[Scan]
initial_time=2016-01-28T22:49:13
final_time=2016-01-28T22:49:33
ip_count=19
run=1026
dataset=10
scan=761
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08855E-4
ql1_vset=
ql1_vmon=-8.16131E-1
ql1_imon=1.38529E-8
ql2_vset=
ql2_vmon=-7.98965E-1
ql2_imon=2.02295E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=3.91304E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-1.8276E-10
mult1=-9.63202E-9
mult2=-2.79047E-9
rf_tmon=-4.48238E-3
rf_agc=3.27207E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.72441E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63908E0
bslens_imon=2.51494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.9858E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53328E1
cs_ef1b_imon=3.16074E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=1.10237E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40972E0
lens1_imon=2.64944E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64428E1
os_ef1alow_imon=2.96072E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03313E1
cs_ea2_imon=1.41242E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84178E1
cs_ef1a_imon=3.07316E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.19781E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11718E1
os_restr1_imon=4.31689E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15423E1
os_ea1_imon=2.44133E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.11425E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24266E0
cs_ionrep_imon=9.56191E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93356E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02151E1
cs_anode1_imon=1.95557E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.1969E-8
tplens_vset=1.4E-1
tplens_vmon=1.64084E0
tplens_imon=-3.80294E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26374E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26777E1
iondef2_imon=1.5809E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98555E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=4.14097E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.258E0
ionrepsh_imon=8.66643E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3387E1
lens5b_imon=2.18401E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.14091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51283E0
os_ea2_imon=-7.27156E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70897E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2085E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.38959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.30601E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.09973E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71387E1
iondef1_imon=1.08998E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68436E1
iondef4_imon=1.09566E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=6.12294E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.47449E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08809E0
cs_ionaccel_imon=-9.83303E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.47518E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=2.17343E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82595E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.87071E1
mask2_imon=-5.43619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.72141E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.7233E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.28607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47052E0
defgridb_imon=6.20655E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33154E1
os_fil1_imon=9.43261E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0814E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62062E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31409E1
cs_fil1_imon=7.0287E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.03443E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64207E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00303E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06724E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.69599E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-1.50669E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41853E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21572E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.55087E-1
res40_imon=-2.30235E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=195
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.16131E-1	-7.98321E-1	-9.13141E0	-9.14178E0	4.60148E-3	9.40084E-2	2.71729E1	-3.27215E1	-3.26487E1	2.67884E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9874E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16298E-1	-7.98321E-1	-9.13148E0	-9.14154E0	4.52995E-3	9.38177E-2	2.74475E1	-3.2653E1	-3.26206E1	2.68208E1	1.19809E-7	2.52757E-3	2.52757E-3	6.32936E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0965E0	-8.15916E-1	-7.98845E-1	-9.13141E0	-9.14149E0	4.55379E-3	9.42945E-2	2.74945E1	-3.26677E1	-3.26527E1	2.67804E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01347E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16321E-1	-7.98845E-1	-9.13131E0	-9.1413E0	4.57764E-3	9.40561E-2	2.73281E1	-3.26437E1	-3.26136E1	2.68617E1	1.1979E-7	2.52553E-3	2.52553E-3	6.32858E-3	3.02115E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.1625E-1	-7.99012E-1	-9.13191E0	-9.14171E0	4.55379E-3	9.39846E-2	2.74349E1	-3.26321E1	-3.26529E1	2.68136E1	1.19861E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09673E0	-8.16011E-1	-7.98965E-1	-9.13169E0	-9.14149E0	4.22001E-3	9.408E-2	2.7357E1	-3.26762E1	-3.26142E1	2.6789E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.15868E-1	-7.98774E-1	-9.13153E0	-9.14152E0	3.93391E-3	9.39131E-2	2.72036E1	-3.26554E1	-3.26392E1	2.68154E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.02511E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.16154E-1	-7.98535E-1	-9.13165E0	-9.14171E0	3.93391E-3	9.39846E-2	2.71735E1	-3.26154E1	-3.26614E1	2.68202E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16226E-1	-7.98798E-1	-9.13165E0	-9.14192E0	4.24385E-3	9.39369E-2	2.72189E1	-3.2661E1	-3.26331E1	2.68178E1	1.19965E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16345E-1	-7.98678E-1	-9.13165E0	-9.14195E0	4.48227E-3	9.377E-2	2.72918E1	-3.26621E1	-3.26024E1	2.67863E1	1.20035E-7	2.51221E-3	2.51221E-3	6.33521E-3	2.99626E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16417E-1	-7.98345E-1	-9.13184E0	-9.14176E0	4.43459E-3	9.39846E-2	2.71759E1	-3.27137E1	-3.2611E1	2.68046E1	1.19976E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.97084E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16369E-1	-7.9844E-1	-9.13184E0	-9.14183E0	4.36306E-3	9.41992E-2	2.71675E1	-3.26819E1	-3.26128E1	2.67818E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16274E-1	-7.98345E-1	-9.13174E0	-9.14192E0	4.50611E-3	9.41753E-2	2.71175E1	-3.26543E1	-3.26266E1	2.67806E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00302E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16011E-1	-7.98392E-1	-9.13157E0	-9.14178E0	4.36306E-3	9.40084E-2	2.71261E1	-3.26706E1	-3.26515E1	2.68238E1	1.19902E-7	2.52599E-3	2.52599E-3	6.3074E-3	3.01738E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.16131E-1	-7.98368E-1	-9.13143E0	-9.14168E0	4.12464E-3	9.42469E-2	2.72684E1	-3.26741E1	-3.2587E1	2.67692E1	1.20092E-7	2.52236E-3	2.52236E-3	6.31798E-3	3.00852E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.15964E-1	-7.98535E-1	-9.13141E0	-9.14199E0	4.31538E-3	9.42469E-2	2.71483E1	-3.26669E1	-3.26188E1	2.67992E1	1.19809E-7	2.5199E-3	2.5199E-3	6.28552E-3	3.01347E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.15964E-1	-7.98631E-1	-9.13126E0	-9.14207E0	4.17233E-3	9.408E-2	2.71452E1	-3.26596E1	-3.26419E1	2.67723E1	1.20069E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.15701E-1	-7.9844E-1	-9.13162E0	-9.14178E0	4.43459E-3	9.38416E-2	2.71028E1	-3.26608E1	-3.26537E1	2.67818E1	1.20209E-7	2.53031E-3	2.53031E-3	6.32356E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.15797E-1	-7.98583E-1	-9.13155E0	-9.14202E0	4.36306E-3	9.38654E-2	2.71176E1	-3.27324E1	-3.27167E1	2.68412E1	1.20363E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.16131E-1	-7.98965E-1	-9.13146E0	-9.14202E0	4.74453E-3	9.40084E-2	2.71387E1	-3.26777E1	-3.26374E1	2.68436E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9952E-1
