[Scan]
initial_time=2016-01-28T22:45:40
final_time=2016-01-28T22:46:00
ip_count=19
run=1026
dataset=10
scan=753
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.0887E-4
ql1_vset=
ql1_vmon=-8.16131E-1
ql1_imon=1.39156E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=2.00036E-9
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=4.50099E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-2.42043E-10
mult1=-1.03151E-8
mult2=-2.6919E-9
rf_tmon=-4.41509E-3
rf_agc=3.361E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.71201E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67152E0
bslens_imon=2.57511E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19677E1
lens5a_imon=1.97979E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=3.1784E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02163E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05442E1
cs_ea1_imon=1.10272E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3643E0
lens1_imon=2.69191E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64476E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03466E1
cs_ea2_imon=1.40357E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.04757E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.15242E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11009E1
os_restr1_imon=4.3122E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.46964E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2285E0
cs_ionrep_imon=9.60084E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93317E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=1.95413E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.13319E-8
tplens_vset=1.4E-1
tplens_vmon=1.65028E0
tplens_imon=-2.13941E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26472E1
iondef3_imon=1.49984E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26667E1
iondef2_imon=1.59116E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98427E-4
ql6_vset=1.0E-1
ql6_vmon=9.40323E-2
ql6_imon=3.97942E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27038E0
ionrepsh_imon=8.63458E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33351E1
lens5b_imon=2.18578E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74922E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48983E0
os_ea2_imon=-6.56367E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06053E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.20218E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06777E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82407E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10685E1
os_restr2_imon=3.36328E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.3191E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.10009E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73688E1
iondef1_imon=1.07759E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6803E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.86773E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.25264E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-9.14827E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.82479E-6
window_vset=0.0E0
window_vmon=2.34762E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.86728E1
mask2_imon=-4.57124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=7.79574E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.85072E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.34978E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43213E0
defgridb_imon=5.87738E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33162E1
os_fil1_imon=9.41465E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06578E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60583E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31621E1
cs_fil1_imon=7.62335E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.43735E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61383E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93972E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.5515E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.10735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55668E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2159E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94731E-1
res40_imon=-2.39245E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16393E-1	-7.98392E-1	-9.13131E0	-9.14147E0	3.98159E-3	9.38177E-2	2.7361E1	-3.26657E1	-3.26332E1	2.67902E1	1.19991E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.01862E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16202E-1	-7.98583E-1	-9.13119E0	-9.14183E0	3.95775E-3	9.38654E-2	2.72582E1	-3.26524E1	-3.26609E1	2.67962E1	1.20487E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16369E-1	-7.98392E-1	-9.13153E0	-9.14166E0	4.22001E-3	9.37939E-2	2.72131E1	-3.26738E1	-3.2662E1	2.683E1	1.19872E-7	2.5225E-3	2.5225E-3	6.3074E-3	3.01742E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16226E-1	-7.98345E-1	-9.13138E0	-9.14207E0	4.36306E-3	9.35078E-2	2.72955E1	-3.26843E1	-3.26488E1	2.67716E1	1.19902E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16178E-1	-7.98392E-1	-9.13143E0	-9.14178E0	4.05312E-3	9.37223E-2	2.73173E1	-3.26214E1	-3.26347E1	2.67848E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16202E-1	-7.98297E-1	-9.13115E0	-9.14171E0	4.24385E-3	9.3627E-2	2.72769E1	-3.26383E1	-3.26278E1	2.6804E1	1.19809E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16298E-1	-7.98464E-1	-9.13129E0	-9.14183E0	3.91006E-3	9.38654E-2	2.73159E1	-3.26585E1	-3.26002E1	2.6837E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16607E-1	-7.98345E-1	-9.13129E0	-9.14192E0	4.02927E-3	9.36985E-2	2.72426E1	-3.26567E1	-3.26056E1	2.67854E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02396E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16703E-1	-7.98845E-1	-9.13146E0	-9.14173E0	4.24385E-3	9.3627E-2	2.73308E1	-3.26674E1	-3.26131E1	2.67942E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.03185E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16441E-1	-7.98535E-1	-9.13146E0	-9.1418E0	4.17233E-3	9.37462E-2	2.73375E1	-3.26603E1	-3.26438E1	2.68022E1	1.20113E-7	2.52568E-3	2.52568E-3	6.29211E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09619E0	-8.16536E-1	-7.98678E-1	-9.13129E0	-9.14171E0	4.19617E-3	9.38654E-2	2.72838E1	-3.26645E1	-3.26604E1	2.67865E1	1.19872E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.03887E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0965E0	-8.16607E-1	-7.98607E-1	-9.13141E0	-9.14185E0	3.88622E-3	9.41515E-2	2.73273E1	-3.2653E1	-3.26206E1	2.68142E1	1.20143E-7	2.52164E-3	2.52164E-3	6.31611E-3	3.0147E-1
1.6E1	0.0E0	1.0E0	6.47E2	4.41E2	-2.09673E0	-8.16631E-1	-7.98798E-1	-9.13174E0	-9.14173E0	4.24385E-3	9.40084E-2	2.72702E1	-3.26855E1	-3.26518E1	2.68232E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.16488E-1	-7.98583E-1	-9.1316E0	-9.14164E0	4.29153E-3	9.408E-2	2.72427E1	-3.26278E1	-3.26627E1	2.68046E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.1625E-1	-7.98464E-1	-9.13136E0	-9.14173E0	4.50611E-3	9.39131E-2	2.73868E1	-3.26729E1	-3.26086E1	2.68034E1	1.20017E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16584E-1	-7.98774E-1	-9.13157E0	-9.14183E0	4.48227E-3	9.41515E-2	2.72877E1	-3.26819E1	-3.26506E1	2.68124E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9978E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.16464E-1	-7.98583E-1	-9.13172E0	-9.1419E0	4.52995E-3	9.41753E-2	2.73904E1	-3.26741E1	-3.26314E1	2.68076E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.1594E-1	-7.98655E-1	-9.13134E0	-9.14202E0	4.17233E-3	9.39846E-2	2.7216E1	-3.26478E1	-3.26178E1	2.6814E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.98481E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.15916E-1	-7.98678E-1	-9.13155E0	-9.14218E0	4.17233E-3	9.39846E-2	2.74679E1	-3.26691E1	-3.26484E1	2.67884E1	1.19851E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.16131E-1	-7.98559E-1	-9.13165E0	-9.1419E0	4.57764E-3	9.40323E-2	2.73688E1	-3.26667E1	-3.26472E1	2.6803E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01609E-1
