[Scan]
initial_time=2016-01-28T23:04:09
final_time=2016-01-28T23:04:30
ip_count=19
run=1026
dataset=10
scan=793
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=1.39092E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=2.01552E-9
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=2.52414E-10
ql4_vset=
ql4_vmon=-9.14164E0
ql4_imon=-2.14589E-10
mult1=-9.97222E-9
mult2=-2.57039E-9
rf_tmon=-5.00499E-3
rf_agc=3.32029E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.71188E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6421E0
bslens_imon=2.59904E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20229E1
lens5a_imon=1.98992E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12441E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=3.18056E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02276E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=1.08291E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38938E0
lens1_imon=2.62788E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64416E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03516E1
cs_ea2_imon=1.38645E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=3.04721E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.14638E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11616E1
os_restr1_imon=4.30175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.44775E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63443E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23648E0
cs_ionrep_imon=9.45926E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93503E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02097E1
cs_anode1_imon=1.96206E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.13271E-8
tplens_vset=1.4E-1
tplens_vmon=1.63843E0
tplens_imon=-1.04678E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2652E1
iondef2_imon=1.58112E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02889E2
lens6_imon=2.9844E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=4.00363E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30858E0
ionrepsh_imon=8.52198E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.17449E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74928E1
cs_ef2b_imon=3.15425E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48462E0
os_ea2_imon=-5.12038E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00695E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71384E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80605E-1
os_ef2bup_imon=-5.12066E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=3.38274E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.30829E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.11126E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7301E1
iondef1_imon=1.09914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67854E1
iondef4_imon=1.09927E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.98695E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.22887E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-9.47263E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56603E1
einzel_imon=7.84641E-6
window_vset=0.0E0
window_vmon=2.30557E-1
window_imon=-1.11305E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39383E-4
mask2_vset=0.0E0
mask2_vmon=-1.86915E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.47654E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.5753E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.5234E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35344E0
defgridb_imon=6.30493E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33153E1
os_fil1_imon=9.41789E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08296E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60634E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31514E1
cs_fil1_imon=8.36817E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.45227E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60948E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06681E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06123E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.50786E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21297E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.20559E-1
res40_imon=-2.36002E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=230
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.15654E-1	-7.98416E-1	-9.13131E0	-9.14207E0	4.8399E-3	9.38416E-2	2.72498E1	-3.26561E1	-3.26404E1	2.68208E1	1.19697E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.01738E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.15845E-1	-7.9813E-1	-9.13134E0	-9.14183E0	4.74453E-3	9.37939E-2	2.7318E1	-3.26419E1	-3.25936E1	2.68076E1	1.19925E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.0201E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16035E-1	-7.98225E-1	-9.13146E0	-9.14168E0	4.45843E-3	9.38654E-2	2.72986E1	-3.26714E1	-3.26402E1	2.68267E1	1.20084E-7	2.52473E-3	2.52473E-3	6.31858E-3	3.00144E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.15845E-1	-7.98321E-1	-9.13129E0	-9.14202E0	4.19617E-3	9.39131E-2	2.72892E1	-3.26954E1	-3.2638E1	2.68267E1	1.20042E-7	2.51603E-3	2.51603E-3	6.33919E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16011E-1	-7.98249E-1	-9.13117E0	-9.1418E0	4.48227E-3	9.37462E-2	2.72478E1	-3.26763E1	-3.26292E1	2.68127E1	1.19782E-7	2.51575E-3	2.51575E-3	6.3282E-3	3.00247E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.15845E-1	-7.98202E-1	-9.13162E0	-9.14173E0	4.45843E-3	9.35316E-2	2.72757E1	-3.26482E1	-3.26008E1	2.67902E1	1.19626E-7	2.51793E-3	2.51793E-3	6.30149E-3	3.01043E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.15845E-1	-7.98297E-1	-9.1315E0	-9.1418E0	4.36306E-3	9.38892E-2	2.73405E1	-3.26464E1	-3.26284E1	2.68028E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16011E-1	-7.97987E-1	-9.13146E0	-9.14185E0	4.43459E-3	9.377E-2	2.73183E1	-3.26488E1	-3.25912E1	2.6795E1	1.20017E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.1625E-1	-7.98178E-1	-9.13155E0	-9.14204E0	4.24385E-3	9.35078E-2	2.72618E1	-3.26579E1	-3.26182E1	2.68058E1	1.20069E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.15964E-1	-7.9844E-1	-9.1316E0	-9.14199E0	4.07696E-3	9.38177E-2	2.73177E1	-3.2635E1	-3.26356E1	2.6804E1	1.19809E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.01347E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16059E-1	-7.98321E-1	-9.13146E0	-9.1419E0	4.52995E-3	9.40323E-2	2.73063E1	-3.26372E1	-3.26231E1	2.6795E1	1.19861E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16274E-1	-7.98178E-1	-9.1315E0	-9.14221E0	4.673E-3	9.37939E-2	2.72543E1	-3.2694E1	-3.26144E1	2.68082E1	1.19749E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.02253E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16202E-1	-7.98416E-1	-9.13126E0	-9.1418E0	4.02927E-3	9.40084E-2	2.72949E1	-3.26807E1	-3.26777E1	2.681E1	1.19757E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16298E-1	-7.9782E-1	-9.13141E0	-9.14214E0	4.24385E-3	9.377E-2	2.729E1	-3.26503E1	-3.26196E1	2.67792E1	1.19913E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.99E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16393E-1	-7.98273E-1	-9.1315E0	-9.14197E0	4.60148E-3	9.38177E-2	2.731E1	-3.26542E1	-3.26291E1	2.67926E1	1.20004E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.9943E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.16107E-1	-7.98249E-1	-9.13162E0	-9.14226E0	4.57764E-3	9.38177E-2	2.73231E1	-3.26597E1	-3.26416E1	2.68196E1	1.20174E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00302E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.16083E-1	-7.98583E-1	-9.13134E0	-9.14218E0	4.62532E-3	9.39369E-2	2.72871E1	-3.26831E1	-3.26254E1	2.67764E1	1.19861E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.15845E-1	-7.98321E-1	-9.13155E0	-9.14166E0	4.8399E-3	9.41515E-2	2.72868E1	-3.26691E1	-3.26496E1	2.68082E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02922E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.1625E-1	-7.98368E-1	-9.13179E0	-9.1414E0	4.45843E-3	9.39846E-2	2.72986E1	-3.26874E1	-3.26366E1	2.67816E1	1.19953E-7	2.52061E-3	2.52061E-3	6.33977E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.16059E-1	-7.9844E-1	-9.13165E0	-9.14164E0	4.76837E-3	9.37939E-2	2.7301E1	-3.2652E1	-3.26266E1	2.67854E1	1.19902E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.01995E-1
