[Scan]
initial_time=2016-01-28T22:49:40
final_time=2016-01-28T22:50:00
ip_count=19
run=1026
dataset=10
scan=762
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.16035E-1
ql1_imon=1.37763E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=1.99655E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=3.5907E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-1.47176E-10
mult1=-9.90129E-9
mult2=-2.65074E-9
rf_tmon=-5.68928E-3
rf_agc=3.20821E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.70559E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62588E0
bslens_imon=2.66393E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19869E1
lens5a_imon=1.9773E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05208E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53484E1
cs_ef1b_imon=3.19137E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0473E1
cs_ea1_imon=1.08544E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43805E0
lens1_imon=2.73242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65167E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03516E1
cs_ea2_imon=1.39582E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83986E1
cs_ef1a_imon=3.03964E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.19787E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=4.30572E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.45676E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.09298E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=9.4845E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93456E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=1.96314E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.18083E-8
tplens_vset=1.4E-1
tplens_vmon=1.65165E0
tplens_imon=-3.35395E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26372E1
iondef3_imon=1.49929E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2675E1
iondef2_imon=1.58148E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98454E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=3.97122E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27072E0
ionrepsh_imon=8.52198E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.18531E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48762E0
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06059E2
lens4b_imon=2.0054E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71132E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13642E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10715E1
os_restr2_imon=3.38707E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23021E2
cs_ionfoca_imon=6.32127E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.09108E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74715E1
iondef1_imon=1.10851E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=6.09583E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.46905E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-8.85996E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=2.12537E-1
window_imon=-7.74273E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39329E-4
mask2_vset=0.0E0
mask2_vmon=-1.86927E1
mask2_imon=-5.29203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.73249E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.58611E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.19175E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36247E0
defgridb_imon=6.24004E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3316E1
os_fil1_imon=9.42865E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07672E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61718E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31491E1
cs_fil1_imon=7.19088E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.73768E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64044E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73148E-2
os_fil2_imon=-2.47376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10328E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.85435E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.56869E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21679E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.6681E-1
res40_imon=-2.14378E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16488E-1	-7.98678E-1	-9.13136E0	-9.14197E0	4.55379E-3	9.37462E-2	2.73427E1	-3.26676E1	-3.26408E1	2.67995E1	1.19861E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.02133E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16393E-1	-7.98345E-1	-9.13153E0	-9.14192E0	4.3869E-3	9.39608E-2	2.74467E1	-3.26753E1	-3.2606E1	2.68094E1	1.20142E-7	2.51919E-3	2.51919E-3	6.33388E-3	3.02115E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16107E-1	-7.98678E-1	-9.13177E0	-9.14223E0	4.17233E-3	9.38177E-2	2.74608E1	-3.26708E1	-3.2649E1	2.67752E1	1.20262E-7	2.51611E-3	2.51611E-3	6.33592E-3	2.9971E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.15916E-1	-7.98726E-1	-9.13181E0	-9.14183E0	4.3869E-3	9.41992E-2	2.72437E1	-3.26579E1	-3.26408E1	2.68124E1	1.20042E-7	2.52131E-3	2.52131E-3	6.32858E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.15964E-1	-7.98559E-1	-9.13148E0	-9.14192E0	4.43459E-3	9.41277E-2	2.7242E1	-3.26801E1	-3.2626E1	2.67932E1	1.20017E-7	2.51007E-3	2.51007E-3	6.3074E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.15988E-1	-7.98321E-1	-9.1315E0	-9.14204E0	4.48227E-3	9.40084E-2	2.74481E1	-3.26837E1	-3.26308E1	2.67866E1	1.19933E-7	2.51593E-3	2.51593E-3	6.29384E-3	3.00249E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16059E-1	-7.98535E-1	-9.13138E0	-9.14185E0	4.48227E-3	9.40323E-2	2.71273E1	-3.26801E1	-3.25725E1	2.68088E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.15821E-1	-7.98678E-1	-9.13141E0	-9.14202E0	4.41074E-3	9.38654E-2	2.7385E1	-3.26428E1	-3.25972E1	2.68076E1	1.2033E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01871E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16131E-1	-7.98464E-1	-9.13148E0	-9.14185E0	4.31538E-3	9.377E-2	2.72576E1	-3.26488E1	-3.2611E1	2.67427E1	1.20069E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16011E-1	-7.98178E-1	-9.13167E0	-9.14204E0	4.50611E-3	9.37462E-2	2.73424E1	-3.26759E1	-3.25966E1	2.68418E1	1.19913E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9926E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16393E-1	-7.9875E-1	-9.13146E0	-9.14176E0	4.41074E-3	9.35793E-2	2.72751E1	-3.26633E1	-3.26068E1	2.67974E1	1.19705E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.98481E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.1625E-1	-7.98726E-1	-9.13143E0	-9.14199E0	4.76837E-3	9.37223E-2	2.74172E1	-3.26472E1	-3.26685E1	2.67798E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9874E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16083E-1	-7.98678E-1	-9.13148E0	-9.14171E0	4.86374E-3	9.38654E-2	2.73062E1	-3.26641E1	-3.26243E1	2.67752E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9892E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.15892E-1	-7.98869E-1	-9.13134E0	-9.14183E0	5.126E-3	9.39131E-2	2.72639E1	-3.26697E1	-3.26397E1	2.67845E1	1.20078E-7	2.51783E-3	2.51783E-3	6.29185E-3	3.0E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16131E-1	-7.98321E-1	-9.13122E0	-9.14173E0	4.74453E-3	9.38892E-2	2.74217E1	-3.26663E1	-3.26272E1	2.681E1	1.20171E-7	2.51642E-3	2.51642E-3	6.31902E-3	3.02025E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16202E-1	-7.9844E-1	-9.13134E0	-9.1418E0	5.10216E-3	9.37223E-2	2.74366E1	-3.26726E1	-3.26484E1	2.68065E1	1.20106E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.02769E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09673E0	-8.16083E-1	-7.98368E-1	-9.13148E0	-9.14183E0	4.62532E-3	9.38892E-2	2.72616E1	-3.26432E1	-3.26468E1	2.68157E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.16202E-1	-7.98225E-1	-9.13143E0	-9.14168E0	4.72069E-3	9.37462E-2	2.71971E1	-3.26425E1	-3.26178E1	2.67613E1	1.19978E-7	2.52585E-3	2.52585E-3	6.31858E-3	2.99879E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16107E-1	-7.98512E-1	-9.13148E0	-9.14173E0	4.50611E-3	9.36985E-2	2.72432E1	-3.25894E1	-3.25215E1	2.68136E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16035E-1	-7.98535E-1	-9.13136E0	-9.14185E0	4.62532E-3	9.37939E-2	2.74715E1	-3.2675E1	-3.26372E1	2.68094E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9978E-1
