	-8.16464E-1	-7.99203E-1	-9.13131E0	-9.14173E0	4.48227E-3	9.37939E-2	2.74066E1	-3.26693E1	-3.26404E1	2.68196E1	1.19965E-7	2.51007E-3	2.51007E-3	6.32936E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.16536E-1	-7.98798E-1	-9.13115E0	-9.1419E0	4.33922E-3	9.39608E-2	2.73293E1	-3.26419E1	-3.2629E1	2.67955E1	1.19705E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00563E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.16607E-1	-7.98607E-1	-9.13143E0	-9.14176E0	4.41074E-3	9.37939E-2	2.74378E1	-3.26472E1	-3.26349E1	2.68034E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01738E-1
1.9E1	0.0E0	2.0E0	7.68E2	5.29E2	-2.09588E0	-8.16345E-1	-7.98416E-1	-9.13141E0	-9.14195E0	4.24385E-3	9.37939E-2	2.72059E1	-3.26725E1	-3.26395E1	2.67926E1	1.19749E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.99175E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.16417E-1	-7.98202E-1	-9.13124E0	-9.14166E0	4.33922E-3	9.38892E-2	2.73517E1	-3.26638E1	-3.26437E1	2.68088E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16345E-1	-7.98559E-1	-9.13131E0	-9.14164E0	4.3869E-3	9.41277E-2	2.72246E1	-3.26759E1	-3.26026E1	2.67932E1	1.20122E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09642E0	-8.1625E-1	-7.98726E-1	-9.13138E0	-9.14202E0	4.31538E-3	9.38416E-2	2.72603E1	-3.26585E1	-3.26508E1	2.68024E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16274E-1	-7.98607E-1	-9.13162E0	-9.14195E0	4.48227E-3	9.39846E-2	2.74199E1	-3.2647E1	-3.26242E1	2.67848E1	1.19851E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.01738E-1
