[Scan]
initial_time=2016-01-28T15:43:44
final_time=2016-01-28T15:44:04
ip_count=19
run=1026
dataset=1
scan=4
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.80596E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.76437E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.26594E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.39296E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.43538E-8
mult1=-9.23928E-9
mult2=-2.80165E-9
rf_tmon=-4.60386E-3
rf_agc=3.31852E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=6.17743E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64495E0
bslens_imon=2.3539E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19792E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.04982E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54553E1
cs_ef1b_imon=3.10415E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.01994E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04783E1
cs_ea1_imon=1.24554E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06406E0
lens1_imon=1.4525E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64474E1
os_ef1alow_imon=2.93535E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04318E1
cs_ea2_imon=1.41482E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84027E1
cs_ef1a_imon=3.006E-5
olens2_vset=0.0E0
olens2_vmon=1.26362E-3
olens2_imon=1.01365E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11194E1
os_restr1_imon=4.29172E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.43767E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63734E1
os_ef1bup_imon=3.12319E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24011E0
cs_ionrep_imon=9.69202E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93196E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02027E1
cs_anode1_imon=2.04901E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=4.34442E-9
tplens_vset=0.0E0
tplens_vmon=-1.59841E0
tplens_imon=-3.75677E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98281E1
iondef3_imon=8.66367E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9847E1
iondef2_imon=9.54813E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02887E2
lens6_imon=2.98261E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=8.18491E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27255E0
ionrepsh_imon=9.44234E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33355E1
lens5b_imon=2.16598E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74967E1
cs_ef2b_imon=3.16E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23376E0
os_ea2_imon=-5.87272E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00394E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71251E1
cs_ef2a_imon=3.14223E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11731E0
os_ef2alow_imon=-2.69863E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.53236E-1
os_ef2bup_imon=-5.48669E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1082E1
os_restr2_imon=3.36604E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.2942E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01822E1
cs_anode2_imon=2.08962E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57755E1
iondef1_imon=5.13426E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49806E1
iondef4_imon=5.19593E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.67047E-8
olens1_vset=0.0E0
olens1_vmon=1.21593E-3
olens1_imon=1.22011E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16963E0
cs_ionaccel_imon=-1.11634E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47239E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56116E1
einzel_imon=7.72169E-6
window_vset=0.0E0
window_vmon=1.43043E-1
window_imon=-1.02326E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39038E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-7.86338E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92606E3
multa_neg_imon=7.94847E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93687E3
defgrida_imon=6.5985E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=6.96244E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43046E0
defgridb_imon=5.91716E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33174E1
os_fil1_imon=9.40298E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06955E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60221E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3046E1
cs_fil1_imon=9.22592E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.48865E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61497E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55652E-2
os_fil2_imon=-2.50222E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82724E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.29927E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37707E-1
