[Scan]
initial_time=2016-01-28T22:47:27
final_time=2016-01-28T22:47:46
ip_count=19
run=1026
dataset=10
scan=757
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08839E-4
ql1_vset=
ql1_vmon=-8.15964E-1
ql1_imon=1.39105E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=1.95334E-9
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=3.73769E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-1.98483E-10
mult1=-1.01623E-8
mult2=-2.8948E-9
rf_tmon=-4.03188E-3
rf_agc=3.34141E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=1.67984E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62846E0
bslens_imon=2.82641E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19529E1
lens5a_imon=1.97943E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05097E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53505E1
cs_ef1b_imon=3.16428E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02192E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04487E1
cs_ea1_imon=1.09104E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37079E0
lens1_imon=2.65652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64243E1
os_ef1alow_imon=2.97418E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03466E1
cs_ea2_imon=1.39862E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84718E1
cs_ef1a_imon=3.06871E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.19677E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11239E1
os_restr1_imon=4.284E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15553E1
os_ea1_imon=2.45867E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.09025E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24266E0
cs_ionrep_imon=9.45926E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93494E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01734E1
cs_anode1_imon=1.98478E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.17906E-8
tplens_vset=1.4E-1
tplens_vmon=1.6727E0
tplens_imon=-1.78547E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26493E1
iondef3_imon=1.50975E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26811E1
iondef2_imon=1.57842E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98456E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=3.99448E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25977E0
ionrepsh_imon=8.48946E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33699E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75034E1
cs_ef2b_imon=3.14586E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49573E0
os_ea2_imon=-5.07712E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00708E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70667E1
cs_ef2a_imon=3.18408E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09279E0
os_ef2alow_imon=-2.41125E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.47622E-1
os_ef2bup_imon=-5.12889E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10903E1
os_restr2_imon=3.40337E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.30459E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01896E1
cs_anode2_imon=2.09842E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74306E1
iondef1_imon=1.08078E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.07217E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.04204E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.45875E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.05948E0
cs_ionaccel_imon=-6.45817E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02153E2
cs_ionfocb_imon=1.4749E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5615E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.59968E-1
window_imon=-1.09412E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39724E-4
mask2_vset=0.0E0
mask2_vmon=-1.87392E1
mask2_imon=-8.16104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.39225E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.3906E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.34978E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43804E0
defgridb_imon=6.3552E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33162E1
os_fil1_imon=9.4187E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07138E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61784E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31538E1
cs_fil1_imon=6.84142E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.53474E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63994E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74977E-2
os_fil2_imon=-2.35641E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19038E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.81875E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28653E-1
cs_fil2_imon=-1.91042E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.91236E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21769E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.3931E-1
res40_imon=-2.11237E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09673E0	-8.1625E-1	-7.9906E-1	-9.1316E0	-9.14192E0	4.673E-3	9.39846E-2	2.71725E1	-3.26738E1	-3.26294E1	2.68615E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01995E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.16178E-1	-7.98893E-1	-9.13155E0	-9.14171E0	4.8399E-3	9.38177E-2	2.73644E1	-3.26472E1	-3.26316E1	2.67758E1	1.20192E-7	2.52342E-3	2.52342E-3	6.31269E-3	3.03383E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16488E-1	-7.98655E-1	-9.13138E0	-9.14195E0	4.64916E-3	9.37462E-2	2.73694E1	-3.26532E1	-3.26347E1	2.67833E1	1.19925E-7	2.51915E-3	2.51915E-3	6.32418E-3	2.99879E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.1656E-1	-7.98559E-1	-9.13157E0	-9.1419E0	5.03063E-3	9.408E-2	2.72516E1	-3.265E1	-3.26152E1	2.67998E1	1.19902E-7	2.51471E-3	2.51471E-3	6.30471E-3	3.00069E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.0965E0	-8.16441E-1	-7.98321E-1	-9.13126E0	-9.14183E0	4.98295E-3	9.39846E-2	2.72156E1	-3.26518E1	-3.26188E1	2.67974E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09665E0	-8.16321E-1	-7.98464E-1	-9.13117E0	-9.14197E0	4.95911E-3	9.38654E-2	2.72874E1	-3.26714E1	-3.26248E1	2.67937E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.16059E-1	-7.98392E-1	-9.13126E0	-9.14176E0	4.91142E-3	9.3627E-2	2.74232E1	-3.26836E1	-3.26297E1	2.68144E1	1.19749E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00453E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.1625E-1	-7.98368E-1	-9.13124E0	-9.1414E0	4.86374E-3	9.38654E-2	2.73435E1	-3.26452E1	-3.26236E1	2.68406E1	1.20084E-7	2.52362E-3	2.52362E-3	6.32978E-3	2.99613E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09719E0	-8.16202E-1	-7.9844E-1	-9.13136E0	-9.14168E0	4.91142E-3	9.37939E-2	2.72186E1	-3.26536E1	-3.25984E1	2.67806E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.15773E-1	-7.98464E-1	-9.1315E0	-9.14161E0	4.72069E-3	9.38177E-2	2.74181E1	-3.26729E1	-3.26446E1	2.68016E1	1.19705E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.16131E-1	-7.98774E-1	-9.13131E0	-9.14154E0	4.64916E-3	9.39846E-2	2.72462E1	-3.26002E1	-3.25972E1	2.68238E1	1.19766E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.00144E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.15964E-1	-7.98368E-1	-9.13129E0	-9.14149E0	4.43459E-3	9.408E-2	2.71657E1	-3.26681E1	-3.2617E1	2.68028E1	1.20363E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.00453E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.15797E-1	-7.98321E-1	-9.13138E0	-9.14168E0	4.50611E-3	9.39608E-2	2.73075E1	-3.26573E1	-3.2626E1	2.68106E1	1.19819E-7	2.52027E-3	2.52027E-3	6.35223E-3	3.00942E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16011E-1	-7.98321E-1	-9.13172E0	-9.14176E0	4.69685E-3	9.36985E-2	2.7269E1	-3.26561E1	-3.26356E1	2.67914E1	1.19749E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00197E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16083E-1	-7.98225E-1	-9.13179E0	-9.14168E0	4.62532E-3	9.36985E-2	2.71218E1	-3.2632E1	-3.26134E1	2.68178E1	1.19819E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.97762E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.16107E-1	-7.98655E-1	-9.13143E0	-9.14152E0	4.76837E-3	9.39608E-2	2.70948E1	-3.26687E1	-3.26368E1	2.68046E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.16107E-1	-7.98917E-1	-9.13191E0	-9.14183E0	4.81606E-3	9.37223E-2	2.71555E1	-3.26783E1	-3.26224E1	2.67968E1	1.19953E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.15606E-1	-7.98655E-1	-9.13129E0	-9.14214E0	4.79221E-3	9.37939E-2	2.71789E1	-3.26518E1	-3.26615E1	2.6792E1	1.20031E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.02545E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16035E-1	-7.98607E-1	-9.13153E0	-9.1418E0	4.64916E-3	9.37939E-2	2.74192E1	-3.26121E1	-3.26446E1	2.68007E1	1.20106E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.15964E-1	-7.9875E-1	-9.13157E0	-9.14202E0	4.91142E-3	9.38892E-2	2.74306E1	-3.26811E1	-3.26493E1	2.68136E1	1.19953E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00197E-1
