[Scan]
initial_time=2016-01-28T22:56:47
final_time=2016-01-28T22:57:06
ip_count=19
run=1026
dataset=10
scan=778
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.15964E-1
ql1_imon=1.39167E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=2.0106E-9
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=3.2568E-10
ql4_vset=
ql4_vmon=-9.14142E0
ql4_imon=-2.177E-10
mult1=-9.87283E-9
mult2=-2.70264E-9
rf_tmon=-4.84889E-3
rf_agc=3.34838E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=1.71055E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60781E0
bslens_imon=2.66714E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05199E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53394E1
cs_ef1b_imon=3.18056E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.0222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=1.08396E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42742E0
lens1_imon=2.99276E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0349E1
cs_ea2_imon=1.40747E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84172E1
cs_ef1a_imon=3.04181E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.1547E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=4.30464E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15176E1
os_ea1_imon=2.46292E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63509E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22732E0
cs_ionrep_imon=9.5796E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93519E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=1.96062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.13727E-8
tplens_vset=1.4E-1
tplens_vmon=1.62197E0
tplens_imon=-1.07759E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2644E1
iondef3_imon=1.51577E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26356E1
iondef2_imon=1.59045E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02897E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.40561E-2
ql6_imon=4.01335E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27923E0
ionrepsh_imon=8.56025E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33663E1
lens5b_imon=2.1964E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.15209E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49101E0
os_ea2_imon=-5.04173E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00499E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.18957E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07258E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10638E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=3.37625E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23024E2
cs_ionfoca_imon=6.30565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02007E1
cs_anode2_imon=2.08495E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72186E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.03375E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.25489E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11452E0
cs_ionaccel_imon=-8.7158E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02002E2
cs_ionfocb_imon=1.4745E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=1.90914E-1
window_imon=-8.46352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86867E1
mask2_imon=-4.57124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.93024E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.64189E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.07724E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4971E0
defgridb_imon=6.11098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33093E1
os_fil1_imon=9.42288E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07918E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60743E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31343E1
cs_fil1_imon=8.37418E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.89676E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61228E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92705E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57428E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.3296E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21101E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.25965E-1
res40_imon=-2.33479E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.15964E-1	-7.98607E-1	-9.13184E0	-9.14187E0	4.72069E-3	9.4223E-2	2.73135E1	-3.26837E1	-3.2638E1	2.68058E1	1.19902E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.02253E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.15845E-1	-7.98321E-1	-9.132E0	-9.14202E0	4.62532E-3	9.408E-2	2.72935E1	-3.26548E1	-3.26364E1	2.68016E1	1.19757E-7	2.52099E-3	2.52099E-3	6.3514E-3	2.9926E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16011E-1	-7.98774E-1	-9.13198E0	-9.1419E0	4.22001E-3	9.38654E-2	2.72784E1	-3.26654E1	-3.26417E1	2.68088E1	1.19861E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9926E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.15916E-1	-7.98798E-1	-9.13196E0	-9.14187E0	4.31538E-3	9.38892E-2	2.72997E1	-3.27203E1	-3.26098E1	2.68298E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.98665E-1
5.0E0	2.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16011E-1	-7.98821E-1	-9.1316E0	-9.14178E0	4.41074E-3	9.4223E-2	2.73134E1	-3.26921E1	-3.26372E1	2.68094E1	1.20158E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.1594E-1	-7.98774E-1	-9.13181E0	-9.14195E0	4.48227E-3	9.42945E-2	2.72812E1	-3.2678E1	-3.26278E1	2.68046E1	1.20174E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.15749E-1	-7.98631E-1	-9.13184E0	-9.14176E0	4.48227E-3	9.42707E-2	2.73181E1	-3.26514E1	-3.26071E1	2.67908E1	1.19766E-7	2.52362E-3	2.52362E-3	6.32418E-3	3.00144E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.15749E-1	-7.98631E-1	-9.1316E0	-9.14204E0	4.07696E-3	9.39846E-2	2.73502E1	-3.26404E1	-3.26182E1	2.67986E1	1.2026E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.0148E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.15892E-1	-7.98583E-1	-9.1316E0	-9.1419E0	4.43459E-3	9.40084E-2	2.73039E1	-3.26395E1	-3.26181E1	2.67836E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09665E0	-8.15988E-1	-7.98607E-1	-9.13134E0	-9.14183E0	4.52995E-3	9.40323E-2	2.72638E1	-3.26543E1	-3.26431E1	2.68136E1	1.19965E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.9926E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.16154E-1	-7.98512E-1	-9.13169E0	-9.14187E0	4.19617E-3	9.408E-2	2.72847E1	-3.26549E1	-3.262E1	2.67896E1	1.19705E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16274E-1	-7.98607E-1	-9.13179E0	-9.14204E0	4.19617E-3	9.408E-2	2.73552E1	-3.26555E1	-3.25977E1	2.68076E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.16083E-1	-7.98416E-1	-9.13172E0	-9.14195E0	4.24385E-3	9.42707E-2	2.71821E1	-3.26659E1	-3.26363E1	2.68007E1	1.20158E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.02511E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16083E-1	-7.9844E-1	-9.1316E0	-9.14209E0	4.17233E-3	9.42707E-2	2.73512E1	-3.26357E1	-3.2602E1	2.68157E1	1.19831E-7	2.51265E-3	2.51265E-3	6.29703E-3	3.03976E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16107E-1	-7.9875E-1	-9.13157E0	-9.14156E0	4.19617E-3	9.41515E-2	2.72012E1	-3.26681E1	-3.26098E1	2.6787E1	1.19895E-7	2.5118E-3	2.5118E-3	6.31321E-3	3.01748E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.16035E-1	-7.98512E-1	-9.13174E0	-9.14168E0	4.26769E-3	9.41992E-2	2.73342E1	-3.26579E1	-3.26383E1	2.67914E1	1.19972E-7	2.51671E-3	2.51671E-3	6.32609E-3	3.00909E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16154E-1	-7.98821E-1	-9.13143E0	-9.1419E0	4.22001E-3	9.39131E-2	2.72402E1	-3.26772E1	-3.26271E1	2.68015E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.16083E-1	-7.98535E-1	-9.1316E0	-9.14176E0	4.17233E-3	9.42469E-2	2.73436E1	-3.26605E1	-3.25936E1	2.68001E1	1.20226E-7	2.52301E-3	2.52301E-3	6.3126E-3	3.00494E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16274E-1	-7.98726E-1	-9.13165E0	-9.14147E0	4.05312E-3	9.41992E-2	2.7308E1	-3.26697E1	-3.2626E1	2.68118E1	1.20149E-7	2.51709E-3	2.51709E-3	6.31344E-3	2.99738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.15964E-1	-7.98464E-1	-9.13157E0	-9.14142E0	4.24385E-3	9.40561E-2	2.72186E1	-3.26356E1	-3.2644E1	2.68196E1	1.19965E-7	2.51225E-3	2.51225E-3	6.34037E-3	3.00563E-1
