[Scan]
initial_time=2016-01-28T22:42:34
final_time=2016-01-28T22:42:53
ip_count=19
run=1026
dataset=10
scan=746
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-8.16274E-1
ql1_imon=1.40408E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=2.04722E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=5.58972E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-2.4842E-10
mult1=-9.75944E-9
mult2=-2.72522E-9
rf_tmon=-4.56257E-3
rf_agc=3.31262E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.68093E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65412E0
bslens_imon=2.53415E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19917E1
lens5a_imon=2.01119E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.05309E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53435E1
cs_ef1b_imon=3.18582E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.02402E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04868E1
cs_ea1_imon=1.09121E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38818E0
lens1_imon=2.67114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0381E1
cs_ea2_imon=1.40231E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8418E1
cs_ef1a_imon=3.05307E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.14817E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11094E1
os_restr1_imon=4.30659E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15372E1
os_ea1_imon=2.44847E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63936E1
os_ef1bup_imon=3.08747E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22987E0
cs_ionrep_imon=9.67556E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=1.95732E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.1196E-8
tplens_vset=1.4E-1
tplens_vmon=1.66847E0
tplens_imon=-1.08283E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26207E1
iondef3_imon=1.49821E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26272E1
iondef2_imon=1.59482E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98551E-4
ql6_vset=1.0E-1
ql6_vmon=9.39608E-2
ql6_imon=3.98896E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24369E0
ionrepsh_imon=8.56163E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33742E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.133E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43956E0
os_ea2_imon=-5.15643E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.0081E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71217E1
cs_ef2a_imon=3.20528E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.098E0
os_ef2alow_imon=-2.56068E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87384E-1
os_ef2bup_imon=-5.41386E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10892E1
os_restr2_imon=3.38947E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23015E2
cs_ionfoca_imon=6.31659E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.09981E-5
iondef1_vset=2.763E1
iondef1_vmon=2.75163E1
iondef1_imon=1.07679E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68053E1
iondef4_imon=1.07113E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.88696E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=7.21599E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12377E0
cs_ionaccel_imon=-5.65886E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47407E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56301E1
einzel_imon=8.00061E-6
window_vset=0.0E0
window_vmon=2.5128E-1
window_imon=-1.1532E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.38973E-4
mask2_vset=0.0E0
mask2_vmon=-1.8668E1
mask2_imon=-5.34609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.29629E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.70147E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.17733E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=6.37342E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33157E1
os_fil1_imon=9.42241E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08974E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60554E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31625E1
cs_fil1_imon=6.07108E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.04242E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61277E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06681E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.28884E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.7141E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28154E-1
