[Scan]
initial_time=2016-01-28T15:42:24
final_time=2016-01-28T15:42:44
ip_count=19
run=1026
dataset=1
scan=1
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.79179E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.33915E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.24547E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.48299E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.43305E-8
mult1=-9.64406E-9
mult2=-2.63278E-9
rf_tmon=-4.79481E-3
rf_agc=3.2883E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=5.89252E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.44042E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19881E1
lens5a_imon=1.96397E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.0496E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52055E1
cs_ef1b_imon=3.09262E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04573E2
lens23_imon=1.01973E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04904E1
cs_ea1_imon=1.25163E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0714E0
lens1_imon=1.27602E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03949E1
cs_ea2_imon=1.38645E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.99928E-5
olens2_vset=0.0E0
olens2_vmon=1.04904E-3
olens2_imon=1.01903E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=4.31545E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15065E1
os_ea1_imon=2.41747E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27072E0
cs_ionrep_imon=9.43403E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93164E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=2.04315E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.44955E-9
tplens_vset=0.0E0
tplens_vmon=-1.64083E0
tplens_imon=-6.38212E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00471E1
iondef3_imon=8.72746E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98735E1
iondef2_imon=9.15645E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02892E2
lens6_imon=2.98209E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=8.05926E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28815E0
ionrepsh_imon=9.23576E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33453E1
lens5b_imon=2.1763E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.19923E0
os_ea2_imon=-9.12188E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00334E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.17731E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10682E0
os_ef2alow_imon=-2.68077E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6619E-1
os_ef2bup_imon=-5.38375E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=3.35679E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.28883E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.09648E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57795E1
iondef1_imon=4.85934E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50154E1
iondef4_imon=5.20831E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.67123E-8
olens1_vset=0.0E0
olens1_vmon=1.45435E-3
olens1_imon=1.22306E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15957E0
cs_ionaccel_imon=-1.13827E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47165E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=1.99923E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.05115E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.32656E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=6.82765E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.20908E0
defgridb_imon=5.96606E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33163E1
os_fil1_imon=9.40162E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0775E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60371E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30503E1
cs_fil1_imon=9.22076E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30403E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62233E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.60251E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.08379E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.79811E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46057E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21367E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.16313E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28368E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.25E2	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80021E1	-1.4782E-3	-8.79999E1	5.96046E-4	4.98295E-3	9.30786E-2	1.57991E1	-1.98977E1	-1.99998E1	1.50086E1	2.15613E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.16313E-2
2.0E0	1.48E2	0.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80024E1	-1.43051E-3	-8.80002E1	3.33786E-4	4.95911E-3	9.3317E-2	1.58274E1	-1.987E1	-1.98859E1	1.50136E1	2.15257E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.16991E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80023E1	-1.35899E-3	-8.8E1	2.14577E-4	5.05447E-3	9.35078E-2	1.58E1	-1.98707E1	-1.97977E1	1.50051E1	2.15997E-9	2.51919E-3	2.51919E-3	6.32858E-3	2.16918E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80025E1	-1.21593E-3	-8.80002E1	3.09944E-4	4.98295E-3	9.30786E-2	1.57765E1	-1.98567E1	-1.98747E1	1.49932E1	2.15808E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.16991E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80021E1	-9.77516E-4	-8.79999E1	3.09944E-4	5.22137E-3	9.31263E-2	1.57554E1	-1.98367E1	-2.01097E1	1.501E1	2.15987E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.16689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80022E1	-1.09673E-3	-8.8E1	2.38419E-4	5.05447E-3	9.32217E-2	1.57713E1	-1.98535E1	-2.01012E1	1.49992E1	2.158E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.16125E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80022E1	-8.82149E-4	-8.8E1	4.05312E-4	5.24521E-3	9.3317E-2	1.57413E1	-1.98423E1	-2.00121E1	1.50074E1	2.15706E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.16313E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80022E1	-9.29832E-4	-8.8E1	3.09944E-4	5.29289E-3	9.32217E-2	1.57909E1	-1.98513E1	-1.99408E1	1.49848E1	2.15533E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.17176E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80024E1	-7.86781E-4	-8.80002E1	-4.76837E-5	5.38826E-3	9.34839E-2	1.58437E1	-1.98416E1	-1.97918E1	1.50088E1	2.15519E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.1575E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80023E1	-9.05991E-4	-8.80003E1	0.0E0	4.69685E-3	9.34601E-2	1.57914E1	-1.98375E1	-1.98629E1	1.50148E1	2.15992E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.16252E-2
1.4E1	9.0E0	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80024E1	-1.28746E-3	-8.80005E1	1.90735E-4	5.07832E-3	9.33886E-2	1.57395E1	-1.98575E1	-1.99641E1	1.50172E1	2.15519E-9	2.51662E-3	2.51662E-3	6.28006E-3	2.16125E-2
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80027E1	-1.0252E-3	-8.80001E1	0.0E0	5.57899E-3	9.30309E-2	1.57949E1	-1.98605E1	-1.99703E1	1.49848E1	2.15519E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.1575E-2
1.6E1	2.2E1	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80026E1	-1.28746E-3	-8.79998E1	7.15256E-5	5.05447E-3	9.34362E-2	1.58035E1	-1.98681E1	-1.98951E1	1.50238E1	2.15987E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.16689E-2
1.7E1	5.4E1	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80025E1	-1.0252E-3	-8.79999E1	9.53674E-5	5.10216E-3	9.29832E-2	1.57933E1	-1.98356E1	-2.00345E1	1.4989E1	2.15533E-9	2.5131E-3	2.5131E-3	6.3074E-3	2.16621E-2
1.8E1	1.71E2	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80024E1	-9.29832E-4	-8.79998E1	2.14577E-4	5.29289E-3	9.32217E-2	1.58392E1	-1.98694E1	-1.98482E1	1.5001E1	2.15987E-9	2.52373E-3	2.52373E-3	6.31563E-3	2.16219E-2
1.9E1	3.19E2	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80024E1	-7.86781E-4	-8.79999E1	2.86102E-4	5.29289E-3	9.34839E-2	1.57584E1	-1.988E1	-1.99355E1	1.49686E1					
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80023E1	-9.29832E-4	-8.8E1	1.19209E-4	5.26905E-3	9.35078E-2	1.5779E1	-1.98482E1	-2.00469E1	1.49929E1	2.15907E-9	2.52236E-3	2.52236E-3	6.3074E-3	2.171E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80022E1	-1.07288E-3	-8.80001E1	-1.43051E-4	5.24521E-3	9.32217E-2	1.58345E1	-1.98877E1	-1.99142E1	1.50088E1	2.15894E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.16313E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80024E1	-1.04904E-3	-8.8E1	-7.15256E-5	4.98295E-3	9.33647E-2	1.58053E1	-1.98657E1	-1.99354E1	1.4956E1	2.15636E-9	2.52025E-3	2.52025E-3	6.31798E-3	2.15831E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80024E1	-1.04904E-3	-8.79999E1	0.0E0	5.126E-3	9.34601E-2	1.57795E1	-1.98735E1	-2.00471E1	1.50154E1	2.15706E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.16313E-2