[Scan]
initial_time=2016-01-28T22:42:07
final_time=2016-01-28T22:42:26
ip_count=19
run=1026
dataset=10
scan=745
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0965E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=1.39551E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=2.04579E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=5.41079E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-2.16556E-10
mult1=-9.87283E-9
mult2=-2.88229E-9
rf_tmon=-5.06518E-3
rf_agc=3.18796E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.71272E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61784E0
bslens_imon=2.25303E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20078E1
lens5a_imon=1.99642E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05054E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=3.18236E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02333E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04793E1
cs_ea1_imon=1.0829E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40205E0
lens1_imon=2.58573E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.4018E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=3.03676E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.14831E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.30319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15447E1
os_ea1_imon=2.45407E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25033E0
cs_ionrep_imon=9.58668E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91922E2
cs_nozzle_imon=1.93459E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=1.96062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.12513E-8
tplens_vset=1.4E-1
tplens_vmon=1.63494E0
tplens_imon=-3.66136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26152E1
iondef3_imon=1.49737E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.57594E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98541E-4
ql6_vset=1.0E-1
ql6_vmon=9.41753E-2
ql6_imon=3.98381E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24856E0
ionrepsh_imon=8.58857E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33829E1
lens5b_imon=2.18861E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.1438E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41963E0
os_ea2_imon=-6.45749E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00669E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.19822E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06177E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=3.37553E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23021E2
cs_ionfoca_imon=6.31521E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74229E1
iondef1_imon=1.07547E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68202E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.91164E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.21522E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-8.24728E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=2.35362E-1
window_imon=-8.7158E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.87035E1
mask2_imon=-5.43619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.21174E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.17469E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.58692E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61816E0
defgridb_imon=6.31627E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3314E1
os_fil1_imon=9.41297E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07804E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6071E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31568E1
cs_fil1_imon=7.22692E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.92679E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61094E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02836E-2
os_fil2_imon=-2.30557E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10328E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.90079E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29263E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43655E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21492E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.77312E-1
res40_imon=-2.38885E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.1656E-1	-7.98678E-1	-9.13126E0	-9.14223E0	4.64916E-3	9.37462E-2	2.7379E1	-3.26536E1	-3.26158E1	2.68184E1	1.198E-7	2.52492E-3	2.52492E-3	6.30202E-3	3.02253E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.16655E-1	-7.98488E-1	-9.13143E0	-9.14199E0	4.50611E-3	9.36508E-2	2.71533E1	-3.26731E1	-3.26034E1	2.67842E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.03976E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09665E0	-8.16512E-1	-7.98678E-1	-9.13112E0	-9.14218E0	4.52995E-3	9.39846E-2	2.71087E1	-3.26614E1	-3.26136E1	2.67998E1	1.20084E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.01209E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-8.16989E-1	-7.98631E-1	-9.13115E0	-9.14171E0	4.74453E-3	9.40323E-2	2.70774E1	-3.26837E1	-3.2626E1	2.6822E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.16655E-1	-7.98583E-1	-9.13098E0	-9.14195E0	4.79221E-3	9.39131E-2	2.71158E1	-3.26452E1	-3.26272E1	2.67962E1	1.19766E-7	2.5225E-3	2.5225E-3	6.31858E-3	3.00144E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09642E0	-8.16941E-1	-7.99155E-1	-9.13119E0	-9.14183E0	4.86374E-3	9.39131E-2	2.72522E1	-3.26699E1	-3.26482E1	2.67824E1	1.19902E-7	2.52492E-3	2.52492E-3	6.31817E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.16464E-1	-7.98845E-1	-9.13088E0	-9.14199E0	4.48227E-3	9.40084E-2	2.73912E1	-3.2672E1	-3.26337E1	2.68047E1	1.19705E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.97963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16488E-1	-7.98774E-1	-9.13117E0	-9.14216E0	4.17233E-3	9.38892E-2	2.73213E1	-3.26561E1	-3.25984E1	2.68051E1	1.19953E-7	2.51203E-3	2.51203E-3	6.29128E-3	3.00453E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.16512E-1	-7.98416E-1	-9.13122E0	-9.14221E0	4.14848E-3	9.37939E-2	2.7411E1	-3.26872E1	-3.26083E1	2.6792E1	1.19713E-7	2.51915E-3	2.51915E-3	6.32978E-3	2.99083E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.16298E-1	-7.98678E-1	-9.13117E0	-9.14207E0	4.29153E-3	9.408E-2	2.72983E1	-3.26289E1	-3.26385E1	2.67978E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02396E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16417E-1	-7.98774E-1	-9.13124E0	-9.14207E0	4.22001E-3	9.36747E-2	2.72941E1	-3.26162E1	-3.26303E1	2.6813E1	1.20226E-7	2.51265E-3	2.51265E-3	6.3126E-3	3.01237E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.16464E-1	-7.98512E-1	-9.13117E0	-9.14197E0	4.41074E-3	9.408E-2	2.74722E1	-3.27001E1	-3.26168E1	2.67998E1	1.19883E-7	2.51952E-3	2.51952E-3	6.3131E-3	2.9971E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.16321E-1	-7.98631E-1	-9.13141E0	-9.14204E0	4.31538E-3	9.39846E-2	2.7218E1	-3.26464E1	-3.26152E1	2.6804E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.97704E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16488E-1	-7.98774E-1	-9.13098E0	-9.14207E0	4.14848E-3	9.39608E-2	2.73564E1	-3.26555E1	-3.26225E1	2.68016E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.97963E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16679E-1	-7.98535E-1	-9.13155E0	-9.14183E0	4.00543E-3	9.39846E-2	2.72948E1	-3.26359E1	-3.26535E1	2.67928E1	1.19961E-7	2.51861E-3	2.51861E-3	6.3074E-3	3.00177E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16464E-1	-7.98821E-1	-9.13143E0	-9.1419E0	4.17233E-3	9.39131E-2	2.72346E1	-3.26946E1	-3.25998E1	2.68132E1	1.19978E-7	2.52027E-3	2.52027E-3	6.29624E-3	3.00144E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16441E-1	-7.98965E-1	-9.13126E0	-9.1419E0	3.74317E-3	9.37939E-2	2.7383E1	-3.26574E1	-3.26109E1	2.6793E1	1.19833E-7	2.52499E-3	2.52499E-3	6.32652E-3	3.0047E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16393E-1	-7.98726E-1	-9.13134E0	-9.14171E0	3.91006E-3	9.41038E-2	2.73134E1	-3.26549E1	-3.26301E1	2.68208E1					
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-8.16393E-1	-7.98702E-1	-9.13131E0	-9.14166E0	4.05312E-3	9.4223E-2	2.7255E1	-3.26756E1	-3.26172E1	2.68076E1	1.20004E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0965E0	-8.16393E-1	-7.98678E-1	-9.13153E0	-9.14202E0	4.31538E-3	9.41753E-2	2.74229E1	-3.26615E1	-3.26152E1	2.68202E1	1.20106E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00197E-1
