[Scan]
initial_time=2016-01-28T22:46:33
final_time=2016-01-28T22:46:53
ip_count=19
run=1026
dataset=10
scan=755
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08743E-4
ql1_vset=
ql1_vmon=-8.15916E-1
ql1_imon=1.38466E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=1.96196E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=3.94058E-10
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=-1.69992E-10
mult1=-9.95371E-9
mult2=-2.80124E-9
rf_tmon=-5.77042E-3
rf_agc=3.18041E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.74236E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60191E0
bslens_imon=2.61051E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2019E1
lens5a_imon=1.98156E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53308E1
cs_ef1b_imon=3.16323E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02344E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.049E1
cs_ea1_imon=1.09423E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40618E0
lens1_imon=2.71315E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64574E1
os_ef1alow_imon=3.00302E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03749E1
cs_ea2_imon=1.40534E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84904E1
cs_ef1a_imon=3.05133E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.20239E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11025E1
os_restr1_imon=4.27809E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.44522E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63601E1
os_ef1bup_imon=3.11041E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24974E0
cs_ionrep_imon=9.42387E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93466E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02093E1
cs_anode1_imon=1.9747E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20463E0
olens4_imon=3.19469E-8
tplens_vset=1.4E-1
tplens_vmon=1.66326E0
tplens_imon=-3.76754E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26297E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.58621E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98445E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=3.95226E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27097E0
ionrepsh_imon=8.47177E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33734E1
lens5b_imon=2.19109E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12987E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50988E0
os_ea2_imon=-4.15688E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00187E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70817E1
cs_ef2a_imon=3.18965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08294E0
os_ef2alow_imon=-2.27224E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79855E-1
os_ef2bup_imon=-5.13237E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10944E1
os_restr2_imon=3.40094E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23119E2
cs_ionfoca_imon=6.33043E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01902E1
cs_anode2_imon=2.11683E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7411E1
iondef1_imon=1.07618E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68119E1
iondef4_imon=1.08955E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.01413E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.44335E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13999E0
cs_ionaccel_imon=-5.03332E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47376E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55942E1
einzel_imon=7.58706E-6
window_vset=0.0E0
window_vmon=2.64023E-1
window_imon=-7.74401E-7
mask1_vset=-4.8E2
mask1_vmon=-4.827E2
mask1_imon=2.39407E-4
mask2_vset=0.0E0
mask2_vmon=-1.86634E1
mask2_imon=-8.75184E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.50197E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.56403E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.19404E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61816E0
defgridb_imon=6.12868E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33215E1
os_fil1_imon=9.40121E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07549E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61873E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31553E1
cs_fil1_imon=7.94771E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.60425E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64561E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.85107E-2
os_fil2_imon=-2.0726E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.25988E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.75421E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31525E-1
cs_fil2_imon=-2.2927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.61117E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21774E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30221E-3
inlet_lpb_pmon=3.00494E-1
chamber_ion_pmon=1.1993E-7
chamber_cvt_pmon=2.51369E-3
foreline_cvt_pmon=2.51369E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.72528E-1
res40_imon=-2.22358E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16154E-1	-7.98655E-1	-9.13129E0	-9.14197E0	4.62532E-3	9.40084E-2	2.72727E1	-3.26416E1	-3.26615E1	2.68575E1	1.20004E-7	2.51203E-3	2.51203E-3	6.36144E-3	3.01223E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16178E-1	-7.98297E-1	-9.13174E0	-9.14195E0	4.48227E-3	9.39369E-2	2.7379E1	-3.26663E1	-3.26561E1	2.67806E1	1.19697E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.02769E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.15868E-1	-7.98512E-1	-9.13174E0	-9.14183E0	4.26769E-3	9.41038E-2	2.72473E1	-3.26608E1	-3.26213E1	2.68163E1	1.19978E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.00942E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.15868E-1	-7.98297E-1	-9.13162E0	-9.14199E0	4.36306E-3	9.377E-2	2.74461E1	-3.26508E1	-3.26307E1	2.6807E1	1.20311E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16059E-1	-7.98392E-1	-9.13165E0	-9.1419E0	4.79221E-3	9.38654E-2	2.73155E1	-3.26529E1	-3.26015E1	2.67932E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.02769E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16202E-1	-7.98416E-1	-9.13126E0	-9.14159E0	4.95911E-3	9.377E-2	2.73252E1	-3.26567E1	-3.26567E1	2.68184E1	1.19809E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16226E-1	-7.98774E-1	-9.13107E0	-9.14176E0	4.69685E-3	9.408E-2	2.7218E1	-3.26458E1	-3.2641E1	2.6816E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16226E-1	-7.98512E-1	-9.13153E0	-9.14178E0	4.74453E-3	9.38416E-2	2.73261E1	-3.26669E1	-3.26122E1	2.68166E1	1.19965E-7	2.51771E-3	2.51771E-3	6.28006E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.15916E-1	-7.98678E-1	-9.13153E0	-9.14185E0	4.79221E-3	9.41038E-2	2.72763E1	-3.26861E1	-3.26128E1	2.681E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.15892E-1	-7.98631E-1	-9.13148E0	-9.14185E0	4.81606E-3	9.39608E-2	2.72739E1	-3.26777E1	-3.26464E1	2.68082E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99686E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16417E-1	-7.98368E-1	-9.13167E0	-9.14187E0	4.79221E-3	9.39131E-2	2.74089E1	-3.26962E1	-3.26537E1	2.67914E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.16417E-1	-7.98655E-1	-9.13153E0	-9.14202E0	4.57764E-3	9.39131E-2	2.72492E1	-3.26356E1	-3.26032E1	2.68118E1	1.19965E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.16369E-1	-7.98988E-1	-9.13157E0	-9.14166E0	4.33922E-3	9.41038E-2	2.72877E1	-3.26705E1	-3.26164E1	2.6792E1	1.19965E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.02659E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.16298E-1	-7.98678E-1	-9.13146E0	-9.14166E0	4.22001E-3	9.39131E-2	2.70792E1	-3.2647E1	-3.26218E1	2.68058E1	1.19953E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.02769E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.15988E-1	-7.9875E-1	-9.13143E0	-9.14183E0	4.3869E-3	9.40323E-2	2.73234E1	-3.26431E1	-3.2603E1	2.68016E1	1.1983E-7	2.51809E-3	2.51809E-3	6.31555E-3	3.02064E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.16298E-1	-7.98297E-1	-9.1316E0	-9.14187E0	4.52995E-3	9.39131E-2	2.73983E1	-3.26567E1	-3.26567E1	2.67845E1					
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.16226E-1	-7.98702E-1	-9.13148E0	-9.14183E0	4.76837E-3	9.41277E-2	2.72714E1	-3.26432E1	-3.26285E1	2.6792E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.16202E-1	-7.98655E-1	-9.1316E0	-9.14197E0	4.45843E-3	9.36985E-2	2.72698E1	-3.2681E1	-3.26092E1	2.67868E1	1.19913E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.03712E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.16107E-1	-7.98535E-1	-9.13167E0	-9.14156E0	4.36306E-3	9.3627E-2	2.7296E1	-3.26437E1	-3.26232E1	2.68139E1	1.198E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.15916E-1	-7.98464E-1	-9.13131E0	-9.14166E0	4.31538E-3	9.38177E-2	2.7411E1	-3.26597E1	-3.26297E1	2.68119E1	1.1993E-7	2.51369E-3	2.51369E-3	6.30221E-3	3.00494E-1
