[Scan]
initial_time=2016-01-28T17:22:53
final_time=2016-01-28T17:23:12
ip_count=19
run=1026
dataset=0
scan=163
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.78743E-6
ql1_vset=
ql1_vmon=-8.79997E1
ql1_imon=-1.00219E-9
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.41132E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.76766E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.61394E-8
mult1=-9.6294E-9
mult2=-2.54099E-9
rf_tmon=-3.1586E-3
rf_agc=3.57808E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=6.02257E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68685E0
bslens_imon=2.73128E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20184E1
lens5a_imon=1.97049E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12405E2
lens4a_imon=2.04571E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53656E1
cs_ef1b_imon=3.13265E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02374E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05347E1
cs_ea1_imon=1.16757E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07127E0
lens1_imon=1.232E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64985E1
os_ef1alow_imon=2.97453E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03298E1
cs_ea2_imon=1.40186E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8418E1
cs_ef1a_imon=3.01832E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.29179E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11355E1
os_restr1_imon=4.28609E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15641E1
os_ea1_imon=2.4394E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63687E1
os_ef1bup_imon=3.06975E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=9.29192E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91822E2
cs_nozzle_imon=1.93205E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.02161E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.96512E-8
tplens_vset=1.4E-1
tplens_vmon=1.63062E0
tplens_imon=-6.23677E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.50534E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26278E1
iondef2_imon=1.55247E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98527E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=8.92401E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29707E0
ionrepsh_imon=8.98796E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33452E1
lens5b_imon=2.14706E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74716E1
cs_ef2b_imon=3.11979E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44904E0
os_ea2_imon=-5.47329E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06127E2
lens4b_imon=2.00725E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70603E1
cs_ef2a_imon=3.17574E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0505E0
os_ef2alow_imon=-2.66146E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82751E-1
os_ef2bup_imon=-5.38259E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.39677E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.26991E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01908E1
cs_anode2_imon=2.08625E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72762E1
iondef1_imon=1.08868E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6816E1
iondef4_imon=1.08225E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.5932E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.94067E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1481E0
cs_ionaccel_imon=-1.03157E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47112E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56104E1
einzel_imon=7.61138E-6
window_vset=0.0E0
window_vmon=1.72508E-1
window_imon=-1.14973E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39115E-4
mask2_vset=0.0E0
mask2_vmon=-1.86419E1
mask2_imon=-7.04896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.516E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.22846E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50159E3
multb_neg_imon=8.03853E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.19088E0
defgridb_imon=6.00989E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33263E1
os_fil1_imon=9.41227E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05927E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63036E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30623E1
cs_fil1_imon=9.08525E2
cs_fil1_emis_iset=3.0E0
cs_fil1_emis_imon=4.30304E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64981E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.89247E-2
os_fil2_imon=-2.55914E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.75018E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.69746E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35769E-1
