[Scan]
initial_time=2016-01-28T23:07:53
final_time=2016-01-28T23:08:13
ip_count=19
run=1026
dataset=10
scan=801
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.15892E-1
ql1_imon=1.38667E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.01547E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=3.24094E-10
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=-1.96576E-10
mult1=-9.57341E-9
mult2=-2.88463E-9
rf_tmon=-4.1237E-3
rf_agc=3.32733E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.67619E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.49089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.99497E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.04963E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53817E1
cs_ef1b_imon=3.18948E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02359E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0485E1
cs_ea1_imon=1.07715E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4026E0
lens1_imon=2.61346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64621E1
os_ef1alow_imon=2.97653E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0363E1
cs_ea2_imon=1.40159E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84457E1
cs_ef1a_imon=3.0454E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.15943E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11198E1
os_restr1_imon=4.30627E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1536E1
os_ea1_imon=2.46397E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63891E1
os_ef1bup_imon=3.08881E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26652E0
cs_ionrep_imon=9.37995E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93453E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01672E1
cs_anode1_imon=1.98063E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.13621E-8
tplens_vset=1.4E-1
tplens_vmon=1.64744E0
tplens_imon=-5.42091E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26217E1
iondef3_imon=1.50542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26713E1
iondef2_imon=1.56814E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98479E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=4.02681E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26712E0
ionrepsh_imon=8.71304E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.18279E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12511E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49303E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71139E1
cs_ef2a_imon=3.21194E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08388E0
os_ef2alow_imon=-2.59303E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93889E-1
os_ef2bup_imon=-5.17915E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10911E1
os_restr2_imon=3.37774E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23116E2
cs_ionfoca_imon=6.31911E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.10451E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73155E1
iondef1_imon=1.09661E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68144E1
iondef4_imon=1.0869E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.03859E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.28263E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14262E0
cs_ionaccel_imon=-8.67698E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56318E1
einzel_imon=7.70281E-6
window_vset=0.0E0
window_vmon=2.18221E-1
window_imon=-9.5752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39125E-4
mask2_vset=0.0E0
mask2_vmon=-1.86787E1
mask2_imon=-4.7847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=7.28908E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.43471E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.4513E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46172E0
defgridb_imon=6.45273E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33191E1
os_fil1_imon=9.43194E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07897E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60849E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31604E1
cs_fil1_imon=7.49236E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.44474E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61439E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19579E-2
os_fil2_imon=-2.47537E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.37509E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29517E-1
cs_fil2_imon=-2.53151E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.6477E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21492E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.36107E-1
res40_imon=-2.38719E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.15606E-1	-7.98488E-1	-9.13181E0	-9.14204E0	4.93526E-3	9.40084E-2	2.73334E1	-3.26738E1	-3.26012E1	2.68082E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.15678E-1	-7.98416E-1	-9.13181E0	-9.14176E0	4.88758E-3	9.38177E-2	2.73326E1	-3.26615E1	-3.26303E1	2.68106E1	1.20209E-7	2.50989E-3	2.50989E-3	6.29665E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.1563E-1	-7.98464E-1	-9.13179E0	-9.14195E0	4.76837E-3	9.35793E-2	2.72668E1	-3.26667E1	-3.25995E1	2.67716E1	1.19766E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.01475E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.15868E-1	-7.98488E-1	-9.1321E0	-9.1419E0	4.64916E-3	9.38416E-2	2.73452E1	-3.26337E1	-3.26537E1	2.67932E1	1.19851E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0965E0	-8.1594E-1	-7.98321E-1	-9.13155E0	-9.14171E0	4.98295E-3	9.39369E-2	2.73213E1	-3.26428E1	-3.26404E1	2.68099E1	1.20158E-7	2.50989E-3	2.50989E-3	6.31278E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.15892E-1	-7.98202E-1	-9.13188E0	-9.14176E0	5.00679E-3	9.408E-2	2.73303E1	-3.26633E1	-3.262E1	2.68022E1	1.19809E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.15678E-1	-7.98273E-1	-9.13172E0	-9.14187E0	4.79221E-3	9.39131E-2	2.72847E1	-3.26314E1	-3.25972E1	2.68142E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.15725E-1	-7.98297E-1	-9.13169E0	-9.1418E0	4.62532E-3	9.37462E-2	2.73039E1	-3.26368E1	-3.25942E1	2.67818E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.16011E-1	-7.9844E-1	-9.13181E0	-9.14197E0	4.69685E-3	9.33409E-2	2.72414E1	-3.2623E1	-3.26543E1	2.6795E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.16011E-1	-7.98488E-1	-9.13136E0	-9.14187E0	4.72069E-3	9.39369E-2	2.73145E1	-3.26756E1	-3.26071E1	2.67758E1	1.20017E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.15606E-1	-7.98464E-1	-9.13143E0	-9.14161E0	4.62532E-3	9.38654E-2	2.73111E1	-3.26639E1	-3.26266E1	2.68064E1	1.19851E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09657E0	-8.15797E-1	-7.98512E-1	-9.13146E0	-9.14183E0	4.74453E-3	9.35555E-2	2.73269E1	-3.26461E1	-3.26419E1	2.68238E1	1.19757E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.01085E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.15845E-1	-7.98249E-1	-9.13143E0	-9.1418E0	4.673E-3	9.38892E-2	2.72144E1	-3.25551E1	-3.26549E1	2.6801E1	1.20158E-7	2.51847E-3	2.51847E-3	6.35601E-3	3.0148E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.15797E-1	-7.98392E-1	-9.13157E0	-9.1419E0	4.31538E-3	9.377E-2	2.72845E1	-3.26903E1	-3.26189E1	2.67956E1	1.20017E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.9978E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16178E-1	-7.98345E-1	-9.13172E0	-9.14166E0	4.55379E-3	9.37939E-2	2.72927E1	-3.26779E1	-3.26425E1	2.68076E1	1.19851E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.99047E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.16059E-1	-7.98631E-1	-9.13177E0	-9.14176E0	4.69685E-3	9.377E-2	2.73332E1	-3.26659E1	-3.26148E1	2.67607E1					
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.15868E-1	-7.98512E-1	-9.13167E0	-9.14161E0	5.00679E-3	9.36985E-2	2.73128E1	-3.26419E1	-3.26231E1	2.68172E1	1.19991E-7	2.51611E-3	2.51611E-3	6.31879E-3	2.9944E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.15845E-1	-7.98559E-1	-9.13136E0	-9.14187E0	4.55379E-3	9.35078E-2	2.73123E1	-3.2647E1	-3.26344E1	2.68214E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16035E-1	-7.98655E-1	-9.13138E0	-9.14183E0	4.76837E-3	9.37939E-2	2.73016E1	-3.26425E1	-3.2629E1	2.67514E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.15892E-1	-7.98512E-1	-9.1316E0	-9.14226E0	4.62532E-3	9.38654E-2	2.73155E1	-3.26713E1	-3.26217E1	2.68144E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.02511E-1
