[Scan]
initial_time=2016-01-28T17:20:46
final_time=2016-01-28T17:21:05
ip_count=19
run=1026
dataset=0
scan=162
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.78761E-6
ql1_vset=
ql1_vmon=-8.7999E1
ql1_imon=-1.31589E-9
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.47533E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-3.90601E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.62623E-8
mult1=-9.06612E-9
mult2=-2.65074E-9
rf_tmon=-5.4377E-3
rf_agc=3.2925E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=6.61671E-10
bslens_vset=-6.2E0
bslens_vmon=-6.48997E0
bslens_imon=1.64947E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20377E1
lens5a_imon=2.0816E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12604E2
lens4a_imon=2.05047E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53915E1
cs_ef1b_imon=3.10286E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04486E2
lens23_imon=1.0125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04097E1
cs_ea1_imon=1.27686E-5
lens1_vset=-2.7E0
lens1_vmon=-3.27246E0
lens1_imon=2.26646E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64565E1
os_ef1alow_imon=2.97603E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02931E1
cs_ea2_imon=1.30524E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.842E1
cs_ef1a_imon=3.00587E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.26727E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11107E1
os_restr1_imon=4.29487E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14304E1
os_ea1_imon=2.44751E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63646E1
os_ef1bup_imon=3.07723E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.32249E0
cs_ionrep_imon=1.04227E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91944E2
cs_nozzle_imon=1.92991E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01685E1
cs_anode1_imon=2.0461E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.95508E-8
tplens_vset=1.4E-1
tplens_vmon=1.46161E0
tplens_imon=-1.08248E-6
iondef3_vset=-3.249E1
iondef3_vmon=-3.26146E1
iondef3_imon=1.58041E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26374E1
iondef2_imon=1.5781E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02835E2
lens6_imon=2.9764E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=8.8011E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.19931E0
ionrepsh_imon=9.8519E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3507E1
lens5b_imon=2.26538E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74982E1
cs_ef2b_imon=3.1181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35218E0
os_ea2_imon=-1.68298E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.05971E2
lens4b_imon=2.00606E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.18589E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.61698E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83368E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10864E1
os_restr2_imon=3.3964E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23139E2
cs_ionfoca_imon=6.37583E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01902E1
cs_anode2_imon=2.09832E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72961E1
iondef1_imon=1.03303E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.06589E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.43182E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.79943E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10636E0
cs_ionaccel_imon=-1.15089E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56108E1
einzel_imon=7.56783E-6
window_vset=0.0E0
window_vmon=1.53973E-1
window_imon=-9.91952E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86474E1
mask2_imon=-6.74082E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=6.2522E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=7.4532E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50024E3
multb_neg_imon=7.11995E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.95419E0
defgridb_imon=6.33468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33206E1
os_fil1_imon=9.40414E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07183E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62178E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30584E1
cs_fil1_imon=9.24294E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29532E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64099E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37997E-2
os_fil2_imon=-2.63714E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87683E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.05254E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36294E-1