cs_fil2_imon=-2.37379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21941E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=6.77423E-2
chamber_ion_pmon=2.15613E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.85271E-1
res40_imon=-2.46685E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.3E2	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.79998E1	-5.00679E-4	-8.80009E1	2.14577E-4	4.86374E-3	9.35316E-2	2.73167E1	-3.26389E1	-3.26419E1	2.67794E1	2.15907E-9	2.52025E-3	2.52025E-3	6.31269E-3	6.80076E-2
2.0E0	7.1E1	1.0E0	3.16E2	1.6E2	-7.18554E-2	-8.8E1	-5.00679E-4	-8.80009E1	2.38419E-5	4.86374E-3	9.38654E-2	2.73261E1	-3.26789E1	-3.25119E1	2.68262E1	2.158E-9	2.51771E-3	2.51771E-3	6.32936E-3	6.79781E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.79998E1	-7.39098E-4	-8.80007E1	3.57628E-4	4.79221E-3	9.377E-2	2.72815E1	-3.2685E1	-3.24951E1	2.67595E1	2.15791E-9	2.5147E-3	2.5147E-3	6.30182E-3	6.76624E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17779E-2	-8.79998E1	-3.09944E-4	-8.80004E1	1.19209E-4	5.05447E-3	9.35078E-2	2.73339E1	-3.26585E1	-3.27684E1	2.68022E1	2.15624E-9	2.52384E-3	2.52384E-3	6.31278E-3	6.80511E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.79998E1	-3.57628E-4	-8.80006E1	4.52995E-4	4.60148E-3	9.41038E-2	2.72967E1	-3.26615E1	-3.27245E1	2.68118E1	2.15992E-9	2.51632E-3	2.51632E-3	6.31817E-3	6.7646E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.8E1	-4.05312E-4	-8.80006E1	2.38419E-4	5.00679E-3	9.3627E-2	2.72839E1	-3.26284E1	-3.25782E1	2.68106E1	2.15519E-9	2.52538E-3	2.52538E-3	6.29645E-3	6.83927E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.79998E1	-4.05312E-4	-8.80006E1	4.76837E-5	4.60148E-3	9.35555E-2	2.728E1	-3.26474E1	-3.24766E1	2.68148E1	2.15894E-9	2.5188E-3	2.5188E-3	6.3074E-3	6.78011E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.79994E1	-4.52995E-4	-8.80006E1	4.76837E-5	4.60148E-3	9.36031E-2	2.72957E1	-3.2639E1	-3.26142E1	2.68274E1	2.15987E-9	2.51662E-3	2.51662E-3	6.27461E-3	6.80372E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.79996E1	-5.96046E-4	-8.80008E1	5.24521E-4	4.81606E-3	9.34839E-2	2.72996E1	-3.26585E1	-3.27166E1	2.68232E1	2.158E-9	2.51771E-3	2.51771E-3	6.3074E-3	6.78601E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.79996E1	-3.8147E-4	-8.80009E1	4.29153E-4	5.22137E-3	9.36031E-2	2.72883E1	-3.26691E1	-3.25969E1	2.67868E1	2.15982E-9	2.51693E-3	2.51693E-3	6.30182E-3	6.79023E-2
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.79998E1	-4.29153E-4	-8.80008E1	5.72205E-4	5.126E-3	9.34839E-2	2.73242E1	-3.26731E1	-3.25872E1	2.67951E1	2.15048E-9	2.51854E-3	2.51854E-3	6.29211E-3	6.80351E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.79998E1	-4.05312E-4	-8.80007E1	4.05312E-4	4.95911E-3	9.35793E-2	2.73123E1	-3.26344E1	-3.2587E1	2.68088E1	2.15277E-9	2.51758E-3	2.51758E-3	6.34231E-3	6.81172E-2
1.6E1	1.5E1	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.79999E1	-5.24521E-4	-8.8001E1	4.76837E-5	4.60148E-3	9.35316E-2	2.72962E1	-3.26986E1	-3.26372E1	2.68022E1	2.15425E-9	2.52428E-3	2.52428E-3	6.31288E-3	6.76834E-2
1.7E1	2.5E1	0.0E0	6.87E2	4.7E2	-7.18554E-2	-8.79999E1	-4.05312E-4	-8.80007E1	2.86102E-4	5.05447E-3	9.36031E-2	2.73045E1	-3.26242E1	-3.26444E1	2.67902E1	2.15808E-9	2.53031E-3	2.53031E-3	6.31817E-3	6.81673E-2
1.8E1	1.01E2	0.0E0	7.27E2	5.0E2	-7.14689E-2	-8.8E1	-2.86102E-4	-8.80008E1	2.86102E-4	5.126E-3	9.35793E-2	2.72732E1	-3.26714E1	-3.25653E1	2.67914E1	2.15613E-9	2.52757E-3	2.52757E-3	6.29098E-3	6.7919E-2
1.9E1	2.01E2	1.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80001E1	-3.09944E-4	-8.80009E1	4.52995E-4	4.91142E-3	9.31978E-2	2.73604E1	-3.26675E1	-3.27678E1	2.68304E1	2.15425E-9	2.51443E-3	2.51443E-3	6.29098E-3	6.76247E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80002E1	-4.05312E-4	-8.80011E1	3.57628E-4	4.79221E-3	9.36031E-2	2.73339E1	-3.26462E1	-3.26787E1	2.68028E1	2.15894E-9	2.52647E-3	2.52647E-3	6.28006E-3	6.79781E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80001E1	-2.38419E-4	-8.8001E1	1.66893E-4	5.17368E-3	9.34839E-2	2.72992E1	-3.26649E1	-3.27729E1	2.68389E1	2.15987E-9	2.52428E-3	2.52428E-3	6.31837E-3	6.79781E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.79998E1	-5.72205E-4	-8.8001E1	1.19209E-4	4.76837E-3	9.32693E-2	2.73033E1	-3.26777E1	-3.28255E1	2.68088E1	2.15613E-9	2.52428E-3	2.52428E-3	6.33486E-3	6.79781E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.79997E1	-2.86102E-4	-8.80009E1	-2.38419E-5	4.64916E-3	9.31501E-2	2.72762E1	-3.26278E1	-3.26296E1	2.6816E1	2.15613E-9	2.5188E-3	2.5188E-3	6.29098E-3	6.77423E-2