[Scan]
initial_time=2016-01-28T22:45:13
final_time=2016-01-28T22:45:33
ip_count=19
run=1026
dataset=10
scan=752
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08838E-4
ql1_vset=
ql1_vmon=-8.1625E-1
ql1_imon=1.39296E-8
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=2.01695E-9
ql3_vset=
ql3_vmon=-9.131E0
ql3_imon=3.89051E-10
ql4_vset=
ql4_vmon=-9.14171E0
ql4_imon=-2.29204E-10
mult1=-9.68019E-9
mult2=-2.77251E-9
rf_tmon=-3.99571E-3
rf_agc=3.34778E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.71502E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66614E0
bslens_imon=2.37553E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19646E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.0537E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53795E1
cs_ef1b_imon=3.20181E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=1.08868E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41402E0
lens1_imon=2.68195E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64597E1
os_ef1alow_imon=2.98043E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03528E1
cs_ea2_imon=1.40808E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84249E1
cs_ef1a_imon=3.0343E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.15351E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11257E1
os_restr1_imon=4.31285E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15318E1
os_ea1_imon=2.43657E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6378E1
os_ef1bup_imon=3.08991E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20884E0
cs_ionrep_imon=9.51694E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01861E1
cs_anode1_imon=1.95141E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.13148E-8
tplens_vset=1.4E-1
tplens_vmon=1.63603E0
tplens_imon=-3.78655E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26573E1
iondef3_imon=1.51659E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2638E1
iondef2_imon=1.57319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98526E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=4.03378E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24729E0
ionrepsh_imon=8.48593E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33441E1
lens5b_imon=2.19793E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74466E1
cs_ef2b_imon=3.14169E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50324E0
os_ea2_imon=-6.27397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00796E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71275E1
cs_ef2a_imon=3.2025E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09626E0
os_ef2alow_imon=-2.4599E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92597E-1
os_ef2bup_imon=-5.27138E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10701E1
os_restr2_imon=3.36758E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23126E2
cs_ionfoca_imon=6.31262E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0174E1
cs_anode2_imon=2.09703E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71501E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.10519E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.93414E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=7.20916E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12725E0
cs_ionaccel_imon=-1.01419E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47355E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56162E1
einzel_imon=7.85118E-6
window_vset=0.0E0
window_vmon=2.15369E-1
window_imon=-8.1958E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39157E-4
mask2_vset=0.0E0
mask2_vmon=-1.86894E1
mask2_imon=-2.67014E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.40444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.61135E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.49817E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4557E0
defgridb_imon=6.24725E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33201E1
os_fil1_imon=9.41864E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08331E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60521E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31652E1
cs_fil1_imon=8.01143E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.50578E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61348E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1184E-2
os_fil2_imon=-2.52438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12666E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.48724E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28154E-1
cs_fil2_imon=-2.24057E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15359E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21693E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.54573E-1
res40_imon=-2.61629E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16321E-1	-7.98464E-1	-9.13169E0	-9.14207E0	4.17233E-3	9.41753E-2	2.72703E1	-3.2652E1	-3.26201E1	2.6813E1	1.20278E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16536E-1	-7.98535E-1	-9.13141E0	-9.14183E0	4.12464E-3	9.41992E-2	2.73706E1	-3.26853E1	-3.25886E1	2.68076E1	1.20042E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16154E-1	-7.98368E-1	-9.13157E0	-9.14176E0	4.22001E-3	9.41992E-2	2.72414E1	-3.26538E1	-3.26544E1	2.68157E1	1.20154E-7	2.51838E-3	2.51838E-3	6.33021E-3	3.02699E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.16274E-1	-7.98631E-1	-9.13155E0	-9.1419E0	4.14848E-3	9.377E-2	2.74001E1	-3.26602E1	-3.26443E1	2.68238E1	1.198E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.16369E-1	-7.98512E-1	-9.13148E0	-9.14199E0	4.22001E-3	9.39608E-2	2.71621E1	-3.2632E1	-3.26452E1	2.68082E1	1.2026E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16441E-1	-7.98702E-1	-9.13157E0	-9.14211E0	4.05312E-3	9.38654E-2	2.72306E1	-3.2644E1	-3.26464E1	2.68154E1	1.20435E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16441E-1	-7.98535E-1	-9.13148E0	-9.14202E0	4.24385E-3	9.41753E-2	2.74361E1	-3.26437E1	-3.26136E1	2.68001E1	1.20114E-7	2.51593E-3	2.51593E-3	6.31827E-3	3.00378E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16536E-1	-7.98821E-1	-9.13134E0	-9.14202E0	4.36306E-3	9.408E-2	2.72048E1	-3.26825E1	-3.26212E1	2.6777E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16202E-1	-7.98607E-1	-9.13169E0	-9.14199E0	4.41074E-3	9.40084E-2	2.73045E1	-3.26579E1	-3.26092E1	2.68322E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16417E-1	-7.98607E-1	-9.13134E0	-9.14214E0	4.52995E-3	9.37939E-2	2.73243E1	-3.26482E1	-3.26362E1	2.67968E1	1.20122E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.98222E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.1625E-1	-7.98488E-1	-9.13107E0	-9.1419E0	4.41074E-3	9.377E-2	2.73934E1	-3.26981E1	-3.25852E1	2.6807E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.97647E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.16321E-1	-7.98512E-1	-9.13115E0	-9.14214E0	4.19617E-3	9.377E-2	2.71789E1	-3.2682E1	-3.26455E1	2.6798E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-8.16536E-1	-7.98726E-1	-9.13146E0	-9.14168E0	4.31538E-3	9.41992E-2	2.71891E1	-3.26603E1	-3.26122E1	2.68233E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.16154E-1	-7.98464E-1	-9.13165E0	-9.1419E0	4.17233E-3	9.408E-2	2.73437E1	-3.26756E1	-3.25825E1	2.68069E1	1.20017E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.01347E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.16178E-1	-7.98273E-1	-9.131E0	-9.14199E0	4.41074E-3	9.41038E-2	2.72154E1	-3.26408E1	-3.26331E1	2.68094E1	1.20096E-7	2.51116E-3	2.51116E-3	6.30192E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09665E0	-8.16298E-1	-7.98559E-1	-9.13138E0	-9.14204E0	4.43459E-3	9.41277E-2	2.73818E1	-3.26697E1	-3.26101E1	2.67943E1					
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09719E0	-8.16178E-1	-7.98392E-1	-9.13148E0	-9.14207E0	4.48227E-3	9.377E-2	2.71931E1	-3.26523E1	-3.26413E1	2.68454E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.1594E-1	-7.98392E-1	-9.13134E0	-9.14204E0	4.36306E-3	9.38177E-2	2.7413E1	-3.26231E1	-3.26254E1	2.6804E1	1.19705E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16321E-1	-7.98464E-1	-9.13122E0	-9.1418E0	4.43459E-3	9.39608E-2	2.72196E1	-3.26791E1	-3.26467E1	2.68186E1	1.20122E-7	2.52647E-3	2.52647E-3	6.29645E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.1625E-1	-7.98631E-1	-9.131E0	-9.14171E0	4.41074E-3	9.38177E-2	2.71501E1	-3.2638E1	-3.26573E1	2.6819E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0148E-1
