[Scan]
initial_time=2016-01-28T22:43:53
final_time=2016-01-28T22:44:13
ip_count=19
run=1026
dataset=10
scan=749
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08866E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.39404E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=2.03302E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=4.54211E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-2.25556E-10
mult1=-9.43752E-9
mult2=-2.78009E-9
rf_tmon=-5.08894E-3
rf_agc=3.25068E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.86238E-3
ql5_imon=1.70448E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61567E0
bslens_imon=2.7901E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19905E1
lens5a_imon=1.99172E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12439E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=3.17659E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.0229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.047E1
cs_ea1_imon=1.07787E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40981E0
lens1_imon=2.8622E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03955E1
cs_ea2_imon=1.40628E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=3.04433E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.14576E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11165E1
os_restr1_imon=4.31004E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=2.46577E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.09514E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27373E0
cs_ionrep_imon=9.38356E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=1.95989E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.12649E-8
tplens_vset=1.4E-1
tplens_vmon=1.64324E0
tplens_imon=-1.37123E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2623E1
iondef3_imon=1.51695E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26485E1
iondef2_imon=1.58112E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=3.98593E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=8.73827E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33568E1
lens5b_imon=2.17341E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74435E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46179E0
os_ea2_imon=-6.99496E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00479E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10141E0
os_ef2alow_imon=-2.40327E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.37157E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.31298E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.10513E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72826E1
iondef1_imon=1.08796E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68183E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.91617E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=7.1979E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15056E0
cs_ionaccel_imon=-7.85084E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=2.31158E-1
window_imon=-9.54471E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.3938E-4
mask2_vset=0.0E0
mask2_vmon=-1.86837E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.61353E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.58972E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=6.89614E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51284E0
defgridb_imon=6.00211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33167E1
os_fil1_imon=9.42252E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07828E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60557E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31537E1
cs_fil1_imon=7.49121E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.71966E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60884E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01522E-2
os_fil2_imon=-2.30557E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.22341E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.59164E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.20346E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55668E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2146E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34982E-3
inlet_lpb_pmon=3.006E-1
chamber_ion_pmon=1.19891E-7
chamber_cvt_pmon=2.52659E-3
foreline_cvt_pmon=2.52659E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.46988E-1
res40_imon=-2.34921E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16345E-1	-7.98345E-1	-9.13148E0	-9.14171E0	4.31538E-3	9.39131E-2	2.72196E1	-3.26638E1	-3.26124E1	2.68298E1	1.20069E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.97704E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.1656E-1	-7.98202E-1	-9.13141E0	-9.14156E0	4.50611E-3	9.38177E-2	2.7411E1	-3.26554E1	-3.26101E1	2.67583E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9841E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16298E-1	-7.98488E-1	-9.13129E0	-9.1419E0	4.33922E-3	9.40323E-2	2.7148E1	-3.26493E1	-3.26363E1	2.68043E1	1.20457E-7	2.51248E-3	2.51248E-3	6.26844E-3	2.99348E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.16464E-1	-7.98488E-1	-9.13177E0	-9.14164E0	4.36306E-3	9.41038E-2	2.7206E1	-3.26597E1	-3.26609E1	2.67901E1	1.19634E-7	2.51265E-3	2.51265E-3	6.3074E-3	3.01237E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.16679E-1	-7.98345E-1	-9.13131E0	-9.14195E0	4.43459E-3	9.41753E-2	2.7376E1	-3.26909E1	-3.26434E1	2.6783E1	1.19757E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.16393E-1	-7.98893E-1	-9.13138E0	-9.14171E0	4.33922E-3	9.40323E-2	2.72402E1	-3.26422E1	-3.26272E1	2.67878E1	1.20435E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.01609E-1
7.0E0	2.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16321E-1	-7.98845E-1	-9.13143E0	-9.14173E0	4.60148E-3	9.39846E-2	2.72877E1	-3.26693E1	-3.2593E1	2.68088E1	1.19757E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16393E-1	-7.98559E-1	-9.13148E0	-9.14183E0	4.3869E-3	9.41038E-2	2.72678E1	-3.26669E1	-3.26206E1	2.6825E1	1.19497E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16464E-1	-7.98535E-1	-9.13136E0	-9.14187E0	4.1008E-3	9.41515E-2	2.73904E1	-3.26302E1	-3.26272E1	2.68065E1	1.20017E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9874E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16321E-1	-7.98607E-1	-9.1315E0	-9.14168E0	4.3869E-3	9.37462E-2	2.72895E1	-3.26326E1	-3.26296E1	2.68124E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.98222E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16512E-1	-7.98726E-1	-9.1316E0	-9.14173E0	4.17233E-3	9.37223E-2	2.72312E1	-3.26296E1	-3.26813E1	2.67986E1	1.19601E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.97963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.16274E-1	-7.98917E-1	-9.13141E0	-9.1419E0	4.22001E-3	9.40561E-2	2.72632E1	-3.26644E1	-3.26207E1	2.67962E1	1.19913E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.16679E-1	-7.98821E-1	-9.1316E0	-9.14185E0	4.1008E-3	9.36985E-2	2.7355E1	-3.26717E1	-3.26524E1	2.6777E1	1.19646E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.01223E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.16679E-1	-7.9875E-1	-9.13157E0	-9.14147E0	4.43459E-3	9.39846E-2	2.72504E1	-3.26524E1	-3.26296E1	2.68148E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.03449E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.16298E-1	-7.98583E-1	-9.13146E0	-9.1414E0	4.33922E-3	9.39131E-2	2.737E1	-3.26744E1	-3.26266E1	2.6818E1	1.19713E-7	2.51915E-3	2.51915E-3	6.34099E-3	3.00942E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0965E0	-8.16441E-1	-7.98726E-1	-9.13162E0	-9.14173E0	4.45843E-3	9.38892E-2	2.73051E1	-3.26597E1	-3.26218E1	2.68022E1	1.20495E-7	2.52025E-3	2.52025E-3	6.29157E-3	3.01104E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.16393E-1	-7.98392E-1	-9.13141E0	-9.14154E0	4.33922E-3	9.40323E-2	2.72308E1	-3.26549E1	-3.26178E1	2.68244E1	1.19653E-7	2.51443E-3	2.51443E-3	6.36244E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16441E-1	-7.9844E-1	-9.13126E0	-9.14178E0	4.48227E-3	9.39131E-2	2.73063E1	-3.26434E1	-3.26104E1	2.6831E1	1.19902E-7	2.52384E-3	2.52384E-3	6.28592E-3	3.0071E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.16607E-1	-7.98655E-1	-9.13138E0	-9.14185E0	4.22001E-3	9.41038E-2	2.72645E1	-3.26747E1	-3.26237E1	2.68192E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.16464E-1	-7.98559E-1	-9.1315E0	-9.14195E0	3.86238E-3	9.40084E-2	2.72826E1	-3.26485E1	-3.2623E1	2.68183E1	1.19891E-7	2.52659E-3	2.52659E-3	6.34982E-3	3.006E-1