cs_fil2_imon=-2.35641E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.05137E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21542E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01025E-1
chamber_ion_pmon=1.20062E-7
chamber_cvt_pmon=2.51809E-3
foreline_cvt_pmon=2.51809E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98013E-1
res40_imon=-2.50855E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.16679E-1	-7.98821E-1	-9.13134E0	-9.14171E0	4.31538E-3	9.39131E-2	2.73417E1	-3.26514E1	-3.26349E1	2.68028E1	1.19902E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.98665E-1
2.0E0	2.0E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16464E-1	-7.9875E-1	-9.1315E0	-9.14209E0	4.55379E-3	9.36985E-2	2.72592E1	-3.26817E1	-3.26401E1	2.68124E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9874E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.16751E-1	-7.98655E-1	-9.131E0	-9.14164E0	4.41074E-3	9.39846E-2	2.73749E1	-3.26596E1	-3.26337E1	2.67875E1	1.20017E-7	2.51443E-3	2.51443E-3	6.27461E-3	3.00824E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09711E0	-8.16727E-1	-7.98821E-1	-9.13131E0	-9.14192E0	4.3869E-3	9.39608E-2	2.72389E1	-3.26508E1	-3.26196E1	2.6805E1	1.19967E-7	2.52058E-3	2.52058E-3	6.3074E-3	3.01365E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09711E0	-8.16798E-1	-7.98512E-1	-9.13122E0	-9.14171E0	4.31538E-3	9.39608E-2	2.72597E1	-3.26862E1	-3.26119E1	2.67978E1	1.19937E-7	2.52749E-3	2.52749E-3	6.33592E-3	3.02426E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.16607E-1	-7.98464E-1	-9.1315E0	-9.14171E0	4.52995E-3	9.4223E-2	2.72839E1	-3.26732E1	-3.26042E1	2.68022E1	1.2026E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09665E0	-8.16631E-1	-7.98464E-1	-9.13141E0	-9.14154E0	4.57764E-3	9.38892E-2	2.72769E1	-3.26517E1	-3.25991E1	2.6804E1	1.19809E-7	2.51662E-3	2.51662E-3	6.26916E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0965E0	-8.16607E-1	-7.98774E-1	-9.13146E0	-9.14211E0	4.62532E-3	9.41753E-2	2.72974E1	-3.26644E1	-3.26319E1	2.68117E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.16274E-1	-7.98726E-1	-9.13124E0	-9.14202E0	4.26769E-3	9.37939E-2	2.72877E1	-3.26524E1	-3.2596E1	2.68262E1	1.20055E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16369E-1	-7.98869E-1	-9.13122E0	-9.14192E0	4.52995E-3	9.39608E-2	2.73045E1	-3.26573E1	-3.26428E1	2.6792E1	1.20278E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01085E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16274E-1	-7.98845E-1	-9.13129E0	-9.14164E0	4.52995E-3	9.41277E-2	2.73802E1	-3.26921E1	-3.26368E1	2.67986E1	1.20226E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.16512E-1	-7.98464E-1	-9.13112E0	-9.14168E0	4.33922E-3	9.40323E-2	2.72673E1	-3.26195E1	-3.26614E1	2.68082E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16584E-1	-7.98631E-1	-9.13122E0	-9.14159E0	4.36306E-3	9.40323E-2	2.73161E1	-3.26725E1	-3.26174E1	2.67896E1	1.19851E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16536E-1	-7.98535E-1	-9.13136E0	-9.14211E0	4.41074E-3	9.38892E-2	2.73369E1	-3.26849E1	-3.26044E1	2.68034E1	1.20137E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.0041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.16488E-1	-7.98655E-1	-9.13131E0	-9.14178E0	4.64916E-3	9.39369E-2	2.72833E1	-3.2636E1	-3.26142E1	2.67986E1	1.20226E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16584E-1	-7.98464E-1	-9.13119E0	-9.14149E0	4.22001E-3	9.37939E-2	2.72261E1	-3.2662E1	-3.2629E1	2.68202E1	1.19861E-7	2.52318E-3	2.52318E-3	6.28552E-3	3.00041E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.1687E-1	-7.9844E-1	-9.13119E0	-9.14197E0	4.43459E-3	9.38892E-2	2.73473E1	-3.26505E1	-3.26425E1	2.67986E1	1.19902E-7	2.52707E-3	2.52707E-3	6.32356E-3	2.98156E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16727E-1	-7.9844E-1	-9.13098E0	-9.14185E0	4.12464E-3	9.39608E-2	2.7217E1	-3.2633E1	-3.26399E1	2.68123E1	1.19861E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9952E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09619E0	-8.16464E-1	-7.98607E-1	-9.13136E0	-9.14197E0	4.29153E-3	9.41992E-2	2.74451E1	-3.26987E1	-3.26008E1	2.67932E1	1.1969E-7	2.51077E-3	2.51077E-3	6.32858E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16274E-1	-7.98702E-1	-9.13122E0	-9.1419E0	4.55379E-3	9.39608E-2	2.75163E1	-3.26272E1	-3.26207E1	2.68053E1	1.20062E-7	2.51809E-3	2.51809E-3	6.3074E-3	3.01025E-1
