[Scan]
initial_time=2016-01-28T22:55:00
final_time=2016-01-28T22:55:19
ip_count=19
run=1026
dataset=10
scan=774
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08735E-4
ql1_vset=
ql1_vmon=-8.15988E-1
ql1_imon=1.38954E-8
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=2.05452E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=3.38316E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-2.17569E-10
mult1=-9.72835E-9
mult2=-2.75454E-9
rf_tmon=-4.80683E-3
rf_agc=3.32074E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.67991E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6497E0
bslens_imon=2.74146E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19954E1
lens5a_imon=2.00138E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=3.18921E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04782E1
cs_ea1_imon=1.09387E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4227E0
lens1_imon=2.7804E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03578E1
cs_ea2_imon=1.38481E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.04469E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.15873E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11171E1
os_restr1_imon=4.30319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15618E1
os_ea1_imon=2.44345E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23676E0
cs_ionrep_imon=9.54775E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93625E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=1.96134E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.13362E-8
tplens_vset=1.4E-1
tplens_vmon=1.65146E0
tplens_imon=-1.32535E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26536E1
iondef3_imon=1.49914E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.56037E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98356E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=3.92413E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25387E0
ionrepsh_imon=8.6452E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33746E1
lens5b_imon=2.19569E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48393E0
os_ea2_imon=-4.97094E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00566E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.20038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07798E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05232E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=3.36869E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.31663E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.10477E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.08821E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.99159E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.26803E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-1.08782E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02043E2
cs_ionfocb_imon=1.47378E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=2.32359E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.3929E-4
mask2_vset=0.0E0
mask2_vmon=-1.86963E1
mask2_imon=-4.42708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.73911E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.61358E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=7.23651E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54729E0
defgridb_imon=6.21009E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3312E1
os_fil1_imon=9.43069E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08002E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61015E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31368E1
cs_fil1_imon=6.77042E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.53346E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63019E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09167E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04321E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.1035E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27192E-1
cs_fil2_imon=-2.23349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21406E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.8452E-1
res40_imon=-2.29515E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16035E-1	-7.98321E-1	-9.13129E0	-9.14185E0	4.3869E-3	9.41277E-2	2.72931E1	-3.2623E1	-3.26458E1	2.67937E1	1.20278E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00824E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.15892E-1	-7.98202E-1	-9.13124E0	-9.14214E0	4.33922E-3	9.38654E-2	2.73303E1	-3.26753E1	-3.26206E1	2.67907E1	1.19749E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.1625E-1	-7.98249E-1	-9.13115E0	-9.14204E0	4.673E-3	9.39846E-2	2.73129E1	-3.26693E1	-3.26206E1	2.67938E1	1.19757E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16345E-1	-7.98345E-1	-9.13131E0	-9.14187E0	4.45843E-3	9.36747E-2	2.72668E1	-3.26567E1	-3.26077E1	2.67926E1	1.20226E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16274E-1	-7.98392E-1	-9.13143E0	-9.14171E0	4.3869E-3	9.37223E-2	2.73171E1	-3.26645E1	-3.26338E1	2.6813E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16178E-1	-7.98249E-1	-9.13174E0	-9.14183E0	4.48227E-3	9.39846E-2	2.72502E1	-3.26708E1	-3.26349E1	2.68004E1	1.20017E-7	2.52099E-3	2.52099E-3	6.34588E-3	3.01347E-1
7.0E0	2.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16226E-1	-7.98178E-1	-9.13179E0	-9.14183E0	4.52995E-3	9.41038E-2	2.73399E1	-3.26314E1	-3.2617E1	2.68148E1	1.20017E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16178E-1	-7.98321E-1	-9.1316E0	-9.14202E0	4.57764E-3	9.42469E-2	2.72585E1	-3.26602E1	-3.26083E1	2.67943E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.02253E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.16441E-1	-7.98178E-1	-9.13148E0	-9.14197E0	4.62532E-3	9.40084E-2	2.72953E1	-3.2648E1	-3.26027E1	2.68107E1	1.20122E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16417E-1	-7.98464E-1	-9.13129E0	-9.14197E0	4.72069E-3	9.38654E-2	2.72865E1	-3.26771E1	-3.26266E1	2.6794E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.16393E-1	-7.98202E-1	-9.13169E0	-9.14192E0	4.55379E-3	9.37939E-2	2.73363E1	-3.26266E1	-3.26236E1	2.67984E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00563E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16274E-1	-7.98297E-1	-9.13174E0	-9.14152E0	4.43459E-3	9.377E-2	2.73225E1	-3.26693E1	-3.26308E1	2.68058E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16202E-1	-7.98512E-1	-9.13167E0	-9.14173E0	4.43459E-3	9.37939E-2	2.72793E1	-3.26428E1	-3.26302E1	2.67752E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16083E-1	-7.9844E-1	-9.1316E0	-9.14187E0	4.55379E-3	9.38416E-2	2.73514E1	-3.26633E1	-3.26296E1	2.67896E1	1.19978E-7	2.51804E-3	2.51804E-3	6.3074E-3	2.99879E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16035E-1	-7.98273E-1	-9.13153E0	-9.14164E0	4.76837E-3	9.38416E-2	2.72763E1	-3.26747E1	-3.26428E1	2.68076E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.16107E-1	-7.98178E-1	-9.13141E0	-9.1419E0	4.62532E-3	9.377E-2	2.72901E1	-3.26735E1	-3.26188E1	2.68106E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.15892E-1	-7.98345E-1	-9.13162E0	-9.14183E0	4.74453E-3	9.408E-2	2.73157E1	-3.26537E1	-3.26036E1	2.6796E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.15821E-1	-7.97915E-1	-9.13146E0	-9.14176E0	4.55379E-3	9.40084E-2	2.73075E1	-3.26633E1	-3.26398E1	2.68064E1	1.198E-7	2.52061E-3	2.52061E-3	6.29128E-3	2.99686E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.15964E-1	-7.98106E-1	-9.13179E0	-9.14161E0	4.60148E-3	9.38654E-2	2.73016E1	-3.26467E1	-3.26154E1	2.68148E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.15988E-1	-7.97987E-1	-9.1315E0	-9.14185E0	4.76837E-3	9.37939E-2	2.73405E1	-3.265E1	-3.26536E1	2.68178E1	1.19851E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.01223E-1
