[Scan]
initial_time=2016-01-28T23:01:41
final_time=2016-01-28T23:02:03
ip_count=19
run=1026
dataset=10
scan=788
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08826E-4
ql1_vset=
ql1_vmon=-8.15892E-1
ql1_imon=1.38889E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=2.04041E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=2.58255E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-2.1075E-10
mult1=-9.30693E-9
mult2=-2.85634E-9
rf_tmon=-4.55448E-3
rf_agc=3.33336E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=1.72129E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.41584E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19789E1
lens5a_imon=2.04774E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.04654E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=3.18344E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04571E2
lens23_imon=1.02309E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=1.09741E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40146E0
lens1_imon=2.6459E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6447E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04103E1
cs_ea2_imon=1.39225E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=3.04577E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.15136E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=4.30355E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.43673E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2639E0
cs_ionrep_imon=9.49112E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91857E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=1.96314E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.13504E-8
tplens_vset=1.4E-1
tplens_vmon=1.65736E0
tplens_imon=-2.52875E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26002E1
iondef3_imon=1.53488E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2653E1
iondef2_imon=1.577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02881E2
lens6_imon=2.98441E-4
ql6_vset=1.0E-1
ql6_vmon=9.41038E-2
ql6_imon=3.99104E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29457E0
ionrepsh_imon=8.35851E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33663E1
lens5b_imon=2.19675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53938E0
os_ea2_imon=-6.74064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06006E2
lens4b_imon=2.0074E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71348E1
cs_ef2a_imon=3.19209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07919E0
os_ef2alow_imon=-2.42849E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11239E-1
os_ef2bup_imon=-5.16751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=3.37049E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.31202E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.10225E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73381E1
iondef1_imon=1.08644E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68244E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.01315E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.21298E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11693E0
cs_ionaccel_imon=-9.65283E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02142E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=2.23349E-1
window_imon=-9.29243E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.87053E1
mask2_imon=-5.00371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.2259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.60296E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.08786E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26086E0
defgridb_imon=5.96941E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33093E1
os_fil1_imon=9.42961E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0793E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6025E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31431E1
cs_fil1_imon=7.03471E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.2091E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61074E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06635E-2
os_fil2_imon=-2.46174E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.25345E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.81853E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28228E-1
cs_fil2_imon=-1.95719E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2122E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.19959E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09688E0	-8.15558E-1	-7.9813E-1	-9.13191E0	-9.14192E0	4.50611E-3	9.37939E-2	2.72883E1	-3.26693E1	-3.26398E1	2.68036E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.9892E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.0968E0	-8.15678E-1	-7.97939E-1	-9.13186E0	-9.14209E0	4.64916E-3	9.38177E-2	2.72811E1	-3.26524E1	-3.26254E1	2.6802E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9978E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.15749E-1	-7.98202E-1	-9.13177E0	-9.14221E0	4.91142E-3	9.38177E-2	2.73269E1	-3.26543E1	-3.26366E1	2.68186E1	1.19965E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.98481E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.15773E-1	-7.98225E-1	-9.13174E0	-9.1419E0	4.62532E-3	9.3627E-2	2.72957E1	-3.26508E1	-3.26449E1	2.68689E1	1.20209E-7	2.52169E-3	2.52169E-3	6.29128E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.15535E-1	-7.98202E-1	-9.1316E0	-9.14185E0	4.64916E-3	9.38177E-2	2.72927E1	-3.2675E1	-3.26526E1	2.68175E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.15678E-1	-7.98106E-1	-9.13196E0	-9.14202E0	4.57764E-3	9.35555E-2	2.72849E1	-3.26768E1	-3.25991E1	2.67939E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.1563E-1	-7.98416E-1	-9.13203E0	-9.14187E0	4.72069E-3	9.37939E-2	2.72768E1	-3.26602E1	-3.2603E1	2.68597E1	1.19835E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.15892E-1	-7.98416E-1	-9.13191E0	-9.1419E0	4.76837E-3	9.37223E-2	2.72901E1	-3.26837E1	-3.26092E1	2.68352E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.15916E-1	-7.98202E-1	-9.1315E0	-9.14176E0	4.673E-3	9.39131E-2	2.7379E1	-3.26705E1	-3.25888E1	2.6789E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.97445E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16011E-1	-7.98345E-1	-9.13162E0	-9.14171E0	4.79221E-3	9.41277E-2	2.73045E1	-3.26609E1	-3.26386E1	2.68238E1	1.19965E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.98222E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.15868E-1	-7.98178E-1	-9.13165E0	-9.14159E0	4.86374E-3	9.40323E-2	2.73081E1	-3.26783E1	-3.26248E1	2.6795E1	1.20122E-7	2.52538E-3	2.52538E-3	6.34037E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.15487E-1	-7.97892E-1	-9.13141E0	-9.14183E0	4.62532E-3	9.40323E-2	2.72522E1	-3.26488E1	-3.26062E1	2.68016E1	1.20122E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.15916E-1	-7.9813E-1	-9.13174E0	-9.14176E0	4.64916E-3	9.38654E-2	2.72485E1	-3.26543E1	-3.26526E1	2.67878E1	1.2033E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.15916E-1	-7.98202E-1	-9.13153E0	-9.14166E0	4.52995E-3	9.39369E-2	2.73225E1	-3.2638E1	-3.26422E1	2.68046E1	1.19953E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.01223E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16035E-1	-7.98035E-1	-9.13188E0	-9.14161E0	4.29153E-3	9.36747E-2	2.73027E1	-3.26723E1	-3.26116E1	2.68112E1	1.20137E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.00676E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09634E0	-8.15988E-1	-7.9813E-1	-9.13181E0	-9.1418E0	4.24385E-3	9.39846E-2	2.74096E1	-3.26657E1	-3.25972E1	2.67943E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00966E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.15988E-1	-7.98464E-1	-9.13169E0	-9.14164E0	4.60148E-3	9.37462E-2	2.73008E1	-3.26707E1	-3.26505E1	2.68244E1	1.19965E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.00302E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.15868E-1	-7.98225E-1	-9.13172E0	-9.14159E0	4.29153E-3	9.377E-2	2.72605E1	-3.26758E1	-3.2633E1	2.67897E1	1.19861E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.16178E-1	-7.98416E-1	-9.13172E0	-9.14209E0	4.43459E-3	9.37462E-2	2.72962E1	-3.26502E1	-3.26083E1	2.67974E1	1.19851E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.15892E-1	-7.98321E-1	-9.13136E0	-9.1419E0	4.24385E-3	9.41038E-2	2.73381E1	-3.2653E1	-3.26002E1	2.68244E1	1.19953E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.01738E-1
