[Scan]
initial_time=2016-01-28T22:41:40
final_time=2016-01-28T22:42:00
ip_count=19
run=1026
dataset=10
scan=744
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=1.39484E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.05598E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=5.095E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-2.33161E-10
mult1=-1.03545E-8
mult2=-2.74256E-9
rf_tmon=-4.54847E-3
rf_agc=3.32735E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.70298E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60605E0
bslens_imon=2.53415E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19863E1
lens5a_imon=2.00578E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53713E1
cs_ef1b_imon=3.17505E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02308E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04964E1
cs_ea1_imon=1.09553E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37016E0
lens1_imon=2.4981E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64707E1
os_ef1alow_imon=2.98565E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03895E1
cs_ea2_imon=1.39763E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84435E1
cs_ef1a_imon=3.03361E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.1494E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11222E1
os_restr1_imon=4.30902E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15071E1
os_ea1_imon=2.4665E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.0906E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2515E0
cs_ionrep_imon=9.54218E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01966E1
cs_anode1_imon=1.97122E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.13103E-8
tplens_vset=1.4E-1
tplens_vmon=1.67027E0
tplens_imon=-3.5342E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26428E1
iondef3_imon=1.49857E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.57535E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98396E-4
ql6_vset=1.0E-1
ql6_vmon=9.408E-2
ql6_imon=3.97792E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26532E0
ionrepsh_imon=8.54E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33808E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.12987E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47921E0
os_ea2_imon=-5.73322E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00731E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7102E1
cs_ef2a_imon=3.2032E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07193E0
os_ef2alow_imon=-2.42515E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85067E-1
os_ef2bup_imon=-5.20882E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10915E1
os_restr2_imon=3.37314E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.30505E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.1012E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7409E1
iondef1_imon=1.11644E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67866E1
iondef4_imon=1.09893E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.87727E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.20509E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12725E0
cs_ionaccel_imon=-8.43906E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47275E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.79557E-6
window_vset=0.0E0
window_vmon=2.17686E-1
window_imon=-8.57807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39397E-4
mask2_vset=0.0E0
mask2_vmon=-1.86917E1
mask2_imon=-5.51985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.53061E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.59332E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.55224E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43765E0
defgridb_imon=6.19317E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33169E1
os_fil1_imon=9.41586E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0774E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60438E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31575E1
cs_fil1_imon=8.27786E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.53474E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61016E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18289E-2
os_fil2_imon=-2.4375E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18458E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.60582E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28903E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41424E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21374E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.03286E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.47246E-1
res40_imon=-2.22706E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16607E-1	-7.98392E-1	-9.13119E0	-9.14187E0	4.62532E-3	9.38892E-2	2.72797E1	-3.26443E1	-3.2652E1	2.67878E1	1.198E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.00453E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16703E-1	-7.9844E-1	-9.13115E0	-9.14195E0	4.86374E-3	9.39846E-2	2.71967E1	-3.26395E1	-3.26242E1	2.6801E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02133E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16369E-1	-7.98917E-1	-9.13117E0	-9.14199E0	4.45843E-3	9.42707E-2	2.74047E1	-3.26585E1	-3.26127E1	2.68007E1	1.19809E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.01085E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.1625E-1	-7.99084E-1	-9.13126E0	-9.14171E0	4.05312E-3	9.41038E-2	2.74745E1	-3.26597E1	-3.26476E1	2.68184E1	1.1969E-7	2.51498E-3	2.51498E-3	6.31798E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.16321E-1	-7.99131E-1	-9.13117E0	-9.14204E0	4.31538E-3	9.36747E-2	2.74487E1	-3.26609E1	-3.26254E1	2.68001E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9926E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.16369E-1	-7.99084E-1	-9.13155E0	-9.14226E0	4.3869E-3	9.38654E-2	2.73141E1	-3.26693E1	-3.262E1	2.67931E1	1.20084E-7	2.51248E-3	2.51248E-3	6.3074E-3	3.00942E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16488E-1	-7.98631E-1	-9.13146E0	-9.14199E0	4.26769E-3	9.36031E-2	2.74449E1	-3.26767E1	-3.26543E1	2.68046E1	1.20004E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.0148E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16512E-1	-7.98845E-1	-9.13157E0	-9.14199E0	4.24385E-3	9.38654E-2	2.7388E1	-3.26488E1	-3.26543E1	2.68016E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.1625E-1	-7.99203E-1	-9.1315E0	-9.14195E0	4.29153E-3	9.38177E-2	2.71273E1	-3.26422E1	-3.26152E1	2.68346E1	1.19913E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.16226E-1	-7.99179E-1	-9.13117E0	-9.14173E0	4.31538E-3	9.38416E-2	2.71026E1	-3.2653E1	-3.2638E1	2.67866E1	1.19965E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.16202E-1	-7.98869E-1	-9.13122E0	-9.14171E0	4.48227E-3	9.40084E-2	2.72555E1	-3.26199E1	-3.26609E1	2.67746E1	1.20122E-7	2.5188E-3	2.5188E-3	6.28552E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0968E0	-8.16202E-1	-7.98988E-1	-9.13084E0	-9.1418E0	4.57764E-3	9.34839E-2	2.74301E1	-3.26843E1	-3.26416E1	2.68364E1	1.19601E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01347E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-8.16417E-1	-7.98821E-1	-9.131E0	-9.14197E0	4.3869E-3	9.36031E-2	2.71665E1	-3.2649E1	-3.26402E1	2.68064E1	1.19861E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.16584E-1	-7.98726E-1	-9.13115E0	-9.14195E0	4.41074E-3	9.35793E-2	2.71903E1	-3.26158E1	-3.26302E1	2.67986E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.16512E-1	-7.98655E-1	-9.13117E0	-9.14207E0	4.52995E-3	9.37939E-2	2.71451E1	-3.2686E1	-3.26519E1	2.68093E1	1.19757E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.1625E-1	-7.98965E-1	-9.13141E0	-9.1418E0	4.57764E-3	9.38416E-2	2.72201E1	-3.26539E1	-3.26273E1	2.67845E1	1.19765E-7	2.52123E-3	2.52123E-3	6.31242E-3	2.99577E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09673E0	-8.16464E-1	-7.98678E-1	-9.13155E0	-9.14202E0	4.95911E-3	9.38654E-2	2.73568E1	-3.26891E1	-3.26194E1	2.6789E1	1.20207E-7	2.51709E-3	2.51709E-3	6.27728E-3	3.006E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.16417E-1	-7.98941E-1	-9.13138E0	-9.1424E0	4.55379E-3	9.37462E-2	2.73435E1	-3.26645E1	-3.2647E1	2.67891E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.99E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.16393E-1	-7.98917E-1	-9.13141E0	-9.14211E0	4.62532E-3	9.39131E-2	2.71452E1	-3.26526E1	-3.26301E1	2.68004E1	1.20004E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16059E-1	-7.98655E-1	-9.13148E0	-9.14204E0	4.43459E-3	9.408E-2	2.7409E1	-3.26717E1	-3.26428E1	2.67866E1	1.19953E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.03286E-1
