[Scan]
initial_time=2016-01-28T22:43:27
final_time=2016-01-28T22:43:46
ip_count=19
run=1026
dataset=10
scan=748
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09742E0
qbias_imon=-1.08855E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=1.39158E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=2.01011E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=4.22966E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=-2.26414E-10
mult1=-1.06106E-8
mult2=-2.72914E-9
rf_tmon=-4.84572E-3
rf_agc=3.38164E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=1.71986E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62846E0
bslens_imon=2.61405E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20108E1
lens5a_imon=1.98474E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=3.18885E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02178E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05165E1
cs_ea1_imon=1.08219E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39852E0
lens1_imon=2.7627E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03968E1
cs_ea2_imon=1.40923E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=3.05045E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.14626E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.29238E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15477E1
os_ea1_imon=2.46964E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.09587E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23204E0
cs_ionrep_imon=9.45572E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.93452E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01935E1
cs_anode1_imon=1.96782E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.12691E-8
tplens_vset=1.4E-1
tplens_vmon=1.63848E0
tplens_imon=-2.95348E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26354E1
iondef3_imon=1.50869E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26691E1
iondef2_imon=1.57276E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98388E-4
ql6_vset=1.0E-1
ql6_vmon=9.39608E-2
ql6_imon=3.9656E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28277E0
ionrepsh_imon=8.76554E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33734E1
lens5b_imon=2.18118E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.1474E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46328E0
os_ea2_imon=-5.785E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00506E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06777E0
os_ef2alow_imon=-2.42489E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75199E-1
os_ef2bup_imon=-5.18192E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10997E1
os_restr2_imon=3.3831E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.32866E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.09396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72909E1
iondef1_imon=1.10485E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.92483E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.20818E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-7.92292E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47442E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=2.44973E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.86855E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.79928E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.68083E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.23297E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34945E0
defgridb_imon=6.13222E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33178E1
os_fil1_imon=9.41687E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08651E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60453E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31585E1
cs_fil1_imon=8.00177E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.2992E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61036E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10433E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.65907E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.11336E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32843E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21466E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.64097E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.16178E-1	-7.99108E-1	-9.13138E0	-9.14204E0	4.50611E-3	9.36985E-2	2.73794E1	-3.26638E1	-3.26272E1	2.68204E1	1.19757E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.02133E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.16417E-1	-7.99131E-1	-9.13134E0	-9.14199E0	4.31538E-3	9.39608E-2	2.72138E1	-3.26843E1	-3.26206E1	2.681E1	1.20088E-7	2.51809E-3	2.51809E-3	6.31555E-3	3.00766E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.16274E-1	-7.98655E-1	-9.13146E0	-9.14223E0	4.31538E-3	9.38177E-2	2.73387E1	-3.26536E1	-3.2614E1	2.67872E1					
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-8.16393E-1	-7.98583E-1	-9.13143E0	-9.14226E0	4.17233E-3	9.37462E-2	2.73747E1	-3.26596E1	-3.26384E1	2.67998E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.16369E-1	-7.98821E-1	-9.13177E0	-9.14204E0	4.55379E-3	9.37939E-2	2.72696E1	-3.26591E1	-3.26236E1	2.68076E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-8.16321E-1	-7.98726E-1	-9.13143E0	-9.14199E0	4.43459E-3	9.39369E-2	2.72973E1	-3.265E1	-3.26146E1	2.68184E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16631E-1	-7.98464E-1	-9.13167E0	-9.14183E0	4.33922E-3	9.38654E-2	2.73093E1	-3.26663E1	-3.26284E1	2.68358E1	1.19757E-7	2.51116E-3	2.51116E-3	6.3514E-3	2.98481E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16488E-1	-7.98678E-1	-9.13153E0	-9.14187E0	4.22001E-3	9.42707E-2	2.72673E1	-3.26785E1	-3.26119E1	2.68064E1	1.20122E-7	2.52538E-3	2.52538E-3	6.33486E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.16584E-1	-7.98535E-1	-9.13169E0	-9.14178E0	4.1008E-3	9.41753E-2	2.73039E1	-3.26663E1	-3.26218E1	2.68112E1	1.20055E-7	2.52384E-3	2.52384E-3	6.34518E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16178E-1	-7.98702E-1	-9.13146E0	-9.14168E0	4.24385E-3	9.4223E-2	2.7248E1	-3.26627E1	-3.26062E1	2.67992E1	1.19913E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01871E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09619E0	-8.1656E-1	-7.98535E-1	-9.13153E0	-9.14168E0	4.14848E-3	9.44853E-2	2.73094E1	-3.26352E1	-3.25648E1	2.6786E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.16345E-1	-7.9844E-1	-9.13148E0	-9.14173E0	4.17233E-3	9.39131E-2	2.73015E1	-3.26573E1	-3.26494E1	2.68004E1	1.19713E-7	2.51025E-3	2.51025E-3	6.31299E-3	3.00144E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.1625E-1	-7.98416E-1	-9.13124E0	-9.1418E0	4.36306E-3	9.42469E-2	2.73381E1	-3.26801E1	-3.26362E1	2.67956E1	1.20069E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.16107E-1	-7.98798E-1	-9.13117E0	-9.14183E0	3.95775E-3	9.38654E-2	2.73514E1	-3.26512E1	-3.26026E1	2.68136E1	1.19861E-7	2.52647E-3	2.52647E-3	6.35692E-3	3.01085E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16345E-1	-7.98583E-1	-9.13143E0	-9.14159E0	4.45843E-3	9.40323E-2	2.72473E1	-3.26632E1	-3.26195E1	2.67962E1	1.20017E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00563E-1
1.9E1	2.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.16369E-1	-7.98416E-1	-9.13153E0	-9.14168E0	3.98159E-3	9.38177E-2	2.74184E1	-3.26626E1	-3.26284E1	2.68059E1	1.19646E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99686E-1
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.16464E-1	-7.98488E-1	-9.13157E0	-9.14202E0	4.17233E-3	9.38416E-2	2.72897E1	-3.26607E1	-3.26579E1	2.6814E1	1.20106E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.9892E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09627E0	-8.16321E-1	-7.98702E-1	-9.13148E0	-9.14192E0	4.29153E-3	9.36747E-2	2.72048E1	-3.26608E1	-3.26077E1	2.67937E1	1.1974E-7	2.51814E-3	2.51814E-3	6.30212E-3	2.98342E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.16369E-1	-7.98678E-1	-9.13138E0	-9.14171E0	4.29153E-3	9.40561E-2	2.73514E1	-3.26957E1	-3.2596E1	2.67974E1	1.19891E-7	2.52871E-3	2.52871E-3	6.32858E-3	2.99343E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09742E0	-8.16393E-1	-7.98607E-1	-9.13134E0	-9.14178E0	4.60148E-3	9.39608E-2	2.72909E1	-3.26691E1	-3.26354E1	2.68136E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00041E-1
