[Scan]
initial_time=2016-01-28T22:51:27
final_time=2016-01-28T22:51:46
ip_count=19
run=1026
dataset=10
scan=766
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=1.39087E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=2.06527E-9
ql3_vset=
ql3_vmon=-9.13162E0
ql3_imon=3.9413E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=-2.09522E-10
mult1=-8.84985E-9
mult2=-2.79377E-9
rf_tmon=-4.64345E-3
rf_agc=3.25368E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.72766E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68273E0
bslens_imon=2.61759E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20102E1
lens5a_imon=1.97519E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.0516E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53528E1
cs_ef1b_imon=3.18235E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02326E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04888E1
cs_ea1_imon=1.09387E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39557E0
lens1_imon=2.58573E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64892E1
os_ef1alow_imon=2.96688E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03861E1
cs_ea2_imon=1.39154E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84255E1
cs_ef1a_imon=3.04299E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.14599E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.30694E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15111E1
os_ea1_imon=2.46044E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63728E1
os_ef1bup_imon=3.09825E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27274E0
cs_ionrep_imon=9.44157E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01838E1
cs_anode1_imon=1.96531E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20463E0
olens4_imon=3.11102E-8
tplens_vset=1.4E-1
tplens_vmon=1.65618E0
tplens_imon=-8.65226E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26054E1
iondef3_imon=1.5094E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26566E1
iondef2_imon=1.57948E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98413E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=3.976E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27097E0
ionrepsh_imon=8.53902E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33587E1
lens5b_imon=2.20277E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.13752E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50281E0
os_ea2_imon=-6.88222E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.00715E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71171E1
cs_ef2a_imon=3.20111E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06672E0
os_ef2alow_imon=-2.56763E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00127E-1
os_ef2bup_imon=-5.17755E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10845E1
os_restr2_imon=3.37974E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.31096E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01804E1
cs_anode2_imon=2.09946E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73631E1
iondef1_imon=1.1229E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67891E1
iondef4_imon=1.09893E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.04751E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.20382E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11682E0
cs_ionaccel_imon=-8.33481E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0203E2
cs_ionfocb_imon=1.4733E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56162E1
einzel_imon=7.79905E-6
window_vset=0.0E0
window_vmon=2.03206E-1
window_imon=-9.69015E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39202E-4
mask2_vset=0.0E0
mask2_vmon=-1.86825E1
mask2_imon=-4.33827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.60815E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93671E3
defgrida_imon=6.34812E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.05954E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33173E0
defgridb_imon=6.29149E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3313E1
os_fil1_imon=9.42235E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07549E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60385E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31439E1
cs_fil1_imon=7.98826E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00792E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60868E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05368E-2
os_fil2_imon=-2.32166E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15562E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.74386E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29277E-1
cs_fil2_imon=-2.28691E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.56483E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21387E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32784E-3
inlet_lpb_pmon=3.00878E-1
chamber_ion_pmon=1.20064E-7
chamber_cvt_pmon=2.51345E-3
foreline_cvt_pmon=2.51345E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.5631E-1
res40_imon=-2.39039E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.15916E-1	-7.98535E-1	-9.13174E0	-9.14183E0	4.36306E-3	9.40323E-2	2.73582E1	-3.26354E1	-3.2629E1	2.67764E1	1.2033E-7	2.50789E-3	2.50789E-3	6.29645E-3	3.00563E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16011E-1	-7.98345E-1	-9.13188E0	-9.1418E0	4.1008E-3	9.39131E-2	2.74709E1	-3.26837E1	-3.26332E1	2.67878E1	1.20004E-7	2.51096E-3	2.51096E-3	6.2752E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.15845E-1	-7.98702E-1	-9.13174E0	-9.14176E0	4.22001E-3	9.39846E-2	2.75214E1	-3.26723E1	-3.2617E1	2.6792E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00824E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16107E-1	-7.98512E-1	-9.13146E0	-9.14197E0	4.24385E-3	9.40323E-2	2.73234E1	-3.26555E1	-3.2603E1	2.68065E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01347E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16202E-1	-7.98726E-1	-9.13167E0	-9.14207E0	4.41074E-3	9.41277E-2	2.72198E1	-3.26603E1	-3.26194E1	2.68064E1	1.20158E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.15988E-1	-7.98845E-1	-9.13169E0	-9.14204E0	4.45843E-3	9.43422E-2	2.73357E1	-3.265E1	-3.2626E1	2.6828E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.15988E-1	-7.98845E-1	-9.1315E0	-9.14204E0	4.55379E-3	9.43184E-2	2.73305E1	-3.26419E1	-3.26372E1	2.6831E1	1.20017E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.15606E-1	-7.98726E-1	-9.13162E0	-9.1418E0	4.48227E-3	9.43661E-2	2.74086E1	-3.26585E1	-3.2596E1	2.678E1	1.20311E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.15773E-1	-7.98678E-1	-9.13143E0	-9.14187E0	4.74453E-3	9.408E-2	2.74756E1	-3.26644E1	-3.26083E1	2.67968E1	1.2033E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.15749E-1	-7.98607E-1	-9.13134E0	-9.14173E0	4.81606E-3	9.41753E-2	2.73602E1	-3.26664E1	-3.2596E1	2.68148E1	1.20122E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01871E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.15701E-1	-7.98345E-1	-9.1311E0	-9.1418E0	4.55379E-3	9.42469E-2	2.7397E1	-3.265E1	-3.26639E1	2.67938E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.15606E-1	-7.9844E-1	-9.13136E0	-9.14164E0	4.60148E-3	9.41277E-2	2.72859E1	-3.2647E1	-3.26434E1	2.68172E1	1.20122E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.1594E-1	-7.98416E-1	-9.13131E0	-9.14159E0	4.29153E-3	9.40323E-2	2.72965E1	-3.26695E1	-3.26444E1	2.67988E1	1.19819E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.00676E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.15988E-1	-7.98297E-1	-9.13136E0	-9.14173E0	4.55379E-3	9.38892E-2	2.73157E1	-3.2659E1	-3.26319E1	2.67955E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.15725E-1	-7.98297E-1	-9.13143E0	-9.14185E0	5.05447E-3	9.408E-2	2.72606E1	-3.2635E1	-3.26062E1	2.6804E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16083E-1	-7.98368E-1	-9.13131E0	-9.14159E0	4.69685E-3	9.40323E-2	2.74263E1	-3.26578E1	-3.26413E1	2.67914E1	1.20383E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02133E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16536E-1	-7.98464E-1	-9.13153E0	-9.14156E0	4.45843E-3	9.41277E-2	2.71783E1	-3.2641E1	-3.26218E1	2.67842E1	1.20383E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.16393E-1	-7.9844E-1	-9.13126E0	-9.1419E0	4.24385E-3	9.41515E-2	2.73257E1	-3.26885E1	-3.2649E1	2.68134E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9952E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16369E-1	-7.98655E-1	-9.13167E0	-9.14159E0	4.55379E-3	9.4223E-2	2.72022E1	-3.26613E1	-3.26305E1	2.67981E1	1.19953E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16298E-1	-7.98321E-1	-9.13162E0	-9.14168E0	4.673E-3	9.39369E-2	2.73631E1	-3.26566E1	-3.26054E1	2.67891E1	1.20064E-7	2.51345E-3	2.51345E-3	6.32784E-3	3.00878E-1