cs_fil2_imon=-2.4209E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1254E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21731E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=6.81092E-2
chamber_ion_pmon=2.15624E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.83378E-1
res40_imon=-2.54562E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=357
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.55E2	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.79987E1	-5.00679E-4	-8.8001E1	3.8147E-4	5.03063E-3	9.36747E-2	2.71429E1	-3.2551E1	-3.27708E1	2.68033E1	2.1584E-9	2.52123E-3	2.52123E-3	6.32247E-3	6.8265E-2
2.0E0	1.59E2	0.0E0	3.16E2	1.6E2	-7.46377E-2	-8.79987E1	-1.66893E-4	-8.80011E1	3.09944E-4	4.88758E-3	9.35555E-2	2.72997E1	-3.26889E1	-3.26679E1	2.68373E1	2.15514E-9	2.52717E-3	2.52717E-3	6.30481E-3	6.8471E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.44059E-2	-8.79985E1	-4.05312E-4	-8.80009E1	6.4373E-4	5.00679E-3	9.36031E-2	2.73207E1	-3.26631E1	-3.28033E1	2.68001E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.79984E1	-1.19209E-4	-8.80009E1	5.72205E-4	5.50747E-3	9.38177E-2	2.73141E1	-3.2644E1	-3.28033E1	2.68208E1	2.15736E-9	2.52093E-3	2.52093E-3	6.3126E-3	6.83021E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40192E-2	-8.79983E1	-5.48363E-4	-8.80009E1	6.19888E-4	5.24521E-3	9.35793E-2	2.73033E1	-3.2649E1	-3.25947E1	2.67885E1	2.15332E-9	2.51771E-3	2.51771E-3	6.30192E-3	6.82147E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.79981E1	-2.38419E-4	-8.8001E1	2.38419E-4	5.07832E-3	9.36747E-2	2.73511E1	-3.26655E1	-3.25629E1	2.6801E1	2.16085E-9	2.51739E-3	2.51739E-3	6.33436E-3	6.82837E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.79985E1	-2.14577E-4	-8.80012E1	6.19888E-4	4.98295E-3	9.377E-2	2.72967E1	-3.2647E1	-3.25082E1	2.68178E1	2.15425E-9	2.52428E-3	2.52428E-3	6.30192E-3	6.81555E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.79986E1	-4.52995E-4	-8.80007E1	4.05312E-4	5.31673E-3	9.40323E-2	2.72745E1	-3.26434E1	-3.26302E1	2.68064E1	2.15533E-9	2.51632E-3	2.51632E-3	6.3074E-3	6.85756E-2
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.79989E1	-2.6226E-4	-8.8001E1	4.05312E-4	4.8399E-3	9.37939E-2	2.73237E1	-3.26338E1	-3.26939E1	2.68238E1	2.158E-9	2.51771E-3	2.51771E-3	6.31288E-3	6.86308E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.79987E1	-5.00679E-4	-8.80004E1	7.15256E-5	4.88758E-3	9.35316E-2	2.73063E1	-3.26508E1	-3.26366E1	2.67868E1	2.15987E-9	2.52099E-3	2.52099E-3	6.34037E-3	6.81555E-2
1.4E1	1.1E1	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.79989E1	-6.19888E-4	-8.8001E1	3.09944E-4	4.91142E-3	9.33647E-2	2.72965E1	-3.26634E1	-3.2596E1	2.68132E1	2.15441E-9	2.52384E-3	2.52384E-3	6.31278E-3	6.85756E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.79989E1	-6.91414E-4	-8.80011E1	3.57628E-4	5.05447E-3	9.36031E-2	2.7324E1	-3.2675E1	-3.2688E1	2.6796E1	2.15314E-9	2.52473E-3	2.52473E-3	6.31858E-3	6.83849E-2
1.6E1	1.7E1	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.79992E1	-7.62939E-4	-8.80005E1	3.33786E-4	4.76837E-3	9.35555E-2	2.72967E1	-3.26807E1	-3.25179E1	2.68184E1	2.159E-9	2.52169E-3	2.52169E-3	6.31278E-3	6.82837E-2
1.7E1	5.2E1	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.79988E1	-2.6226E-4	-8.8001E1	2.14577E-4	4.95911E-3	9.32693E-2	2.73075E1	-3.26627E1	-3.26951E1	2.67992E1	2.15519E-9	2.52538E-3	2.52538E-3	6.32936E-3	6.82147E-2
1.8E1	1.55E2	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.79987E1	-3.8147E-4	-8.80008E1	2.14577E-4	4.86374E-3	9.377E-2	2.72877E1	-3.265E1	-3.25864E1	2.67776E1	2.16034E-9	2.5188E-3	2.5188E-3	6.32112E-3	6.84819E-2
1.9E1	3.41E2	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.79988E1	-3.57628E-4	-8.80007E1	2.86102E-4	4.74453E-3	9.34839E-2	2.72984E1	-3.2656E1	-3.26603E1	2.67758E1					
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.40192E-2	-8.79989E1	-2.6226E-4	-8.80007E1	3.33786E-4	4.72069E-3	9.34839E-2	2.73128E1	-3.26596E1	-3.25983E1	2.68204E1	2.15219E-9	2.51693E-3	2.51693E-3	6.29067E-3	6.80227E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.79989E1	-3.8147E-4	-8.80006E1	2.86102E-4	4.50611E-3	9.34839E-2	2.73087E1	-3.26735E1	-3.26675E1	2.68004E1	2.15257E-9	2.51847E-3	2.51847E-3	6.30202E-3	6.82837E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.47149E-2	-8.79991E1	-3.09944E-4	-8.8001E1	2.6226E-4	4.57764E-3	9.36747E-2	2.7298E1	-3.26484E1	-3.28024E1	2.68094E1	2.158E-9	2.52428E-3	2.52428E-3	6.31837E-3	6.80963E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.7999E1	-5.48363E-4	-8.80011E1	2.14577E-4	4.41074E-3	9.32932E-2	2.72961E1	-3.26374E1	-3.26146E1	2.68022E1	2.15624E-9	2.52169E-3	2.52169E-3	6.3074E-3	6.81092E-2