[Scan]
initial_time=2016-01-28T23:00:10
final_time=2016-01-28T23:00:32
ip_count=19
run=1026
dataset=10
scan=785
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-8.16083E-1
ql1_imon=1.38742E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=2.01404E-9
ql3_vset=
ql3_vmon=-9.13193E0
ql3_imon=3.1116E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-1.86133E-10
mult1=-9.65304E-9
mult2=-2.88004E-9
rf_tmon=-5.03449E-3
rf_agc=3.24243E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.69503E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.65652E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19948E1
lens5a_imon=1.99324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.0521E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53684E1
cs_ef1b_imon=3.17505E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02255E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05271E1
cs_ea1_imon=1.09847E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42388E0
lens1_imon=2.69191E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64649E1
os_ef1alow_imon=2.99121E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03867E1
cs_ea2_imon=1.40109E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.0409E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.15816E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11326E1
os_restr1_imon=4.30937E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.45017E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63612E1
os_ef1bup_imon=3.09581E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21375E0
cs_ionrep_imon=9.39555E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01954E1
cs_anode1_imon=1.95975E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.13719E-8
tplens_vset=1.4E-1
tplens_vmon=1.67329E0
tplens_imon=-2.91808E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26231E1
iondef3_imon=1.51294E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26773E1
iondef2_imon=1.58267E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.98537E-4
ql6_vset=1.0E-1
ql6_vmon=9.43184E-2
ql6_imon=3.96652E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26979E0
ionrepsh_imon=8.493E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.17127E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74362E1
cs_ef2b_imon=3.13196E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46977E0
os_ea2_imon=-6.59907E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00499E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71478E1
cs_ef2a_imon=3.20667E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06383E0
os_ef2alow_imon=-2.57458E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85647E-1
os_ef2bup_imon=-5.16712E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1084E1
os_restr2_imon=3.3641E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.30848E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01832E1
cs_anode2_imon=2.1012E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73228E1
iondef1_imon=1.09423E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.0965E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.04073E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.25193E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13188E0
cs_ionaccel_imon=-8.9951E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0212E2
cs_ionfocb_imon=1.47483E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56376E1
einzel_imon=7.58706E-6
window_vset=0.0E0
window_vmon=2.10156E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-4.65104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.5586E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.57818E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.06662E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4026E0
defgridb_imon=6.21716E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33086E1
os_fil1_imon=9.42924E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08314E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60768E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31399E1
cs_fil1_imon=8.51534E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.64479E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6121E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00303E-2
os_fil2_imon=-2.46067E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08612E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.5439E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30775E-1
cs_fil2_imon=-2.22899E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28102E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21129E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.99172E-1
res40_imon=-2.4182E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.15749E-1	-7.98249E-1	-9.13153E0	-9.14152E0	4.52995E-3	9.38177E-2	2.73099E1	-3.26873E1	-3.26104E1	2.67788E1	1.19851E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.03286E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.15988E-1	-7.98202E-1	-9.13186E0	-9.14154E0	4.50611E-3	9.41277E-2	2.73261E1	-3.26573E1	-3.26458E1	2.67986E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.97901E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.16154E-1	-7.98202E-1	-9.13153E0	-9.14195E0	4.26769E-3	9.40084E-2	2.72928E1	-3.26719E1	-3.26182E1	2.67897E1	1.19978E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.98026E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.1594E-1	-7.9813E-1	-9.13117E0	-9.1419E0	4.48227E-3	9.41277E-2	2.73267E1	-3.26292E1	-3.26648E1	2.67701E1	1.20051E-7	2.52023E-3	2.52023E-3	6.31242E-3	2.99577E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-8.15916E-1	-7.98345E-1	-9.13129E0	-9.14173E0	4.673E-3	9.41277E-2	2.73452E1	-3.2649E1	-3.26431E1	2.68154E1	1.19619E-7	2.51065E-3	2.51065E-3	6.3074E-3	3.00363E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.15868E-1	-7.98225E-1	-9.13126E0	-9.14185E0	4.673E-3	9.39608E-2	2.72886E1	-3.26402E1	-3.26306E1	2.67914E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.15988E-1	-7.9813E-1	-9.13136E0	-9.14171E0	4.52995E-3	9.40561E-2	2.73E1	-3.26725E1	-3.2626E1	2.68126E1	1.20113E-7	2.5165E-3	2.5165E-3	6.3023E-3	3.01853E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16154E-1	-7.98082E-1	-9.13148E0	-9.14173E0	4.36306E-3	9.39608E-2	2.7248E1	-3.26567E1	-3.26428E1	2.68244E1	1.19851E-7	2.51557E-3	2.51557E-3	6.34301E-3	3.01043E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16274E-1	-7.98392E-1	-9.13153E0	-9.14192E0	4.43459E-3	9.40323E-2	2.72823E1	-3.26554E1	-3.26026E1	2.68058E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09642E0	-8.16274E-1	-7.98249E-1	-9.13157E0	-9.14195E0	4.07696E-3	9.39369E-2	2.72534E1	-3.26398E1	-3.26669E1	2.67854E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.16274E-1	-7.98345E-1	-9.1315E0	-9.14223E0	4.64916E-3	9.39131E-2	2.74211E1	-3.26194E1	-3.26032E1	2.68034E1	1.20226E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.16107E-1	-7.98321E-1	-9.13162E0	-9.14214E0	4.24385E-3	9.39608E-2	2.72443E1	-3.26349E1	-3.26284E1	2.67806E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16345E-1	-7.98464E-1	-9.1316E0	-9.14204E0	4.50611E-3	9.41515E-2	2.73448E1	-3.27173E1	-3.26188E1	2.6807E1	1.20278E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16107E-1	-7.98273E-1	-9.1316E0	-9.14199E0	4.69685E-3	9.44614E-2	2.7301E1	-3.26862E1	-3.26419E1	2.6803E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00966E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16059E-1	-7.98512E-1	-9.1316E0	-9.14183E0	4.33922E-3	9.43661E-2	2.73219E1	-3.26729E1	-3.26398E1	2.67944E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.1594E-1	-7.98202E-1	-9.1316E0	-9.14164E0	4.33922E-3	9.41038E-2	2.73105E1	-3.26639E1	-3.26344E1	2.67818E1	1.19697E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.16274E-1	-7.98368E-1	-9.13172E0	-9.14173E0	4.36306E-3	9.41038E-2	2.72783E1	-3.2671E1	-3.26311E1	2.67792E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.16321E-1	-7.98321E-1	-9.13172E0	-9.14187E0	4.17233E-3	9.41753E-2	2.72447E1	-3.26235E1	-3.26693E1	2.68013E1	1.1993E-7	2.51679E-3	2.51679E-3	6.33341E-3	3.00494E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.15988E-1	-7.98416E-1	-9.13167E0	-9.14176E0	4.05312E-3	9.40323E-2	2.72927E1	-3.26803E1	-3.26467E1	2.68004E1	1.19895E-7	2.52222E-3	2.52222E-3	6.32483E-3	3.00363E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16083E-1	-7.98297E-1	-9.13193E0	-9.14192E0	4.31538E-3	9.43184E-2	2.73228E1	-3.26773E1	-3.26231E1	2.67926E1	1.20158E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.01223E-1
