[Scan]
initial_time=2016-01-28T23:03:11
final_time=2016-01-28T23:03:33
ip_count=19
run=1026
dataset=10
scan=791
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08782E-4
ql1_vset=
ql1_vmon=-8.15892E-1
ql1_imon=1.38726E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=2.03892E-9
ql3_vset=
ql3_vmon=-9.13186E0
ql3_imon=3.20125E-10
ql4_vset=
ql4_vmon=-9.14161E0
ql4_imon=-2.14767E-10
mult1=-1.03217E-8
mult2=-2.80124E-9
rf_tmon=-4.68077E-3
rf_agc=3.27407E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.73782E-9
bslens_vset=-6.2E0
bslens_vmon=-6.635E0
bslens_imon=2.55552E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20048E1
lens5a_imon=2.00895E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.04996E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.17991E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02184E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05005E1
cs_ea1_imon=1.08289E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39052E0
lens1_imon=2.72933E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64794E1
os_ef1alow_imon=2.97348E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0402E1
cs_ea2_imon=1.42043E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84365E1
cs_ef1a_imon=3.03083E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.14415E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11251E1
os_restr1_imon=4.31493E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15143E1
os_ea1_imon=2.46329E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63618E1
os_ef1bup_imon=3.08782E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22255E0
cs_ionrep_imon=9.61917E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01832E1
cs_anode1_imon=1.95871E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.11087E-8
tplens_vset=1.4E-1
tplens_vmon=1.67851E0
tplens_imon=-5.51104E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26193E1
iondef3_imon=1.48856E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26652E1
iondef2_imon=1.59146E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.41277E-2
ql6_imon=3.99883E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28744E0
ionrepsh_imon=8.73969E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33484E1
lens5b_imon=2.1765E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74785E1
cs_ef2b_imon=3.13126E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47863E0
os_ea2_imon=-7.15589E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06067E2
lens4b_imon=2.00585E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71287E1
cs_ef2a_imon=3.19104E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08642E0
os_ef2alow_imon=-2.49465E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96072E-1
os_ef2bup_imon=-5.29571E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10666E1
os_restr2_imon=3.36098E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.29685E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01873E1
cs_anode2_imon=2.09008E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73167E1
iondef1_imon=1.09957E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6796E1
iondef4_imon=1.10067E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.95995E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.19263E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13188E0
cs_ionaccel_imon=-9.34263E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47344E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56318E1
einzel_imon=7.85118E-6
window_vset=0.0E0
window_vmon=2.35641E-1
window_imon=-9.37738E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39317E-4
mask2_vset=0.0E0
mask2_vmon=-1.8668E1
mask2_imon=-5.72837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.33878E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.52535E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.55083E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.66172E0
defgridb_imon=6.21596E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33116E1
os_fil1_imon=9.422E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07793E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60501E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31533E1
cs_fil1_imon=7.53068E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.67375E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61034E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.94152E-2
os_fil2_imon=-2.48963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0282E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.65945E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29777E-1
