[Scan]
initial_time=2016-01-28T22:54:33
final_time=2016-01-28T22:54:53
ip_count=19
run=1026
dataset=10
scan=773
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09356E0
qbias_imon=-1.08755E-4
ql1_vset=
ql1_vmon=-8.16274E-1
ql1_imon=1.39293E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=2.01428E-9
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=3.75187E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-2.24268E-10
mult1=-9.14471E-9
mult2=-2.6625E-9
rf_tmon=-5.34124E-3
rf_agc=3.2495E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.67477E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64811E0
bslens_imon=2.41518E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19839E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53412E1
cs_ef1b_imon=3.18058E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.0224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04904E1
cs_ea1_imon=1.08976E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37917E0
lens1_imon=2.79731E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64529E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04165E1
cs_ea2_imon=1.40916E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84456E1
cs_ef1a_imon=3.0486E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.15163E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.111E1
os_restr1_imon=4.30439E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.45244E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63886E1
os_ef1bup_imon=3.10451E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2509E0
cs_ionrep_imon=9.66835E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01862E1
cs_anode1_imon=1.97575E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.12919E-8
tplens_vset=1.4E-1
tplens_vmon=1.67268E0
tplens_imon=-2.16432E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26478E1
iondef3_imon=1.50073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.58004E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98447E-4
ql6_vset=1.0E-1
ql6_vmon=9.39608E-2
ql6_imon=3.9801E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=8.64094E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33381E1
lens5b_imon=2.19396E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.14308E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47741E0
os_ea2_imon=-6.41816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71269E1
cs_ef2a_imon=3.19297E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07667E0
os_ef2alow_imon=-2.4781E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93492E-1
os_ef2bup_imon=-5.23454E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10917E1
os_restr2_imon=3.35468E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23008E2
cs_ionfoca_imon=6.32199E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01668E1
cs_anode2_imon=2.09747E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73605E1
iondef1_imon=1.08724E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.0876E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.99364E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.22E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12837E0
cs_ionaccel_imon=-8.92876E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47304E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56346E1
einzel_imon=7.71615E-6
window_vset=0.0E0
window_vmon=2.28428E-1
window_imon=-9.63645E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39293E-4
mask2_vset=0.0E0
mask2_vmon=-1.86857E1
mask2_imon=-5.63801E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.20256E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.74834E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.15209E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64818E0
defgridb_imon=6.22201E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33156E1
os_fil1_imon=9.42868E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08532E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6078E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31372E1
cs_fil1_imon=7.22823E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6254E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01522E-2
os_fil2_imon=-2.41402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10339E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.38541E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27554E-1
cs_fil2_imon=-2.37863E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55493E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21304E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20466E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.25338E-1
res40_imon=-2.28702E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.16178E-1	-7.98512E-1	-9.132E0	-9.14195E0	4.3869E-3	9.38177E-2	2.72981E1	-3.26411E1	-3.26399E1	2.67834E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.03545E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16202E-1	-7.98416E-1	-9.13193E0	-9.14204E0	4.50611E-3	9.35555E-2	2.72959E1	-3.26952E1	-3.26682E1	2.6789E1	1.20092E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.006E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16464E-1	-7.98607E-1	-9.13172E0	-9.14192E0	4.41074E-3	9.40561E-2	2.7308E1	-3.26689E1	-3.26428E1	2.68047E1	1.20137E-7	2.51804E-3	2.51804E-3	6.34661E-3	3.00144E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16131E-1	-7.98416E-1	-9.13167E0	-9.14161E0	4.05312E-3	9.39608E-2	2.73105E1	-3.26663E1	-3.26338E1	2.68556E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.15916E-1	-7.98345E-1	-9.1316E0	-9.14173E0	4.05312E-3	9.40561E-2	2.72895E1	-3.26561E1	-3.26344E1	2.67902E1	1.198E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16107E-1	-7.98297E-1	-9.13198E0	-9.1418E0	4.3869E-3	9.39369E-2	2.72883E1	-3.26696E1	-3.26406E1	2.68099E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.15845E-1	-7.98225E-1	-9.13167E0	-9.14226E0	4.3869E-3	9.39608E-2	2.72968E1	-3.26635E1	-3.26286E1	2.68082E1	1.19782E-7	2.51265E-3	2.51265E-3	6.28667E-3	3.0E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.15773E-1	-7.98273E-1	-9.13179E0	-9.14176E0	4.57764E-3	9.40323E-2	2.72821E1	-3.26644E1	-3.2616E1	2.67943E1	1.1995E-7	2.51527E-3	2.51527E-3	6.32483E-3	3.0147E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.15654E-1	-7.98392E-1	-9.13181E0	-9.14185E0	4.50611E-3	9.42469E-2	2.72979E1	-3.26488E1	-3.25767E1	2.67974E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01995E-1
1.3E1	0.0E0	2.0E0	5.25E2	3.53E2	-2.09449E0	-8.15725E-1	-7.98774E-1	-9.13169E0	-9.14218E0	4.52995E-3	9.39846E-2	2.72901E1	-3.26536E1	-3.26362E1	2.68016E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0071E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.15725E-1	-7.98655E-1	-9.13157E0	-9.14221E0	4.26769E-3	9.39131E-2	2.73261E1	-3.26579E1	-3.26122E1	2.67848E1	1.20084E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.01475E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.15749E-1	-7.9844E-1	-9.13181E0	-9.14247E0	4.31538E-3	9.37939E-2	2.73165E1	-3.26777E1	-3.26416E1	2.67998E1	1.198E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.99686E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.15892E-1	-7.98464E-1	-9.13155E0	-9.14216E0	4.3869E-3	9.40561E-2	2.72532E1	-3.26785E1	-3.26142E1	2.67944E1	1.19913E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.9952E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16035E-1	-7.98416E-1	-9.13165E0	-9.14209E0	4.81606E-3	9.41992E-2	2.72901E1	-3.26579E1	-3.2629E1	2.68178E1	1.19697E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.9943E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.15916E-1	-7.98249E-1	-9.1316E0	-9.14192E0	4.64916E-3	9.41038E-2	2.73184E1	-3.26782E1	-3.26527E1	2.68036E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.15916E-1	-7.98583E-1	-9.13181E0	-9.14161E0	4.3869E-3	9.408E-2	2.72805E1	-3.26705E1	-3.26344E1	2.67938E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.0148E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.15725E-1	-7.98535E-1	-9.13169E0	-9.14178E0	4.33922E-3	9.39131E-2	2.73045E1	-3.26431E1	-3.26154E1	2.67879E1	1.19851E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.03286E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.16154E-1	-7.98464E-1	-9.13155E0	-9.14207E0	4.45843E-3	9.39369E-2	2.73406E1	-3.26768E1	-3.26015E1	2.67645E1	1.20209E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.0071E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.15964E-1	-7.98297E-1	-9.13165E0	-9.14183E0	4.45843E-3	9.39369E-2	2.72791E1	-3.26567E1	-3.26378E1	2.68267E1	1.19978E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.00676E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09356E0	-8.16274E-1	-7.98082E-1	-9.13179E0	-9.14202E0	4.31538E-3	9.39608E-2	2.73605E1	-3.26561E1	-3.26478E1	2.681E1	1.20466E-7	2.51417E-3	2.51417E-3	6.34518E-3	3.0148E-1
