[Scan]
initial_time=2016-01-28T22:52:20
final_time=2016-01-28T22:52:40
ip_count=19
run=1026
dataset=10
scan=768
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08859E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=1.38748E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.0573E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=2.96426E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-2.03788E-10
mult1=-9.34305E-9
mult2=-2.81642E-9
rf_tmon=-4.61457E-3
rf_agc=3.37902E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.73513E-9
bslens_vset=-6.2E0
bslens_vmon=-6.59307E0
bslens_imon=2.46185E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20178E1
lens5a_imon=2.00952E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12441E2
lens4a_imon=2.05005E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=3.19065E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02376E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=1.056E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4227E0
lens1_imon=2.93967E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.3795E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=3.03676E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.14186E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=4.31256E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14887E1
os_ea1_imon=2.48875E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.10812E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27451E0
cs_ionrep_imon=9.39555E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93717E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01701E1
cs_anode1_imon=1.95593E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.13479E-8
tplens_vset=1.4E-1
tplens_vmon=1.6957E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.48321E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27251E1
iondef2_imon=1.58939E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0286E2
lens6_imon=2.98233E-4
ql6_vset=1.0E-1
ql6_vmon=9.44376E-2
ql6_imon=4.08188E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27333E0
ionrepsh_imon=8.74784E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33557E1
lens5b_imon=2.15605E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4621E0
os_ea2_imon=-3.48439E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.20759E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0888E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95622E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=3.36616E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23009E2
cs_ionfoca_imon=6.31769E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.08243E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72648E1
iondef1_imon=1.08255E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.94304E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.19239E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12053E0
cs_ionaccel_imon=-8.7158E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02038E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=1.91514E-1
window_imon=-1.09503E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86722E1
mask2_imon=-5.14787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92606E3
multa_neg_imon=8.29126E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9368E3
defgrida_imon=6.55695E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.14095E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.7038E0
defgridb_imon=6.21716E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3308E1
os_fil1_imon=9.41591E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07239E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60299E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31365E1
cs_fil1_imon=7.34104E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.34125E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60878E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10433E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.68944E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.08933E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59873E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21279E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.40381E-1
res40_imon=-2.53301E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=222
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.15964E-1	-7.98535E-1	-9.13143E0	-9.14187E0	4.12464E-3	9.39846E-2	2.71651E1	-3.26675E1	-3.26098E1	2.67812E1	1.20311E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.0071E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16059E-1	-7.98297E-1	-9.13167E0	-9.14202E0	4.31538E-3	9.41992E-2	2.74165E1	-3.2686E1	-3.26113E1	2.6789E1	1.20158E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.15892E-1	-7.98225E-1	-9.1315E0	-9.1419E0	4.24385E-3	9.40323E-2	2.72559E1	-3.26353E1	-3.26347E1	2.68274E1	1.19775E-7	2.52407E-3	2.52407E-3	6.31879E-3	2.9971E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16178E-1	-7.97582E-1	-9.13167E0	-9.14202E0	4.12464E-3	9.38892E-2	2.72842E1	-3.26735E1	-3.26417E1	2.68019E1	1.19991E-7	2.52342E-3	2.52342E-3	6.31798E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.15964E-1	-7.97582E-1	-9.13179E0	-9.14178E0	4.36306E-3	9.40084E-2	2.73804E1	-3.26915E1	-3.26009E1	2.68211E1	1.19991E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.006E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.16107E-1	-7.98106E-1	-9.13162E0	-9.14199E0	4.31538E-3	9.38654E-2	2.73403E1	-3.26509E1	-3.26384E1	2.68292E1	1.20031E-7	2.52027E-3	2.52027E-3	6.34099E-3	3.0201E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.15797E-1	-7.98202E-1	-9.1316E0	-9.1419E0	4.36306E-3	9.37223E-2	2.71918E1	-3.26508E1	-3.26238E1	2.68266E1	1.20006E-7	2.51592E-3	2.51592E-3	6.32632E-3	3.00557E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.1594E-1	-7.98392E-1	-9.1315E0	-9.14197E0	4.45843E-3	9.37939E-2	2.71963E1	-3.26775E1	-3.26088E1	2.68123E1	1.19898E-7	2.52187E-3	2.52187E-3	6.32222E-3	3.01138E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.15845E-1	-7.98249E-1	-9.1315E0	-9.14185E0	4.17233E-3	9.36985E-2	2.73454E1	-3.26753E1	-3.26074E1	2.68112E1	1.19785E-7	2.51758E-3	2.51758E-3	6.32483E-3	2.97887E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.15964E-1	-7.98416E-1	-9.1315E0	-9.14166E0	4.62532E-3	9.40323E-2	2.73417E1	-3.26663E1	-3.2623E1	2.67896E1	1.20122E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.15797E-1	-7.9875E-1	-9.13131E0	-9.14204E0	4.673E-3	9.41515E-2	2.72751E1	-3.26879E1	-3.26284E1	2.67932E1	1.19713E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.01209E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.1625E-1	-7.98464E-1	-9.13177E0	-9.14159E0	4.64916E-3	9.40084E-2	2.72612E1	-3.26536E1	-3.26098E1	2.68346E1	1.19653E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.15988E-1	-7.9844E-1	-9.13157E0	-9.14199E0	4.55379E-3	9.40084E-2	2.73616E1	-3.26488E1	-3.26536E1	2.6804E1	1.20055E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.01223E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.16107E-1	-7.98559E-1	-9.13138E0	-9.14187E0	4.3869E-3	9.377E-2	2.73033E1	-3.26621E1	-3.26398E1	2.68046E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.16178E-1	-7.98607E-1	-9.13165E0	-9.14207E0	4.24385E-3	9.43422E-2	2.73075E1	-3.26392E1	-3.26536E1	2.68058E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-8.16131E-1	-7.9844E-1	-9.13138E0	-9.14226E0	4.3869E-3	9.44376E-2	2.72249E1	-3.26832E1	-3.26437E1	2.68112E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.16083E-1	-7.98416E-1	-9.13148E0	-9.1418E0	4.26769E-3	9.41515E-2	2.74092E1	-3.26842E1	-3.26162E1	2.68166E1	1.20226E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16202E-1	-7.98416E-1	-9.13153E0	-9.1418E0	4.43459E-3	9.38892E-2	2.72506E1	-3.26335E1	-3.26272E1	2.67775E1	1.20122E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.1625E-1	-7.98345E-1	-9.1316E0	-9.1418E0	4.64916E-3	9.42707E-2	2.73357E1	-3.26591E1	-3.26585E1	2.68022E1	1.2026E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.03027E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16154E-1	-7.98416E-1	-9.13153E0	-9.14197E0	4.48227E-3	9.44376E-2	2.72648E1	-3.27251E1	-3.26296E1	2.67914E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00197E-1
