[Scan]
initial_time=2016-01-28T23:06:01
final_time=2016-01-28T23:06:22
ip_count=19
run=1026
dataset=10
scan=797
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09688E0
qbias_imon=-1.0887E-4
ql1_vset=
ql1_vmon=-8.15868E-1
ql1_imon=1.38837E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=2.01825E-9
ql3_vset=
ql3_vmon=-9.13181E0
ql3_imon=2.88522E-10
ql4_vset=
ql4_vmon=-9.14161E0
ql4_imon=-2.06923E-10
mult1=-1.03505E-8
mult2=-2.75461E-9
rf_tmon=-5.05808E-3
rf_agc=3.28431E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.71015E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64793E0
bslens_imon=2.33089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19653E1
lens5a_imon=2.00563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.04997E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53544E1
cs_ef1b_imon=3.19029E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04575E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04675E1
cs_ea1_imon=1.08538E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41031E0
lens1_imon=2.80871E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.9845E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03743E1
cs_ea2_imon=1.38375E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.04144E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.16557E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.30788E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15394E1
os_ea1_imon=2.4661E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63864E1
os_ef1bup_imon=3.09298E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22614E0
cs_ionrep_imon=9.53005E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91906E2
cs_nozzle_imon=1.9359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=1.96026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.14506E-8
tplens_vset=1.4E-1
tplens_vmon=1.64733E0
tplens_imon=-4.36924E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26183E1
iondef3_imon=1.51223E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26431E1
iondef2_imon=1.56214E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98399E-4
ql6_vset=1.0E-1
ql6_vmon=9.40323E-2
ql6_imon=3.97928E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25092E0
ionrepsh_imon=8.50362E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33835E1
lens5b_imon=2.17446E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75012E1
cs_ef2b_imon=3.14019E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44618E0
os_ea2_imon=-6.84683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00474E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.19569E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07979E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.1603E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=3.37589E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23004E2
cs_ionfoca_imon=6.29539E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.09144E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72898E1
iondef1_imon=1.096E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.09566E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.00005E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=7.28797E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13555E0
cs_ionaccel_imon=-8.28332E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.92931E-6
window_vset=0.0E0
window_vmon=2.1494E-1
window_imon=-1.10223E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.86831E1
mask2_imon=-5.21995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.24359E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.56049E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.08078E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=6.44015E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33135E1
os_fil1_imon=9.42919E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08308E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61258E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31473E1
cs_fil1_imon=7.49121E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.94791E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6168E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95238E-2
os_fil2_imon=-2.28755E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07325E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.03136E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43054E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21483E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.12751E-1
res40_imon=-2.37804E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.15535E-1	-7.98106E-1	-9.13169E0	-9.14176E0	4.62532E-3	9.37939E-2	2.72883E1	-3.26386E1	-3.26536E1	2.68298E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.15511E-1	-7.98178E-1	-9.13188E0	-9.14159E0	4.48227E-3	9.36747E-2	2.73143E1	-3.2675E1	-3.26438E1	2.68322E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.15558E-1	-7.9813E-1	-9.13179E0	-9.14159E0	4.57764E-3	9.39608E-2	2.72895E1	-3.2637E1	-3.26335E1	2.67816E1	1.20062E-7	2.52406E-3	2.52406E-3	6.33188E-3	2.98831E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.15558E-1	-7.98273E-1	-9.13193E0	-9.1419E0	4.69685E-3	9.39131E-2	2.72564E1	-3.26771E1	-3.26164E1	2.6777E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.15868E-1	-7.98416E-1	-9.13181E0	-9.14197E0	4.62532E-3	9.39131E-2	2.73147E1	-3.26765E1	-3.25701E1	2.67962E1	1.20209E-7	2.50775E-3	2.50775E-3	6.31278E-3	2.9892E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0965E0	-8.15797E-1	-7.98345E-1	-9.13205E0	-9.14173E0	4.72069E-3	9.39846E-2	2.73171E1	-3.26434E1	-3.2641E1	2.67944E1	1.2035E-7	2.51693E-3	2.51693E-3	6.34099E-3	2.9829E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.15558E-1	-7.98488E-1	-9.13177E0	-9.14173E0	4.62532E-3	9.4223E-2	2.72809E1	-3.26644E1	-3.26496E1	2.67926E1	1.20055E-7	2.52384E-3	2.52384E-3	6.32896E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.15272E-1	-7.98321E-1	-9.1316E0	-9.14221E0	4.673E-3	9.41038E-2	2.73478E1	-3.26338E1	-3.26296E1	2.68412E1	1.20158E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.02769E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.15439E-1	-7.98297E-1	-9.1315E0	-9.1424E0	4.72069E-3	9.40561E-2	2.73111E1	-3.26338E1	-3.2623E1	2.68383E1	1.20122E-7	2.51935E-3	2.51935E-3	6.3074E-3	2.9991E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09711E0	-8.15535E-1	-7.98488E-1	-9.13162E0	-9.14216E0	4.76837E-3	9.39608E-2	2.72561E1	-3.26484E1	-3.26567E1	2.67902E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0975E0	-8.15415E-1	-7.9813E-1	-9.13184E0	-9.14207E0	4.60148E-3	9.37939E-2	2.73364E1	-3.26767E1	-3.26337E1	2.67986E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.98481E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09727E0	-8.15439E-1	-7.98297E-1	-9.13198E0	-9.14209E0	4.50611E-3	9.36747E-2	2.72817E1	-3.26909E1	-3.26182E1	2.6818E1	1.20004E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.02511E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.15463E-1	-7.98202E-1	-9.13196E0	-9.14195E0	4.93526E-3	9.41038E-2	2.72296E1	-3.26349E1	-3.26644E1	2.68022E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09727E0	-8.15773E-1	-7.98345E-1	-9.13196E0	-9.14164E0	4.48227E-3	9.39369E-2	2.73163E1	-3.26649E1	-3.26201E1	2.68052E1	1.20158E-7	2.51793E-3	2.51793E-3	6.31278E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09719E0	-8.15535E-1	-7.98178E-1	-9.13191E0	-9.1419E0	4.64916E-3	9.377E-2	2.72886E1	-3.26744E1	-3.2607E1	2.67998E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.15678E-1	-7.98011E-1	-9.13172E0	-9.14176E0	4.81606E-3	9.377E-2	2.72868E1	-3.26437E1	-3.26431E1	2.67881E1	1.20137E-7	2.51915E-3	2.51915E-3	6.33538E-3	2.98554E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09711E0	-8.15988E-1	-7.98082E-1	-9.13184E0	-9.14199E0	4.74453E-3	9.38416E-2	2.73063E1	-3.26756E1	-3.26449E1	2.67828E1	1.19902E-7	2.51096E-3	2.51096E-3	6.29128E-3	2.9841E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0975E0	-8.15892E-1	-7.98035E-1	-9.13198E0	-9.14204E0	4.69685E-3	9.38892E-2	2.72843E1	-3.26487E1	-3.26321E1	2.68272E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09758E0	-8.15797E-1	-7.98178E-1	-9.13181E0	-9.14192E0	4.72069E-3	9.37939E-2	2.72913E1	-3.26597E1	-3.26146E1	2.68106E1	1.20069E-7	2.51116E-3	2.51116E-3	6.33486E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09688E0	-8.15868E-1	-7.98035E-1	-9.13181E0	-9.14161E0	4.72069E-3	9.40323E-2	2.72898E1	-3.26431E1	-3.26183E1	2.67962E1	1.19965E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.9952E-1
