[Scan]
initial_time=2016-01-28T23:06:57
final_time=2016-01-28T23:07:18
ip_count=19
run=1026
dataset=10
scan=799
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-8.15773E-1
ql1_imon=1.38128E-8
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=2.0049E-9
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=2.81823E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=-2.14005E-10
mult1=-9.91691E-9
mult2=-2.91107E-9
rf_tmon=-4.81544E-3
rf_agc=3.21102E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.71933E-3
ql5_imon=1.70699E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64852E0
bslens_imon=2.95383E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19842E1
lens5a_imon=1.95537E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.0539E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=3.19137E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02054E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=1.11794E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42978E0
lens1_imon=2.45123E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03903E1
cs_ea2_imon=1.42127E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=3.04072E-5
olens2_vset=9.7E-1
olens2_vmon=9.69672E-1
olens2_imon=1.16821E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=4.31401E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14898E1
os_ea1_imon=2.43885E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63335E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24797E0
cs_ionrep_imon=9.65039E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.9336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02043E1
cs_anode1_imon=1.95341E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=3.15438E-8
tplens_vset=1.4E-1
tplens_vmon=1.66857E0
tplens_imon=1.08145E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26468E1
iondef3_imon=1.49666E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26566E1
iondef2_imon=1.59576E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02873E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=3.98719E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28985E0
ionrepsh_imon=8.762E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33345E1
lens5b_imon=2.16844E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51578E0
os_ea2_imon=-6.06816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0604E2
lens4b_imon=2.00555E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.1975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0924E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.38274E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.31096E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01587E1
cs_anode2_imon=2.09108E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73002E1
iondef1_imon=1.07724E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.10215E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.02286E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.29333E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-9.36451E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47439E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=2.12537E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39354E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=8.8788E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.99583E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=6.76577E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36717E0
defgridb_imon=5.95879E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33158E1
os_fil1_imon=9.426E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07581E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61272E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31562E1
cs_fil1_imon=6.70434E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.60554E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62023E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.72444E-2
os_fil2_imon=-2.47376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.04148E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28228E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.60473E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21624E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.3017E-1
res40_imon=-2.23027E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.15988E-1	-7.98535E-1	-9.1316E0	-9.14221E0	4.17233E-3	9.37462E-2	2.7236E1	-3.26819E1	-3.25942E1	2.6796E1	1.20209E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.97901E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16178E-1	-7.9844E-1	-9.13179E0	-9.14211E0	4.50611E-3	9.377E-2	2.73086E1	-3.26735E1	-3.26648E1	2.67989E1	1.19757E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.97445E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.15988E-1	-7.98345E-1	-9.1316E0	-9.14204E0	4.33922E-3	9.37939E-2	2.73237E1	-3.26645E1	-3.26524E1	2.68144E1	1.19891E-7	2.51287E-3	2.51287E-3	6.3074E-3	2.97344E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16035E-1	-7.9813E-1	-9.13174E0	-9.14228E0	4.26769E-3	9.36747E-2	2.72979E1	-3.26482E1	-3.26224E1	2.67571E1	1.19978E-7	2.51915E-3	2.51915E-3	6.33538E-3	2.98554E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.15868E-1	-7.9813E-1	-9.13169E0	-9.14185E0	4.24385E-3	9.38654E-2	2.73147E1	-3.26909E1	-3.26236E1	2.67788E1	1.20069E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9978E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16107E-1	-7.98273E-1	-9.13162E0	-9.14207E0	4.26769E-3	9.34839E-2	2.72629E1	-3.26793E1	-3.25991E1	2.67698E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.15964E-1	-7.98249E-1	-9.13155E0	-9.14192E0	4.22001E-3	9.36508E-2	2.73279E1	-3.26437E1	-3.26454E1	2.68105E1	1.20084E-7	2.51248E-3	2.51248E-3	6.27954E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.16107E-1	-7.98035E-1	-9.13138E0	-9.14176E0	4.19617E-3	9.37462E-2	2.72843E1	-3.26731E1	-3.25942E1	2.6807E1	1.1979E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.00097E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.15773E-1	-7.98368E-1	-9.13174E0	-9.14185E0	3.93391E-3	9.40323E-2	2.7254E1	-3.26783E1	-3.26278E1	2.68052E1	1.20174E-7	2.51116E-3	2.51116E-3	6.28552E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.15725E-1	-7.98607E-1	-9.13126E0	-9.14211E0	3.88622E-3	9.35793E-2	2.72696E1	-3.26669E1	-3.2635E1	2.67686E1	1.19861E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.15725E-1	-7.98225E-1	-9.13157E0	-9.14197E0	4.33922E-3	9.37939E-2	2.73045E1	-3.26332E1	-3.26549E1	2.67962E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.02659E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.15725E-1	-7.98202E-1	-9.13143E0	-9.14199E0	4.57764E-3	9.39608E-2	2.73222E1	-3.26738E1	-3.26189E1	2.68157E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.15701E-1	-7.98106E-1	-9.13174E0	-9.14207E0	4.52995E-3	9.39846E-2	2.73171E1	-3.2638E1	-3.25431E1	2.68269E1	1.20055E-7	2.51525E-3	2.51525E-3	6.29128E-3	2.98665E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.15654E-1	-7.9813E-1	-9.13184E0	-9.14195E0	4.36306E-3	9.39608E-2	2.73526E1	-3.26879E1	-3.26044E1	2.6803E1	1.20383E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.98481E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.15988E-1	-7.98225E-1	-9.13196E0	-9.14209E0	4.29153E-3	9.39369E-2	2.73122E1	-3.26809E1	-3.26431E1	2.6831E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.15773E-1	-7.98249E-1	-9.13193E0	-9.14209E0	4.12464E-3	9.36031E-2	2.72751E1	-3.26579E1	-3.26146E1	2.6819E1	1.20106E-7	2.52169E-3	2.52169E-3	6.35601E-3	2.99175E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.15916E-1	-7.98178E-1	-9.13188E0	-9.14216E0	3.98159E-3	9.38177E-2	2.73122E1	-3.26508E1	-3.26095E1	2.67758E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16107E-1	-7.97963E-1	-9.13174E0	-9.14207E0	4.00543E-3	9.38177E-2	2.73532E1	-3.27095E1	-3.2611E1	2.67818E1	1.20106E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.15845E-1	-7.98202E-1	-9.13177E0	-9.14202E0	3.83854E-3	9.38892E-2	2.72856E1	-3.2672E1	-3.26461E1	2.67943E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01609E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.15773E-1	-7.98178E-1	-9.13165E0	-9.14183E0	3.71933E-3	9.39131E-2	2.73002E1	-3.26566E1	-3.26468E1	2.6801E1	1.20106E-7	2.5131E-3	2.5131E-3	6.33977E-3	2.9943E-1
