[Scan]
initial_time=2016-01-28T15:42:51
final_time=2016-01-28T15:43:11
ip_count=19
run=1026
dataset=1
scan=2
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.84415E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.86045E-10
ql2_vset=
ql2_vmon=-1.19209E-3
ql2_imon=1.21844E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.38735E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.43525E-8
mult1=-9.22746E-9
mult2=-2.62331E-9
rf_tmon=-5.02859E-3
rf_agc=3.28077E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=6.09124E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.51612E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19682E1
lens5a_imon=1.98091E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54175E1
cs_ef1b_imon=3.12722E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02027E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0503E1
cs_ea1_imon=1.25812E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08522E0
lens1_imon=1.31928E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64452E1
os_ef1alow_imon=2.95891E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.41205E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84586E1
cs_ef1a_imon=3.00324E-5
olens2_vset=0.0E0
olens2_vmon=1.07288E-3
olens2_imon=1.0267E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.31833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.42576E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=9.76208E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=2.04675E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=4.37345E-9
tplens_vset=0.0E0
tplens_vmon=-1.60178E0
tplens_imon=-4.72384E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98369E1
iondef3_imon=8.64454E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98588E1
iondef2_imon=9.33309E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=8.52156E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=9.3439E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33844E1
lens5b_imon=2.18819E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74465E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24309E0
os_ea2_imon=-5.73322E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71606E1
cs_ef2a_imon=3.19569E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0912E0
os_ef2alow_imon=-2.85737E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73998E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11189E1
os_restr2_imon=3.37517E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29207E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.09468E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58268E1
iondef1_imon=5.02517E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50201E1
iondef4_imon=5.07857E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.67014E-8
olens1_vset=0.0E0
olens1_vmon=1.26362E-3
olens1_imon=1.22568E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17039E0
cs_ionaccel_imon=-9.40055E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47093E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=1.56676E-1
window_imon=-1.26081E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.86236E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.80459E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.86009E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.24222E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47675E0
defgridb_imon=5.96246E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33157E1
os_fil1_imon=9.40516E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07437E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60858E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30483E1
cs_fil1_imon=9.23229E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35569E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6243E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55092E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82698E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.88399E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.68399E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.0374E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21291E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32978E-3
inlet_lpb_pmon=2.16377E-2
chamber_ion_pmon=2.15696E-9
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.74909E-1
res40_imon=-2.68437E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=223