cs_fil2_imon=-2.0721E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.74038E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2096E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.16125E-2
chamber_ion_pmon=2.15519E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40079E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28812E-1
res40_imon=-2.47017E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.97E2	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80022E1	-1.07288E-3	-8.8E1	-2.38419E-5	5.00679E-3	9.36747E-2	1.58293E1	-1.98513E1	-1.99089E1	1.49824E1	2.15257E-9	2.51465E-3	2.51465E-3	6.3074E-3	2.16313E-2
2.0E0	1.47E2	0.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80024E1	-1.00136E-3	-8.80003E1	-1.19209E-4	5.03063E-3	9.34839E-2	1.57695E1	-1.98679E1	-1.99989E1	1.50303E1	2.159E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.16621E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80023E1	-1.09673E-3	-8.80002E1	1.66893E-4	5.03063E-3	9.31978E-2	1.57954E1	-1.98521E1	-1.98793E1	1.50109E1	2.15505E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.16569E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80022E1	-1.09673E-3	-8.80003E1	-2.38419E-5	5.10216E-3	9.31978E-2	1.58203E1	-1.98602E1	-2.00665E1	1.50004E1	2.15726E-9	2.52131E-3	2.52131E-3	6.32328E-3	2.16555E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80022E1	-9.77516E-4	-8.80004E1	-2.38419E-4	5.45979E-3	9.35078E-2	1.57218E1	-1.98569E1	-1.98759E1	1.49944E1	2.15533E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.16436E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80023E1	-9.29832E-4	-8.80003E1	-9.53674E-5	5.19753E-3	9.34362E-2	1.58457E1	-1.98776E1	-1.99661E1	1.50124E1	2.156E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.15994E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80024E1	-1.0252E-3	-8.80004E1	-7.15256E-5	5.57899E-3	9.33409E-2	1.58645E1	-1.986E1	-1.99939E1	1.49877E1	2.15817E-9	2.52448E-3	2.52448E-3	6.3074E-3	2.16736E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80026E1	-1.04904E-3	-8.80004E1	2.14577E-4	5.55515E-3	9.35316E-2	1.57789E1	-1.9817E1	-2.00339E1	1.50064E1	2.15533E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.16436E-2
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80023E1	-1.16825E-3	-8.80001E1	-1.43051E-4	5.10216E-3	9.34839E-2	1.57783E1	-1.98609E1	-1.98591E1	1.50148E1	2.15409E-9	2.51693E-3	2.51693E-3	6.27954E-3	2.15994E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80024E1	-1.35899E-3	-8.80005E1	-2.86102E-4	5.19753E-3	9.33647E-2	1.58185E1	-1.98831E1	-2.01042E1	1.49812E1	2.16269E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.16689E-2
1.4E1	6.0E0	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80021E1	-1.28746E-3	-8.8E1	4.76837E-5	5.19753E-3	9.34362E-2	1.58263E1	-1.98837E1	-2.01276E1	1.50437E1	2.15257E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.18104E-2
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80022E1	-1.00136E-3	-8.80002E1	0.0E0	5.6982E-3	9.33409E-2	1.57939E1	-1.98819E1	-2.00303E1	1.49674E1	2.15706E-9	2.52757E-3	2.52757E-3	6.30192E-3	2.16878E-2
1.6E1	1.2E1	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80023E1	-1.16825E-3	-8.80004E1	-2.38419E-4	5.31673E-3	9.34124E-2	1.58329E1	-1.98476E1	-1.98032E1	1.50088E1	2.15696E-9	2.51581E-3	2.51581E-3	6.32418E-3	2.15994E-2
1.7E1	3.1E1	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80023E1	-1.00136E-3	-8.80005E1	1.90735E-4	5.6982E-3	9.32455E-2	1.57566E1	-1.98446E1	-2.00219E1	1.49782E1	2.15716E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.16067E-2
1.8E1	1.77E2	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80026E1	-1.07288E-3	-8.79999E1	-1.43051E-4	5.55515E-3	9.34601E-2	1.57777E1	-1.98519E1	-1.98945E1	1.49902E1	2.15987E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.16689E-2
1.9E1	3.41E2	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80026E1	-1.21593E-3	-8.8E1	2.38419E-5	5.50747E-3	9.33886E-2	1.57981E1	-1.98537E1	-2.00796E1	1.50112E1	2.15987E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.16689E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80023E1	-1.21593E-3	-8.80001E1	9.53674E-5	5.34058E-3	9.33647E-2	1.58128E1	-1.98608E1	-1.98956E1	1.50138E1	2.15987E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.16313E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80023E1	-9.77516E-4	-8.80001E1	3.09944E-4	5.00679E-3	9.31978E-2	1.58059E1	-1.98609E1	-2.01258E1	1.49824E1	2.15808E-9	2.52061E-3	2.52061E-3	6.28592E-3	2.15883E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80022E1	-1.09673E-3	-8.8E1	2.38419E-5	5.38826E-3	9.33647E-2	1.57747E1	-1.98633E1	-1.99774E1	1.5013E1	2.15808E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.15883E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80021E1	-9.05991E-4	-8.80003E1	4.76837E-5	5.05447E-3	9.32693E-2	1.57755E1	-1.9847E1	-1.98281E1	1.49806E1	2.15519E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.16125E-2