[Scan]
initial_time=2016-01-28T22:57:40
final_time=2016-01-28T22:58:00
ip_count=19
run=1026
dataset=10
scan=780
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0965E0
qbias_imon=-1.08775E-4
ql1_vset=
ql1_vmon=-8.1594E-1
ql1_imon=1.38402E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=2.01446E-9
ql3_vset=
ql3_vmon=-9.13162E0
ql3_imon=2.39193E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-1.91259E-10
mult1=-1.02441E-8
mult2=-2.77029E-9
rf_tmon=-3.48895E-3
rf_agc=3.45656E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=1.77157E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.6282E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19978E1
lens5a_imon=1.99678E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.18756E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=1.0875E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41621E0
lens1_imon=2.83703E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6491E1
os_ef1alow_imon=2.98356E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03785E1
cs_ea2_imon=1.38729E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8429E1
cs_ef1a_imon=3.03778E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.15633E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.31563E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=2.47177E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.09199E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=9.5796E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01647E1
cs_anode1_imon=1.95454E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.13591E-8
tplens_vset=1.4E-1
tplens_vmon=1.64025E0
tplens_imon=-2.35178E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26419E1
iondef3_imon=1.50551E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26502E1
iondef2_imon=1.58054E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02897E2
lens6_imon=2.98339E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=3.98368E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27746E0
ionrepsh_imon=8.60627E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33545E1
lens5b_imon=2.201E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74768E1
cs_ef2b_imon=3.13821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46682E0
os_ea2_imon=-6.91762E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00495E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71148E1
cs_ef2a_imon=3.19694E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09221E0
os_ef2alow_imon=-2.55721E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01285E-1
os_ef2bup_imon=-5.1845E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10851E1
os_restr2_imon=3.37557E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.31025E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01966E1
cs_anode2_imon=2.09703E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72921E1
iondef1_imon=1.09423E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68226E1
iondef4_imon=1.09268E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=6.02049E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.23999E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11856E0
cs_ionaccel_imon=-9.72491E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02011E2
cs_ionfocb_imon=1.47567E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.74344E-6
window_vset=0.0E0
window_vmon=3.25998E-1
window_imon=-9.16887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39261E-4
mask2_vset=0.0E0
mask2_vmon=-1.86802E1
mask2_imon=-4.37302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.74619E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.70206E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.54444E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34945E0
defgridb_imon=6.22424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.331E1
os_fil1_imon=9.42241E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07833E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60661E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31373E1
cs_fil1_imon=7.00939E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.73168E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61129E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.12966E-2
os_fil2_imon=-2.53018E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13246E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.58314E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29028E-1
cs_fil2_imon=-2.08418E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.70384E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21127E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.31028E-1
res40_imon=-2.34869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.15892E-1	-7.9875E-1	-9.1315E0	-9.14149E0	4.31538E-3	9.38654E-2	2.73183E1	-3.26404E1	-3.26368E1	2.68016E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99175E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.15678E-1	-7.98297E-1	-9.1315E0	-9.14183E0	4.36306E-3	9.3627E-2	2.72733E1	-3.26609E1	-3.2596E1	2.68094E1	1.20226E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.98222E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16107E-1	-7.98488E-1	-9.13177E0	-9.14192E0	4.64916E-3	9.36985E-2	2.73086E1	-3.26585E1	-3.26428E1	2.67836E1	1.19965E-7	2.52538E-3	2.52538E-3	6.29645E-3	2.99E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.1625E-1	-7.98297E-1	-9.13169E0	-9.14195E0	4.31538E-3	9.37939E-2	2.72681E1	-3.26596E1	-3.2638E1	2.67998E1	1.20414E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16011E-1	-7.98416E-1	-9.1315E0	-9.14204E0	4.33922E-3	9.40323E-2	2.73344E1	-3.26659E1	-3.26204E1	2.68094E1	1.1988E-7	2.51575E-3	2.51575E-3	6.3282E-3	3.0223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16178E-1	-7.98392E-1	-9.13157E0	-9.1418E0	4.14848E-3	9.38892E-2	2.73802E1	-3.26783E1	-3.26092E1	2.67992E1	1.20208E-7	2.51045E-3	2.51045E-3	6.30171E-3	2.99981E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16154E-1	-7.98416E-1	-9.13188E0	-9.14171E0	4.41074E-3	9.41515E-2	2.73291E1	-3.26801E1	-3.26188E1	2.68226E1	1.19965E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.15988E-1	-7.9844E-1	-9.13181E0	-9.14209E0	4.52995E-3	9.41992E-2	2.72035E1	-3.26731E1	-3.26144E1	2.67751E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.98481E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09665E0	-8.16131E-1	-7.98607E-1	-9.13169E0	-9.14192E0	4.12464E-3	9.41753E-2	2.7311E1	-3.26773E1	-3.25859E1	2.68169E1	1.2033E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.15964E-1	-7.98416E-1	-9.13174E0	-9.14192E0	4.22001E-3	9.42945E-2	2.72787E1	-3.26332E1	-3.2611E1	2.68136E1	1.19965E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0968E0	-8.16202E-1	-7.98345E-1	-9.13181E0	-9.14176E0	4.36306E-3	9.408E-2	2.73363E1	-3.26597E1	-3.26296E1	2.68184E1	1.198E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09657E0	-8.16131E-1	-7.98297E-1	-9.13188E0	-9.14176E0	4.19617E-3	9.43184E-2	2.73151E1	-3.26555E1	-3.26349E1	2.6783E1	1.19965E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00041E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.15916E-1	-7.98297E-1	-9.13186E0	-9.14185E0	4.50611E-3	9.4223E-2	2.73369E1	-3.26951E1	-3.2635E1	2.68016E1	1.19861E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09665E0	-8.15701E-1	-7.98273E-1	-9.13205E0	-9.14197E0	4.07696E-3	9.41038E-2	2.72847E1	-3.26789E1	-3.26182E1	2.68018E1	1.20055E-7	2.52492E-3	2.52492E-3	6.34518E-3	2.9943E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0965E0	-8.15868E-1	-7.98225E-1	-9.13181E0	-9.1419E0	3.93391E-3	9.42469E-2	2.7324E1	-3.26844E1	-3.26178E1	2.67938E1	1.19705E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.02133E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.15916E-1	-7.9844E-1	-9.13188E0	-9.14176E0	4.26769E-3	9.39846E-2	2.72757E1	-3.27041E1	-3.259E1	2.68022E1	1.20017E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.02659E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.15988E-1	-7.98678E-1	-9.13141E0	-9.1419E0	4.48227E-3	9.40084E-2	2.72992E1	-3.26868E1	-3.26042E1	2.6804E1	1.20209E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.99941E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.15916E-1	-7.98392E-1	-9.13181E0	-9.1418E0	4.19617E-3	9.40084E-2	2.72805E1	-3.26741E1	-3.26573E1	2.67992E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.98481E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-8.15845E-1	-7.98345E-1	-9.13157E0	-9.14161E0	4.02927E-3	9.39608E-2	2.72874E1	-3.26408E1	-3.2603E1	2.67827E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9892E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0965E0	-8.1594E-1	-7.98321E-1	-9.13162E0	-9.14185E0	4.24385E-3	9.40084E-2	2.72921E1	-3.26502E1	-3.26419E1	2.68226E1	1.20226E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.9926E-1
