[Scan]
initial_time=2016-01-28T22:48:47
final_time=2016-01-28T22:49:06
ip_count=19
run=1026
dataset=10
scan=760
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08763E-4
ql1_vset=
ql1_vmon=-8.16369E-1
ql1_imon=1.38772E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.96742E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=3.45874E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=-1.93739E-10
mult1=-9.6294E-9
mult2=-2.67034E-9
rf_tmon=-4.17323E-3
rf_agc=3.32383E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.67654E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67575E0
bslens_imon=2.718E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19652E1
lens5a_imon=1.98668E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05201E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=3.15677E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02348E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0527E1
cs_ea1_imon=1.08868E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39779E0
lens1_imon=2.59904E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64476E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03822E1
cs_ea2_imon=1.407E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=3.06415E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.1999E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11592E1
os_restr1_imon=4.3068E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15089E1
os_ea1_imon=2.43694E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63233E1
os_ef1bup_imon=3.07172E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24609E0
cs_ionrep_imon=9.46647E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=1.97395E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.18785E-8
tplens_vset=1.4E-1
tplens_vmon=1.67027E0
tplens_imon=-6.5024E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26207E1
iondef3_imon=1.4964E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26626E1
iondef2_imon=1.58725E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.9844E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=3.99184E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27673E0
ionrepsh_imon=8.52198E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.17305E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74874E1
cs_ef2b_imon=3.1456E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50565E0
os_ea2_imon=-4.72384E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.0045E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04855E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.3046E-1
os_ef2bup_imon=-5.08462E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11177E1
os_restr2_imon=3.39968E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.31298E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0226E1
cs_anode2_imon=2.12027E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73252E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.0744E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=6.03647E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.4191E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0935E0
cs_ionaccel_imon=-9.68887E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47684E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=2.52181E-1
window_imon=-1.03736E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39426E-4
mask2_vset=0.0E0
mask2_vmon=-1.87251E1
mask2_imon=-6.01282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.62074E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.31574E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.22059E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27825E0
defgridb_imon=6.1391E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33144E1
os_fil1_imon=9.43153E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07648E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61808E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31479E1
cs_fil1_imon=7.299E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.22712E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64224E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.97653E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.83244E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29263E-1
cs_fil2_imon=-2.10135E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.78493E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21665E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-1.7609E-1
res40_imon=-2.24829E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.16274E-1	-7.9844E-1	-9.13138E0	-9.14183E0	4.93526E-3	9.41992E-2	2.7123E1	-3.26795E1	-3.2614E1	2.67896E1	1.19861E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00041E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.16345E-1	-7.98416E-1	-9.1315E0	-9.1419E0	4.55379E-3	9.41038E-2	2.72833E1	-3.26484E1	-3.26384E1	2.6795E1	1.19705E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16107E-1	-7.98059E-1	-9.13179E0	-9.14204E0	4.74453E-3	9.41277E-2	2.73387E1	-3.2639E1	-3.26614E1	2.68094E1	1.20062E-7	2.52134E-3	2.52134E-3	6.33734E-3	3.00249E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.15797E-1	-7.98225E-1	-9.13131E0	-9.1418E0	4.69685E-3	9.38892E-2	2.72709E1	-3.26679E1	-3.26284E1	2.6816E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09634E0	-8.15701E-1	-7.9844E-1	-9.13148E0	-9.14197E0	4.36306E-3	9.40323E-2	2.72059E1	-3.26676E1	-3.26193E1	2.67734E1	1.19697E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-8.16059E-1	-7.98321E-1	-9.13155E0	-9.14192E0	4.45843E-3	9.43899E-2	2.73333E1	-3.26416E1	-3.26326E1	2.68142E1	1.20122E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.15988E-1	-7.98273E-1	-9.13155E0	-9.14192E0	4.45843E-3	9.41753E-2	2.72019E1	-3.26703E1	-3.26142E1	2.6798E1	1.20166E-7	2.51376E-3	2.51376E-3	6.30469E-3	3.01025E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.15892E-1	-7.98488E-1	-9.13191E0	-9.14185E0	4.8399E-3	9.39608E-2	2.71671E1	-3.2662E1	-3.26278E1	2.68024E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.16107E-1	-7.98512E-1	-9.13138E0	-9.14214E0	4.74453E-3	9.43899E-2	2.73135E1	-3.26795E1	-3.26242E1	2.67944E1	1.20106E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16131E-1	-7.98488E-1	-9.13157E0	-9.14195E0	4.673E-3	9.408E-2	2.73865E1	-3.26543E1	-3.26396E1	2.68304E1	1.19809E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00824E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.15916E-1	-7.98059E-1	-9.13155E0	-9.14211E0	4.55379E-3	9.37462E-2	2.74962E1	-3.27169E1	-3.25906E1	2.68046E1	1.19809E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16298E-1	-7.98225E-1	-9.13141E0	-9.14211E0	4.76837E-3	9.36985E-2	2.72204E1	-3.26615E1	-3.26434E1	2.68004E1	1.20158E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.99175E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.16321E-1	-7.98178E-1	-9.13162E0	-9.14185E0	4.79221E-3	9.37939E-2	2.71588E1	-3.26615E1	-3.26303E1	2.67818E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.16512E-1	-7.98798E-1	-9.13153E0	-9.14192E0	4.8399E-3	9.39846E-2	2.73333E1	-3.26422E1	-3.26266E1	2.67872E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16369E-1	-7.98154E-1	-9.13157E0	-9.1419E0	4.57764E-3	9.36031E-2	2.74007E1	-3.26596E1	-3.26201E1	2.67827E1	1.20069E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16369E-1	-7.98059E-1	-9.13184E0	-9.14199E0	4.79221E-3	9.39846E-2	2.72859E1	-3.26579E1	-3.26422E1	2.67914E1	1.20055E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.99941E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.1625E-1	-7.98154E-1	-9.13165E0	-9.14168E0	4.74453E-3	9.40323E-2	2.7193E1	-3.26856E1	-3.26319E1	2.6825E1	1.2014E-7	2.5143E-3	2.5143E-3	6.31012E-3	3.01284E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.16369E-1	-7.98106E-1	-9.13174E0	-9.14159E0	4.41074E-3	9.408E-2	2.74211E1	-3.26536E1	-3.26218E1	2.68076E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.16536E-1	-7.98321E-1	-9.13143E0	-9.14156E0	4.48227E-3	9.40323E-2	2.75576E1	-3.27399E1	-3.26413E1	2.67989E1	1.20017E-7	2.52647E-3	2.52647E-3	6.30192E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16369E-1	-7.98321E-1	-9.1316E0	-9.14168E0	4.88758E-3	9.40084E-2	2.73252E1	-3.26626E1	-3.26207E1	2.68196E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9943E-1
