[Scan]
initial_time=2016-01-28T22:55:53
final_time=2016-01-28T22:56:13
ip_count=19
run=1026
dataset=10
scan=776
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=1.38885E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=1.96936E-9
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=2.67673E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-1.78623E-10
mult1=-9.63583E-9
mult2=-2.75097E-9
rf_tmon=-4.86818E-3
rf_agc=3.25569E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.1008E-3
ql5_imon=1.73736E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63129E0
bslens_imon=2.61346E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19917E1
lens5a_imon=1.9892E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05169E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=3.17587E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02063E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=1.11644E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35874E0
lens1_imon=2.58101E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.645E1
os_ef1alow_imon=2.99495E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03798E1
cs_ea2_imon=1.40952E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=3.03244E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.16865E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10919E1
os_restr1_imon=4.31761E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14897E1
os_ea1_imon=2.46145E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22867E0
cs_ionrep_imon=9.71882E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=1.98008E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.15288E-8
tplens_vset=1.4E-1
tplens_vmon=1.65225E0
tplens_imon=-1.91197E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26078E1
iondef3_imon=1.49532E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26545E1
iondef2_imon=1.58112E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98454E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=3.98192E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29235E0
ionrepsh_imon=8.60849E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48582E0
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00666E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.21588E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08519E0
os_ef2alow_imon=-2.67356E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76401E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11057E1
os_restr2_imon=3.38418E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2309E2
cs_ionfoca_imon=6.31695E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.09108E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7292E1
iondef1_imon=1.08652E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68099E1
iondef4_imon=1.07044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.00837E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.30563E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-5.14787E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47057E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.99778E-6
window_vset=0.0E0
window_vmon=2.27554E-1
window_imon=-1.13827E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39419E-4
mask2_vset=0.0E0
mask2_vmon=-1.86668E1
mask2_imon=-8.06708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.42246E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.70868E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.2999E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43164E0
defgridb_imon=5.96246E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33132E1
os_fil1_imon=9.43207E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07636E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6069E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31436E1
cs_fil1_imon=7.02269E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.86072E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63025E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84756E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.23543E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.4447E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-3.02036E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.87503E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21417E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40046E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.4848E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16226E-1	-7.98345E-1	-9.13167E0	-9.14185E0	4.22001E-3	9.41277E-2	2.72985E1	-3.26753E1	-3.26212E1	2.68298E1					
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16107E-1	-7.98035E-1	-9.13138E0	-9.14176E0	4.33922E-3	9.39131E-2	2.72528E1	-3.26765E1	-3.26362E1	2.68136E1	1.20122E-7	2.52318E-3	2.52318E-3	6.27461E-3	3.01871E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16393E-1	-7.98368E-1	-9.13157E0	-9.14202E0	4.36306E-3	9.39846E-2	2.73352E1	-3.26642E1	-3.26353E1	2.68065E1	1.20017E-7	2.52099E-3	2.52099E-3	6.34588E-3	3.01871E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16035E-1	-7.98345E-1	-9.13165E0	-9.1418E0	4.1008E-3	9.4223E-2	2.72945E1	-3.26679E1	-3.26449E1	2.67978E1	1.20042E-7	2.51814E-3	2.51814E-3	6.31798E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.16202E-1	-7.9844E-1	-9.13143E0	-9.1419E0	4.29153E-3	9.41515E-2	2.73235E1	-3.26364E1	-3.26468E1	2.681E1	1.20106E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16107E-1	-7.98178E-1	-9.13167E0	-9.1418E0	4.60148E-3	9.41515E-2	2.72089E1	-3.26762E1	-3.26107E1	2.67872E1	1.20017E-7	2.52483E-3	2.52483E-3	6.30466E-3	3.01478E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16202E-1	-7.98059E-1	-9.13181E0	-9.14173E0	4.81606E-3	9.41038E-2	2.7406E1	-3.2626E1	-3.26362E1	2.67884E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.1594E-1	-7.98297E-1	-9.13153E0	-9.1418E0	4.79221E-3	9.39369E-2	2.71423E1	-3.26855E1	-3.26044E1	2.68268E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16035E-1	-7.98583E-1	-9.13174E0	-9.14195E0	4.45843E-3	9.41038E-2	2.72576E1	-3.26813E1	-3.26164E1	2.68094E1	1.19965E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16107E-1	-7.98368E-1	-9.13165E0	-9.14187E0	4.50611E-3	9.377E-2	2.74036E1	-3.26771E1	-3.26338E1	2.68004E1	1.20017E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09356E0	-8.16131E-1	-7.98202E-1	-9.13179E0	-9.14209E0	4.86374E-3	9.39131E-2	2.71883E1	-3.26638E1	-3.26119E1	2.67902E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16107E-1	-7.98368E-1	-9.13179E0	-9.14176E0	4.29153E-3	9.39608E-2	2.73186E1	-3.26389E1	-3.26358E1	2.67824E1	1.20004E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.9943E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.15964E-1	-7.98368E-1	-9.13146E0	-9.14178E0	4.07696E-3	9.41515E-2	2.73111E1	-3.26657E1	-3.2584E1	2.68196E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.16035E-1	-7.98273E-1	-9.13105E0	-9.14168E0	4.26769E-3	9.39131E-2	2.72324E1	-3.26723E1	-3.25972E1	2.68154E1	1.2035E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.98819E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16083E-1	-7.98321E-1	-9.13157E0	-9.14202E0	4.62532E-3	9.40323E-2	2.73134E1	-3.26219E1	-3.26413E1	2.68028E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.97704E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.15964E-1	-7.98345E-1	-9.13136E0	-9.14183E0	4.36306E-3	9.41038E-2	2.73099E1	-3.26554E1	-3.26585E1	2.67908E1	1.19851E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.9943E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16083E-1	-7.98178E-1	-9.13157E0	-9.14197E0	4.673E-3	9.39846E-2	2.73653E1	-3.26649E1	-3.26284E1	2.68004E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16202E-1	-7.98035E-1	-9.13141E0	-9.14199E0	4.69685E-3	9.41992E-2	2.73122E1	-3.27051E1	-3.25894E1	2.68064E1	1.19953E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.01738E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-8.15964E-1	-7.9813E-1	-9.13146E0	-9.14185E0	4.22001E-3	9.4223E-2	2.73958E1	-3.27089E1	-3.26152E1	2.6816E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.03027E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.16154E-1	-7.98225E-1	-9.13155E0	-9.1419E0	4.1008E-3	9.39131E-2	2.7292E1	-3.26545E1	-3.26078E1	2.68099E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