cs_fil2_imon=-2.56493E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06092E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21479E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40072E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.55355E-1
res40_imon=-2.4599E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=971
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.16274E-1	-7.9813E-1	-9.13167E0	-9.14183E0	4.81606E-3	9.38892E-2	2.72706E1	-3.26895E1	-3.26057E1	2.68004E1	1.20092E-7	2.52025E-3	2.52025E-3	6.30212E-3	2.99845E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.16083E-1	-7.98035E-1	-9.13167E0	-9.14185E0	4.48227E-3	9.38654E-2	2.74158E1	-3.26861E1	-3.26069E1	2.68149E1	1.2005E-7	2.51498E-3	2.51498E-3	6.30124E-3	3.02199E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16345E-1	-7.98416E-1	-9.13188E0	-9.14187E0	4.41074E-3	9.377E-2	2.7264E1	-3.2626E1	-3.2637E1	2.68226E1	1.19702E-7	2.51758E-3	2.51758E-3	6.34231E-3	2.99535E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.15964E-1	-7.98106E-1	-9.13169E0	-9.14178E0	4.673E-3	9.38654E-2	2.72636E1	-3.26579E1	-3.26218E1	2.68046E1	1.20158E-7	2.51954E-3	2.51954E-3	6.29934E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16226E-1	-7.97868E-1	-9.13186E0	-9.1418E0	4.86374E-3	9.38654E-2	2.72612E1	-3.26837E1	-3.2584E1	2.6801E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.1656E-1	-7.97963E-1	-9.13184E0	-9.14195E0	4.62532E-3	9.37223E-2	2.73364E1	-3.26555E1	-3.26278E1	2.68227E1	1.19757E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.16083E-1	-7.97796E-1	-9.13205E0	-9.14199E0	4.673E-3	9.36031E-2	2.72895E1	-3.26729E1	-3.26579E1	2.68538E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.02769E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.15988E-1	-7.98202E-1	-9.13184E0	-9.14211E0	4.45843E-3	9.37939E-2	2.72477E1	-3.26684E1	-3.26391E1	2.68157E1	1.19913E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16154E-1	-7.98416E-1	-9.13177E0	-9.14185E0	4.62532E-3	9.38892E-2	2.73357E1	-3.26488E1	-3.26026E1	2.68238E1	1.20045E-7	2.51838E-3	2.51838E-3	6.3131E-3	3.00251E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.15821E-1	-7.98702E-1	-9.13188E0	-9.14207E0	4.62532E-3	9.39608E-2	2.73263E1	-3.2675E1	-3.26183E1	2.67764E1	1.19965E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.99E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09619E0	-8.15558E-1	-7.98726E-1	-9.13198E0	-9.14183E0	4.43459E-3	9.38892E-2	2.72802E1	-3.26729E1	-3.26185E1	2.683E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.98665E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.15511E-1	-7.98392E-1	-9.13193E0	-9.14149E0	4.74453E-3	9.38654E-2	2.73625E1	-3.26503E1	-3.25826E1	2.67902E1	1.20078E-7	2.51679E-3	2.51679E-3	6.29185E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.15797E-1	-7.98082E-1	-9.13191E0	-9.14209E0	4.52995E-3	9.37223E-2	2.73194E1	-3.27E1	-3.26117E1	2.68157E1	1.2026E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.9841E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.15797E-1	-7.98297E-1	-9.13196E0	-9.14176E0	4.74453E-3	9.41753E-2	2.72827E1	-3.26549E1	-3.26337E1	2.6783E1	1.19785E-7	2.51642E-3	2.51642E-3	6.31902E-3	3.01193E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.15845E-1	-7.9782E-1	-9.13179E0	-9.14197E0	4.88758E-3	9.41277E-2	2.72827E1	-3.26762E1	-3.26124E1	2.67607E1	1.20069E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.03185E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.15797E-1	-7.97939E-1	-9.13186E0	-9.14199E0	4.52995E-3	9.43661E-2	2.73393E1	-3.26717E1	-3.26446E1	2.68124E1	1.19941E-7	2.52236E-3	2.52236E-3	6.32328E-3	3.01862E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.15797E-1	-7.97701E-1	-9.13179E0	-9.14202E0	4.52995E-3	9.41277E-2	2.7311E1	-3.26649E1	-3.26172E1	2.6798E1	1.20244E-7	2.51915E-3	2.51915E-3	6.32978E-3	3.0041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09627E0	-8.15654E-1	-7.98082E-1	-9.13179E0	-9.14187E0	4.50611E-3	9.40084E-2	2.72794E1	-3.26291E1	-3.26248E1	2.67896E1	1.20106E-7	2.52492E-3	2.52492E-3	6.32356E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.15582E-1	-7.98488E-1	-9.13167E0	-9.14197E0	4.3869E-3	9.41277E-2	2.73231E1	-3.26556E1	-3.25924E1	2.67952E1	1.20122E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.15892E-1	-7.9844E-1	-9.13186E0	-9.14161E0	4.45843E-3	9.41277E-2	2.73167E1	-3.26652E1	-3.26193E1	2.6796E1	1.19953E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.9892E-1