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.63E2	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80027E1	-1.07288E-3	-8.80005E1	-1.43051E-4	4.76837E-3	9.30786E-2	1.57684E1	-1.98706E1	-1.99502E1	1.50226E1	2.15533E-9	2.52276E-3	2.52276E-3	6.31548E-3	2.17547E-2
2.0E0	1.92E2	0.0E0	3.16E2	1.6E2	-7.40967E-2	-8.80025E1	-1.14441E-3	-8.8E1	1.90735E-4	5.00679E-3	9.31501E-2	1.58069E1	-1.98673E1	-1.98343E1	1.50028E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80025E1	-1.04904E-3	-8.80004E1	2.38419E-4	5.36442E-3	9.29832E-2	1.57926E1	-1.98535E1	-1.9962E1	1.49968E1	2.1549E-9	2.52521E-3	2.52521E-3	6.33592E-3	2.16639E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.39421E-2	-8.80025E1	-1.43051E-3	-8.80002E1	-2.38419E-4	4.88758E-3	9.31263E-2	1.58262E1	-1.98517E1	-1.99561E1	1.50057E1	2.15716E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.15883E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40967E-2	-8.80025E1	-1.14441E-3	-8.79999E1	0.0E0	5.24521E-3	9.33886E-2	1.57686E1	-1.98903E1	-2.00423E1	1.50256E1	2.15992E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.1885E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80026E1	-8.58307E-4	-8.80001E1	2.38419E-5	5.45979E-3	9.33647E-2	1.57821E1	-1.98724E1	-1.98292E1	1.50045E1	2.15716E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.16621E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80025E1	-7.62939E-4	-8.80001E1	-3.33786E-4	5.19753E-3	9.34362E-2	1.58006E1	-1.98581E1	-1.98562E1	1.50066E1	2.15636E-9	2.52448E-3	2.52448E-3	6.3074E-3	2.16192E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80026E1	-1.3113E-3	-8.79999E1	-1.19209E-4	5.24521E-3	9.33647E-2	1.58479E1	-1.98551E1	-2.00975E1	1.50415E1	2.1549E-9	2.51952E-3	2.51952E-3	6.3245E-3	2.16443E-2
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80026E1	-1.3113E-3	-8.80001E1	1.19209E-4	5.126E-3	9.3317E-2	1.575E1	-1.98609E1	-2.00159E1	1.50316E1	2.15685E-9	2.51384E-3	2.51384E-3	6.29603E-3	2.16443E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80024E1	-1.0252E-3	-8.80001E1	3.33786E-4	5.22137E-3	9.32932E-2	1.58846E1	-1.98938E1	-1.97855E1	1.50138E1	2.15716E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.17547E-2
1.4E1	6.0E0	0.0E0	5.66E2	3.82E2	-7.40967E-2	-8.80024E1	-1.00136E-3	-8.80004E1	-2.14577E-4	5.14984E-3	9.31978E-2	1.58062E1	-1.98606E1	-2.01134E1	1.50124E1	2.15441E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.17176E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.39421E-2	-8.80021E1	-1.40667E-3	-8.80002E1	1.19209E-4	5.31673E-3	9.29832E-2	1.58101E1	-1.98579E1	-1.99504E1	1.49926E1	2.15505E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.15422E-2
1.6E1	2.0E1	0.0E0	6.47E2	4.41E2	-7.46377E-2	-8.80025E1	-1.28746E-3	-8.79999E1	4.05312E-4	5.36442E-3	9.32455E-2	1.57808E1	-1.98558E1	-1.99921E1	1.50172E1	2.15992E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.15331E-2
1.7E1	5.8E1	0.0E0	6.87E2	4.7E2	-7.48695E-2	-8.80021E1	-1.12057E-3	-8.79999E1	3.33786E-4	5.34058E-3	9.30548E-2	1.57662E1	-1.98675E1	-2.0133E1	1.5001E1	2.15808E-9	2.52707E-3	2.52707E-3	6.33436E-3	2.17361E-2
1.8E1	1.75E2	0.0E0	7.27E2	5.0E2	-7.43285E-2	-8.80021E1	-1.00136E-3	-8.79998E1	3.8147E-4	4.93526E-3	9.29356E-2	1.58089E1	-1.98837E1	-1.99408E1	1.50028E1	2.15987E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.17633E-2
1.9E1	3.24E2	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80025E1	-9.05991E-4	-8.8E1	1.43051E-4	5.55515E-3	9.30071E-2	1.58186E1	-1.9833E1	-1.99825E1	1.49987E1	2.158E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.15563E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.44831E-2	-8.80025E1	-1.3113E-3	-8.80001E1	2.14577E-4	5.34058E-3	9.32455E-2	1.58041E1	-1.98693E1	-1.98789E1	1.49998E1	2.15716E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.16252E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80025E1	-1.0252E-3	-8.80003E1	-1.90735E-4	4.88758E-3	9.35793E-2	1.57668E1	-1.98705E1	-1.98525E1	1.50076E1	2.15716E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.15699E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.41738E-2	-8.80025E1	-1.33514E-3	-8.80001E1	-7.15256E-5	4.98295E-3	9.31263E-2	1.58462E1	-1.98446E1	-2.00357E1	1.5004E1	2.15706E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.16501E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80024E1	-1.19209E-3	-8.79999E1	-2.38419E-5	4.69685E-3	9.32932E-2	1.58268E1	-1.98588E1	-1.98369E1	1.50201E1	2.15696E-9	2.51693E-3	2.51693E-3	6.32978E-3	2.16377E-2