[Scan]
initial_time=2016-01-28T23:05:33
final_time=2016-01-28T23:05:54
ip_count=19
run=1026
dataset=10
scan=796
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08782E-4
ql1_vset=
ql1_vmon=-8.16131E-1
ql1_imon=1.3867E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=2.01449E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=2.26867E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-2.02978E-10
mult1=-1.05471E-8
mult2=-2.71262E-9
rf_tmon=-6.36297E-3
rf_agc=3.18616E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=1.77697E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66133E0
bslens_imon=2.60625E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.97478E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05212E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5352E1
cs_ef1b_imon=3.19137E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0512E1
cs_ea1_imon=1.09301E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4002E0
lens1_imon=2.65672E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03558E1
cs_ea2_imon=1.39727E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=3.0382E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.16079E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11135E1
os_restr1_imon=4.31112E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14951E1
os_ea1_imon=2.46325E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=9.49171E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01689E1
cs_anode1_imon=1.96278E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.14384E-8
tplens_vset=1.4E-1
tplens_vmon=1.63603E0
tplens_imon=-9.38636E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26753E1
iondef3_imon=1.51587E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26368E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=3.98899E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26111E0
ionrepsh_imon=8.59047E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33507E1
lens5b_imon=2.19216E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.14272E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50865E0
os_ea2_imon=-7.42755E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.19389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0894E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85411E-1
os_ef2bup_imon=-5.21796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.37337E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.30072E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.09144E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72666E1
iondef1_imon=1.09986E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.0279E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=7.28217E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-9.76095E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02119E2
cs_ionfocb_imon=1.47446E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56183E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=1.99923E-1
window_imon=-9.00411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39282E-4
mask2_vset=0.0E0
mask2_vmon=-1.86891E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=8.06054E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.39866E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.04755E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3775E0
defgridb_imon=6.11026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33161E1
os_fil1_imon=9.42324E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0838E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60993E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31523E1
cs_fil1_imon=8.1159E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.52144E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61258E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84756E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.22944E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28098E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.5747E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21452E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.03185E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.0314E-1
res40_imon=-2.35281E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.16107E-1	-7.97963E-1	-9.13146E0	-9.1419E0	4.57764E-3	9.37939E-2	2.72781E1	-3.26735E1	-3.262E1	2.6807E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9943E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09642E0	-8.16035E-1	-7.98202E-1	-9.13181E0	-9.14173E0	4.43459E-3	9.39608E-2	2.72967E1	-3.26561E1	-3.26314E1	2.67836E1	1.20017E-7	2.51662E-3	2.51662E-3	6.35692E-3	3.00824E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.15749E-1	-7.98035E-1	-9.13181E0	-9.14185E0	4.60148E-3	9.38654E-2	2.72768E1	-3.2688E1	-3.26531E1	2.67879E1	1.19978E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.0041E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09696E0	-8.15773E-1	-7.98297E-1	-9.13167E0	-9.14185E0	4.52995E-3	9.42945E-2	2.73187E1	-3.26579E1	-3.26195E1	2.68202E1	1.19841E-7	2.51393E-3	2.51393E-3	6.32858E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.15654E-1	-7.98059E-1	-9.13186E0	-9.14195E0	4.673E-3	9.39131E-2	2.72733E1	-3.26579E1	-3.26332E1	2.67974E1	1.19913E-7	2.51116E-3	2.51116E-3	6.31288E-3	2.97445E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.15725E-1	-7.9844E-1	-9.13165E0	-9.14159E0	4.673E-3	9.37223E-2	2.72921E1	-3.26307E1	-3.26183E1	2.6813E1	1.19953E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.15797E-1	-7.98154E-1	-9.13179E0	-9.14199E0	4.74453E-3	9.40561E-2	2.72985E1	-3.26651E1	-3.26032E1	2.67949E1	1.19809E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16059E-1	-7.98583E-1	-9.13181E0	-9.14197E0	4.60148E-3	9.36747E-2	2.72486E1	-3.26482E1	-3.26248E1	2.67988E1	1.19953E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.15964E-1	-7.98297E-1	-9.13177E0	-9.14195E0	4.45843E-3	9.35793E-2	2.73381E1	-3.26717E1	-3.25828E1	2.67914E1	1.19978E-7	2.52139E-3	2.52139E-3	6.30182E-3	2.98819E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.15988E-1	-7.98202E-1	-9.13186E0	-9.14171E0	4.57764E-3	9.35078E-2	2.73069E1	-3.26512E1	-3.26536E1	2.68028E1	1.19953E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.9892E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16059E-1	-7.9813E-1	-9.13172E0	-9.14209E0	4.62532E-3	9.34839E-2	2.72659E1	-3.26407E1	-3.26468E1	2.67908E1	1.20069E-7	2.51334E-3	2.51334E-3	6.29645E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16298E-1	-7.98011E-1	-9.13162E0	-9.14185E0	4.52995E-3	9.39131E-2	2.72304E1	-3.26417E1	-3.26596E1	2.6804E1	1.19965E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16202E-1	-7.98106E-1	-9.13172E0	-9.14149E0	4.43459E-3	9.36508E-2	2.73087E1	-3.26633E1	-3.26915E1	2.6798E1	1.20158E-7	2.52061E-3	2.52061E-3	6.29128E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.15868E-1	-7.98273E-1	-9.13172E0	-9.14178E0	4.50611E-3	9.39131E-2	2.72892E1	-3.26676E1	-3.26141E1	2.68048E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.15821E-1	-7.98059E-1	-9.13184E0	-9.14173E0	4.673E-3	9.37223E-2	2.7262E1	-3.26628E1	-3.26092E1	2.67952E1	1.20078E-7	2.51783E-3	2.51783E-3	6.29703E-3	3.00494E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.1594E-1	-7.98345E-1	-9.1315E0	-9.14166E0	4.64916E-3	9.37462E-2	2.73112E1	-3.26597E1	-3.26303E1	2.67998E1	1.20116E-7	2.51874E-3	2.51874E-3	6.33065E-3	2.99535E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.16131E-1	-7.98273E-1	-9.13157E0	-9.14199E0	4.81606E-3	9.38177E-2	2.73291E1	-3.2635E1	-3.26464E1	2.68208E1	1.19925E-7	2.51693E-3	2.51693E-3	6.34099E-3	3.02277E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09634E0	-8.16083E-1	-7.98559E-1	-9.13153E0	-9.1419E0	4.673E-3	9.39608E-2	2.73323E1	-3.26839E1	-3.26086E1	2.68227E1	1.19902E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00453E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16321E-1	-7.98392E-1	-9.13169E0	-9.14209E0	4.62532E-3	9.38892E-2	2.73104E1	-3.26219E1	-3.2613E1	2.681E1	1.20444E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.16131E-1	-7.98297E-1	-9.13134E0	-9.14204E0	4.91142E-3	9.39369E-2	2.72666E1	-3.26368E1	-3.26753E1	2.6795E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.03185E-1
